Description
Plasmatherm RIE Etching System
Plasmatherm VLR RIE module, Single wafer manual load system, no Load Lock. RIE system, Leybold 361C turbo with Leybold controller, Gate Valve, Advanced Energy RF5S 1000W RF 13.56MHz power supply with match work and tuner. 11″ lower platen, 13″ shower head. four Mass Flow Controllers (but additional ones can be added for an additional fee) . Can offer installation & training as well.
SS181761250482
