Description

Plasma-Therm etchers 

We have two Plasma-Therm DSE etchers for sale:

• Plasma-Therm Versaline DSE-III
• Plasma-Therm SLR 770 ICP

1. Plasma-Therm Versaline DSE-III (Deep Silicon Etcher)
   single chamber with single wafer semi-auto load lock
   – Vintage 2012
   Main specification :
   – Application: deep silicon etch
   – Substrate size: 4”,6”,8”. Mechanical clamp -40C..+40C with Affinity chiller
   – Semi-auto load lock, single wafer
   – Plasma-Therm ICP-II DSE 3-turn source
   – 3.5kW, 2MHz ICP RF package (5kW limited to 3.5kW)
   – High-Speed Process Modulation w/ 1-100kHz DBS RF package for DSE
   – Heated chamber 180C
   – Optical End Point Detection
   – Gas box with 4 lines (C4F8, SF6, Ar, O2. 400/600/50/50sccm)
   – Fast gas switching option for DSE
   – User terminal mobile cart
   – Edwards ih80 dry pump
   – Edwards xds35i load lock dry pump
   – Edwards 1300l/s STPA turbo
   – 380VAC 3 phase (with transformer)
   – Low Maintenance Package
2. Plasma-Therm SLR 770 ICP (Deep Silicon Etcher)
   single chamber with single wafer semi-auto load lock
   – Vintage 1998
   Main specification :
   – Application: deep silicon etch
   – Substrate size: 4”
   – Semi-auto load lock, single wafer
   – 1.0kW ICP RF package (2kW generator limited to 1.0kW)
   – 500W RF bias
   – Gas box with 5 lines (CHF3, C4F8, SF6, Ar, O2)
   – ThermoFlex 900 chiller
   – Edwards ih80 dry pump
   – Edwards nxds load lock dry pump
   – Load lock small turbo pump Leybold
   – Edwards STPA-1303CV turbo
   – 380VAC 3 phase
   – Through-wall installation package

Location: Asia

SSSS10683-S-1

All the Plasma-Therm etchers trademarks belongs to OEM , the original equipment manufacturer. All rights reserved.