Pfeiffer Vacuum Classic 590

Pfeiffer Vacuum Classic 590 Evaporator PVD Sputtering system

2x Pfeiffer Classic 590

Configuration Coater 1:

• 2x Pfeiffer TPH 2301 (2300ls) completely overhauled
• Pfeiffer DCU 600
• 2x VAT Throttle Valve 64048-pe48-ads2/0001
• 1x Pfeiffer PKR251 fullrange sensor
• Pfeiffer TPR280 for prevacuum
• Pfeiffer DUO 120 prepump (120m3/h)
• Vacuumchamber:
  • for substrate size round 840mm
  • incl shielding and spare shielding set
  • 2x viewport
  • Several feedthroughs
  • Rotating feedthrough incl thermocouple
  • Infrared heater
  • Watermanifold plus valves
  • Vacuumvalves for venting-pumpdown etc

Notes: Currently used for Resistance Evaporation (no boats available)

Current PLC and E-cabinet is removed due to IP. However: if required we can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)

Configuration Coater 2:

• 2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled
• Pfeiffer DCU 600
• 2x VAT Throttle Valve 64048-pe48-ads2/0001
• 1x Pfeiffer PKR251 fullrange sensor
• Pfeiffer TPR280 for prevacuum
• Pfeiffer DUO 120 prepump (120m3/h)
• Vacuumchamber:
  • for substrate size round 840mm
  • incl shielding and spare shielding set
  • 2x viewport
  • Several feedthroughs
  • Rotating feedthrough incl thermocouple
  • Infrared heater
  • Watermanifold plus valves
  • Vacuumvalves for venting-pumpdown etc

Notes: Current used for Resistance Evaporation (no boats available)

Current PLC and E-cabinet is removed due to IP. However: if required we can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)