Oxford PlasmaLab RIE-80

Description

Oxford PlasmaLab RIE-80 uWave Industrial Plasma Etching System

 

Oxford PlasmaLab RIE-80 uWave Industrial Plasma Etching System + ASTEX S250 Unit

  • Model: RIE80
  • Unit includes two modules within interior housing:
    • ASTEX S-250 Microwave Power Generator
    • ENI Matchwork Controller Unit

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