Description
Oxford PlasmaLab RIE-80 uWave Industrial Plasma Etching System
Oxford PlasmaLab RIE-80 uWave Industrial Plasma Etching System + ASTEX S250 Unit
- Model: RIE80
- Unit includes two modules within interior housing:
- ASTEX S-250 Microwave Power Generator
- ENI Matchwork Controller Unit
SS132374754314