Description
Oxford Plasma Technology RIE-80 Plasma Etching System
System is In Good Physical Condition.
The Oxford MicroP Is A Small Research RIE Etching System And Has The Following Features:
Specifications
-
RIE Parallel Plate Electrodes
- Capacitance Manometer
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Three Channels of Process Gas [Mass Flow Controllers]
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600 Watt ENI RF Power
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Process Timer
-
Vent Valve
SS131495407345
