Description
Novellus Gasonics PEP 3010A High Throughput Plasma Asher
Key features of the 3010A include lamp-based chamber heating, which enables rapid changes in chamber temperature, and closed-loop temperature control for precise monitoring of wafer temperature during processing. User friendly graphical user interface, which facilitates the tracking of wafer statistics.
• Through-the-Wall Installation
• Wafer Handler: PEP 3010A/A(H)
• Build Configuration: 97-3250
• Dual Cooling Stations
• Yaskawa Robot
• XU-CM4730 (2/2004), s/nS3K594-2-02
• Controller: IBM 7587 w/CD-ROM
• 208VAC, 60Hz, 3Phase WYE, 20A
• Left Module: PEP3010A/A (L)
• Build Configuration: 95-2712
• AGL Microwave Generator
• Process Controller: IBM 7587
• Gas Configuration: O2, N2, Forming, N2, CDA
• Right Module: PEP3010A/A (R)
• Build Configuration: 95-2715
• AGL Microwave Generator
• Process Controller: IBM 7587
• Gas Configuration: O2, N2, Forming, N2, CDA
• Qty 2 – Edwards QDP 80 Dry Pumps.
SS281927925913
