Description
Please contact us for the Nevellus Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.
| OEM PART #: | Material | Tool | DESCRIPTION: |
| 15-00699 | Sapphire | Clamp for Concept I/II | |
| 15-054296 | Sapphire | Rod Sapphire | |
| 15-110411-00 | Sapphire | Window Sapphire | |
| 15-154277-00 | Rod Sapphire | ||
| 15-00457-00 | Nickel | Screw | |
| 15-108174-00 | Cup | ||
| 15-114331-00 | Screw | ||
| 15-00399-00 | Nickel | Concept 1 | Screw 200 (0.5) |
| 15-08386-00 | Nickel | Washer #10 Nickel | |
| 15-00721-00 | Nickel | Nickel Bolt Screw | |
| 16-033932-00 | 6061 Plate Stock | Concept 1 | 150mm Showerhead |
| 02-00343-01 | Harness Assembly, Sensor, 25.5″ | ||
| 02-00343-02 | Harness Assembly, Sensor, 12.0″ | ||
| 02-00343-03 | Harness Assembly, Sensor, 17.5″ | ||
| 02-00343-04 | Harness Assembly, Sensor, 26.5″ | ||
| 02-00397-00 | Harness Assembly, Sensor 26.5″ | ||
| 10-00072-00 | Insulator, Gas Distribution | ||
| 15-00027-00 | Guide, Nozzle Adjuster | ||
| 15-00043-02 | Ceramic | Concept 1 | Adjuster, Ceramic, Gas Plate |
| 15-00229-00 | Aluminum | Nut, Hex, 1/2-20, Alum | |
| 15-00309-00 | Concept 1 | Hanger, Nozzle, 1.33″ (150mm) | |
| 15-00309-01 | Concept 1 | Hanger, Nozzle, 1.50″ (200mm) | |
| 15-000311-00 | Nickel | Nut, Cap, 1/4-20, Ni | |
| 15-00341-00 | Nickel | Screw, 1/4-20 x 1/4, Ni | |
| 15-00371-00 | Nickel | Nut, Hex, 1/4-20, Ni | |
| 15-00372-00 | Nickel | Washer, 1/4″ Ni | |
| 15-00385-00 | Nickel | Nut, 10-32 Ni | |
| 15-00386-00 | Nickel | Concept 1 | Washer, Flat, #10, Ni |
| 15-00399-02 | Nickel | Screw, Top spindle, Ni | |
| 15-00399-03 | Nickel | Screw, Top spindle, Ni | |
| 15-00399-04 | Nickel | Concept 1 | Screw, 1.02LG, Top Spindle, Ni |
| 15-00399-05 | Nickel | Concept 1 | Screw, 1.12LG Top spindle, Ni |
| 15-00475-00 | Concept 1 | Insulator, Gas Feedthrough Ceramic | |
| 15-00483-00 | Ceramic | Ring, Heater Hub, Ceramic | |
| 15-00484-00 | Ceramic | 10 pieces rack 6 | Ring, Heater Centering, Caramic |
| 15-00485-00 | Bracket, Paddle, 150mm | ||
| 15-00553-05 | Shim, Heater, .005″, Flat | ||
| 15-00553-10 | Shim, heater, .010″, Flat | ||
| 15-00553-18 | Shim, Heater, .018″, Flat | ||
| 15-00553-25 | Shim, Heater, .025″, Flat | ||
| 15-00553-31 | Shim, Heater, .31″, Flat | ||
| 15-00544-05 | Shim, Heater, .005″, V-Type | ||
| 15-00544-10 | Shim, Heater, .010″, V-Type | ||
| 15-00544-18 | Shim, Heater, .018″, V-Type | ||
| 15-00544-25 | Shim, Heater, .025″, V-type | ||
| 15-00544-31 | Shim, Heater, .031″ V-Type | ||
| 15-00558-01 | Ceramic | Sleeve, Heater Lead, 2.00″, Ceramic | |
| 15-00558-02 | Ceramic | Sleeve, Heater Lead, 2.75″, Ceramic | |
| 15-00567-00 | Ceramic | Tube, TC, 1/8″ ID, Ceramic | |
| 15-00680-00 | Ceramic | Sleeve, Flanged, AC Feedthrough, Ceramic | |
| 15-00653-00 | Clamp, spindle Hub Mount | ||
| 15-00654-00 | Concept 1 | Clamp, Rotation Adjustment | |
| 15-00680-00 | Ceramic | Sleeve, TC Ceramic | |
| 15-00684-00 | Ceramic | Cap, TC, 1/16″ ID, Ceramic | |
| 15-00685-00 | Concept 1 | Feedthrough, 3/8: O-Seal, UltraTorr | |
| 15-00686-00 | Aluminum | Concept 1 | Washer, Feedthrough, 1/2″ ID, Alum |
| 15-00698-00 | Nickel | Concept 1 | Fork Screw, Ni |
| 15-00699-01 | Concept 1 | Fork, Finger, 150mm | |
| 15-00699-02 | Fork finger, 200mm | ||
| 15-00700-00 | Plate, fork Retainer, Bottom, 200mm | ||
| 15-00701-00 | Plate, Fork Retainer, Bottom, 150mm | ||
| 15-00702-00 | Plate, Fork Retainer, Top, 200mm | ||
| 15-00703-00 | Concept 1 | Plate, Fork Retainer, Top, 150mm | |
| 15-00721-00 | Nickel | Washer, #8, Ni | |
| 15-00729-00 | Concept 1 | Clamp, Flat | |
| 15-00730-00 | Flange, Keyed (Replaced by 15-032631) | ||
| 15-00731-00 | Ceramic | Concept 1 | Bushing, Keyed, Ceramic |
| 15-00742-00 | Ceramic | Tube, TC Ceramic | |
| 15-00951-00 | Cup, Screw Cover | ||
| 15-01111-00 | Paddle, Optical 150mm | ||
| 15-01122-00 | Bracket, Paddle, 200mm | ||
| 15-01127-00 | Paddle, Optical, 200mm | ||
| 15-01146-00 | Panel, side LL | ||
| 15-032014-00 | Window, Quartz, Etch Resistant | ||
| 15-032631-00 | Flange, Keyed | ||
| 15-053394-01 | Min contact Area, Fork, 150mm | ||
| 15-053394-02 | Min Contact Area, Fork, 200mm | ||
| 16-00092-00 | Ceramic | wire, Insulated, Ceramic Bead, Short | |
| 16-00098-00 | Ceramic | Wire, Insulated, Ceramic Bead, Long | |
| 16-033931-00 | Showerhead, Pinned, 200mm | ||
| 17-00094-01 | Aluminum | Strap, LF Bias, Laum | |
| 17-00148-00 | Concept 1 | Spring, Fork | |
| 19-00056-00 | Feedthrough Assy, Electrical | ||
| 20-00153-00 | Ceramic | Ball, Heater Support, 2.00″, Ceramic | |
| 20-00212-00 | Aluminum | Concept 1 | Nut, 8-32 UNC-2B, Alum |
| 22-00179-00 | Concept 1 | Elbow, Union, 3/8″ O-Seal | |
| 27-00010-01 | Thermocouple, Type J, 1/8″ | ||
| 27-00079-00 | Thermocouple, Type J, 1/16″ | ||
| 27-00127-00 | Thermocouple, Type E, LG | ||
| 34-000133-00 | Teflon | Sealant, Teflon FT (used in 19-00056-00) | |
| 60-00033-00 | Filter, Backfill | ||
| 02-00363-00 | Kit, Wafer Size With platform, Optical, 200mm | ||
| 02-00364-00 | Kit, Wafer Size With Platform, Optical, 150mm | ||
| 05-00221-02 | Microcontacmination Upgrad | ||
| 05-00229-00 | Station, Cooling Upgrade | ||
| 05-027019-00 | External Heated Gate & Throttle Valves | ||
| 02-029514-01 | Indexer Assy, Left, C2 | ||
| 02-029514-02 | Indexer Assy, Right C2 | ||
| 15-103913-00 | Clamp Strap Feedthru | ||
| 15-108307-00 | Clamp RF Strap Aluminum | ||
| 15-253122-00 | Copper | Anode, Copper 8″ Round | |
| 15-00558-02 | Ceramic | Alumina Short Tube | |
| 06-0142 | Gasonic | Showerhead Disk | |
| 17303-01 | Gasonic | Plate Middle Showerhead | |
| 06-301-01 | Quartz | Gasonic | Window 10″ |
| 06-0152 | Quartz | Gasonic | Showerhead 150mm Bottom |
| 17302-01 | Quartz | Gasonic | Showerhead Upper Chamber |
| 17304-01 | Quartz | Gasonic | ShowerHead Lower Chamber |
| A06-010-01 | Quartz | Gasonic | Plasma Tube Gasonic A1000 |
| A06-300-01 | Quartz | Gasonic | Window Vented 9.5″ |
| 15-00027-02 | Concept 1 | Guide Nozzle Adjuster | |
| 17621-01 | Quartz | Quartz Plate | |
| 02-252596-00 | Heater | Pedestal Heater Referb. | |
| Quartz | Plasma Tube Quartz | ||
| 02-252432-00 | 12″ Spindle Assy | ||
| 02-259457-00 | 12″ Spindle Assy | ||
| 16-129269-00 | 12″PreClean pedestal bellows | ||
| 60-135033-00 | 12″ Welded Bellow | ||
| 16-100488-00 | 300mm Shower Head | ||
| 16-132590-00 | CVD Vector | 300mm Shower Head | |
| 16-256994-00 | 300mm Shower Head | ||
| 15-00311-00 | Nut Cap 1/4-20, Ni | ||
| 19-00266-01 | Motor Ext-Direct Replacement | ||
| 19-00267-01 | Motor Rot-Direct Replacement | ||
| 19-00268-01 | Motor Lift-Direct Replacement | ||
| 27-00029-00 | Quad Power Supply-Direct Replacement | ||
| 27-00066-00 | 24 V Power Supply-Direct Replacement | ||
| R02-00093-00 | Referbishment One-Arm Robot-Exchange | ||
| R02-00093-00 | Referbishment One-Arm Robot- Purchase | ||
| 02-00099-00 | Robot Rebuild Kit | ||
| 02-00363-00 | Kit Wafer Size W/Platform Optical 200mm | ||
| 02-00364-00 | Kit Wafer Size W/Platform Optical 150mm | ||
| 05-00221-02 | Microcontacmination Upgrad | ||
| 05-00229-00 | Station Cooling Upgrade | ||
| 04-128956-00 | 12″ Welded Bellow | ||
| 19-00155-01 | Heater Block 150mm | ||
| 0067450500 | Ceramic Clamp Ring, 4″ | ||
| 0067478200 | Ceramic Clamp Ring, 5″ | ||
| 0068221600 | Ceramic Clamp Ring, 6″ | ||
| 02-054574-00 | Assy. Holder, MOER Ring | ||
| 15-00409-00 | Window, Pyrex | ||
| 15-00866-00 | Ceramic Spring, 6″ | ||
| 15-01025-00 | Ring, Cap , Manometer | ||
| 15-028766-00 | Ring, Guard, 200mm | ||
| 15-032016-00 | Pin, Vented for Htr. Block | ||
| 15-032502-00 | Pin, Wafer Lift | ||
| 15-032777-00 | Excl Ring, 200mm, 2.0mm, OH, Semi | ||
| 15-032939-00 | Excl Ring, 200mm, 2.25mm, OH, Semi | ||
| 15-033947-00 | Protective E-Chuck Cover, Ceramic (PEC) | ||
| 15-034333-00 | Tube, Process Injector | ||
| 15-034333-00 | Tube, Process Injector, SPEED, 4.13″ | ||
| 15-050160-15 | Tube, Injector, High Purity, 1.5″ | ||
| 15-052619-00 | Ceramic Tong, 8″ | ||
| 15-053271-02 | Injector 8″ Long Clean, 300mm | ||
| 15-053394-04 | Dimpled Fork Finger, 8″ | ||
| 15-054434-01 | Excl Ring, 200mm, 3.0mm, OH, Semi | ||
| 15-054583-00 | Clip Retaining, MOER Holder | ||
| 15-054595-00 | Screw, Ceramic, 1/4-28, Guide | ||
| 15-055546-04 | Pin, Wafer Lift | ||
| 15-100263-00 | Robot Paddie, Ceramic | ||
| 15-100603-00 | Insulator, Gas Dist. | ||
| 15-103651-00 | Ring, Guard, Counterbore, 200mm, High Purity | ||
| 15-104289-00 | Wheel Block, Ped, Ceramic | ||
| 15-10715-00 | Altus Ceramic Ring (no holes) 2.0mm | ||
| 15-107698-00 | Cap. Ceramic, Feedthru | ||
| 15-108330-00 | Ceramic Spring, 8″ | ||
| 15-112447-02 | I Pin for W-Dep Heater Pedestal | ||
| 15-11263-02 | Quartz | View Port Window, STI, Quartz with Sapphire Coating | |
| 15-11507-00 | Excl Ring, 200mm, 1.5mm, OH, Semi | ||
| 15-11606-00 | Insulator, Gas Dist | ||
| 15-120150-01 | Nanofill injector, 2.3″ | ||
| 15-120150-03 | Nanofill Injector, 0.50″ | ||
| 15-120150-04 | Nanofill Injector, 2.8″ | ||
| 15-122086-00 | Clampable E-Chuck Cover, (C-PEC w/OD Flat) | ||
| 15-122178-00 | 300mm Carrier Ring | ||
| 15-123086-01 | Tube, Injector, 7.5″, Closed End Long | ||
| 15-144133-00 | Excl Ring, 200mm, 2.75mm, OH, Semi | ||
| 15-149982-01 | Non Copper Guard Ring, 300mm | ||
| 15-151243-00 | Tube, THK, Cleaning, High Purity, 4.13″ | ||
| 15-158026-00 | Injector, 1″ FSG SPEED 300mm | ||
| 15-158185-00 | Nanofill II Clean Tube | ||
| 15-169666-00 | Tube, Injector, Long Closed Tube STI/PSG | ||
| 15-169667-00 | Injector Short Open Tube STI/PSG | ||
| 15-250453-00 | Plug, Sapphire | ||
| 15-250878-00 | Screw, Holder, Retaining | ||
| 15-251847-00 | Injector Short Closed Tube STI/PSG | ||
| 15-256742-00 | Ring, Ceramic with Arc Spray | ||
| 15-278968-00 | Injector Short, Honeycomb, STI/PSG | ||
| 22-100613-00 | MCA Ball, Sapphire, 3/16′ Diameter | ||
| 17-103987-00 | Strap RF | ||
| 15-00401-00 | Shaft Spindle | ||
| 31-00114-00 | Relay, Crydom 90A | ||
| 22-00288-00 | T Seal, Viton, Teflon Backing | ||
| 02-045721-00 | 02-09269-00 | 02-092680 | 6″ Heater Pedestal Refurb |
| 02-033134-00 | 8″ Heater Pedestal Refurb | ||
| 15-00399-03 | HEX Head Bolt, Nickel | ||
| 15-00457-00 | HEX Head Bolt, Nickel | ||
| 15-00457-00 | HEX Head Bolt, Nickel | ||
| 15-00341-00 | HEX Head Bolt, Nickel | ||
| 15-00372-00 | Nickel 1/4″ Flat Washer | ||
| 15-00385-00 | Nickel 10-32 HEX Nut | ||
| 15-00401-00 | Spindle Shaft | ||
| 15-00371-00 | Nikel 1/4-28 HEX Nut | ||
| 15-00293-01 | Left Support Bracket | ||
| 15-00293-02 | Right Support Bracket | ||
| 20-00222-00 | Washer Heater Block Strap | ||
| 15-00698-00 | HEX Head Bolt, Nickel | ||
| 15-00699-01 | Fork Finger | ||
| 15-130746-01 | Fork, Finger, Min Contact Area | ||
| 15-053394-03 | Fork, Finger, Min Contact Area | ||
| 02-111903-0 | Feedthru Assembly, Heater | ||
| 27-10114-00 | Feedthru Assembly, Heater | ||
| 19-00056-00 | Feedthru Assembly, Heater | ||
| 15-108307-00 | Clamp, RF Strap | ||
| 15-114331-00 | Screw Cap, 1/4-20 X .50 LG, NI | ||
| 15-103913-02 | Clamp, Strap, Feedthru | ||
| 15-00935-00 | Screw, 10-32 X .50 LG, VTD, NI | ||
| 17-101-596-00 | Retainer, Fork, SEQ | ||
| 15-101482-00 | Fork Top PLT A Antideflect SEQ | ||
| 15-101482-01 | Fork Top PLT B Antideflect SEQ | ||
| 15-101482-02 | Fork Top PLT C Antedeflect SEQ | ||
| 15-11188-00 | 15-253964-00 | Window, Hatch, TM DLCM | |
| 15-00830-00 | Fitting, 90 DEG, 3/8″ Tube | ||
| 15-032452-00 | Window, Lexan, Chamber | ||
| 15-00839-00 | Screw, 1/4-20 X .90 Vented, NI | ||
| 15-000948-00 | Screw, Pedestal Heater | ||
| 15-01104-00 | Screw, 10-32 X .75, Nickel | ||
| 00-674505-00 | Ceramic Clip Ring, 4″ | ||
| 00-674782-00 | Ceramic Clip Ring, 5″ | ||
| 00-682216-00 | Ceramic Clip Ring, 6″ | ||
| 04-264557-00 | Ceramic Plasma Tube, Dry Etch. | ||
| 05-3024 | Quartz | Tube Quartz Funnel, Gasonic | |
| 06-2619 | Quartz | Plate Quartz TRI Adaptor | |
| 14738-01 | Quartz | Bubbler Quartz | |
| 16337-02 | Quartz | Collar Quartz | |
| 06-2793. | Quartz | Window Quartz | |
| A06-005-01 | Quartz | Quartz Shower Head 5″ | |
| 15-032014-01 | Quartz | Window Quartz Etch Resistant | |
| 472-17286-200 | Old Speedfam P/N | Ring Retaining Carrier 200mm N/Lip PPS (Quadrant) | |
| Quartz | Quartz Tube | ||
| 22-00234-00 | O-RING, 7.48″ X 0.139″, VITON, 150M | ||
| 22-00235-00 | O-RING, 30.12″ X 0.275″, VITON, 150 | ||
| 22-00236-00 | O-RING, 7.45″ X 0.275″, VITON, 150M | ||
| 22-00053-00 | O-RING, 0.676″ X 0.070″, VITON | ||
| 22-00118-00 | O-RING, 1.234″ X 0.139″, VITON | ||
| 22-00134-00 | O-RING, LL WINDOW, 5.975″ X 0.210″, | ||
| 22-00136-00 | O-RING, LL LEFT PLATE, 15.475″ X 0.275,B | ||
| 22-00152-00 | O-RING, 4.600″ X 0.210″, BUNA | ||
| 22-00176-00 | O-RING, 12.975″ X 0.139″, BUNA | ||
| 22-00217-00 | O-RING, 0.484″ X 0.139″, VITON | ||
| 22-00326-00 | O-RING, 27.18″ X 0.275″, BUNA | ||
| 22-00657-00 | O-RING, 7.975″ X 0.210″, KALREZ | ||
| 22-00239-00 | O-RING, 5.984 x 0.139, VITON | ||
| 22-00345-00 | O-RING, 0.362 x 0.170, VITON | ||
| 22-00725-00 | O-Ring, Cooling Station | ||
| 22-00174-00 | O-Ring, 6.234″ x 0.139″, Viton | ||
| 22-00256-00 | O-Ring, 3 1/2″ ID x 3 3/4″ OD x 1/8″ W | ||
| 22-00021-01 | O-Ring, 1.984 x 0.139, Buna | ||
| 22-00344-00 | O-Ring, 0.364 x 0.070, Viton | ||
| 22-00391-00 | O-Ring, 0.864 x 0.070, Viton | ||
| 06-2735. | Quartz | Quartz Tube | |
| A06-012-01 | Quartz | Quartz Diffusion Disc | |
| 40-055609-27 | Quartz | Quartz Rod HDP | |
| Quartz | Plasma Tube Strate | ||
| 04-128956-00 | 12″ Welded Bellow (Novellus) | ||
| 15-151683-00 | Sapphire | Sapphire Window | |
| 40-055609-26 | Quartz | Rod (Pin) Quartz , SPEED | |
| 15-032014-01 | Window Quartz Etch Resistant Coated | ||
| 15-01050-01 | Shims Paddle .002 THK | ||
| 15-01050-02 | Shims Paddle .003 THK | ||
| 15-01050-03 | Shims Paddle .005 THK | ||
| 17-00094-00 | Strap RF | ||
| 22-00630-00 | O-Ring Kit Gate Valve | ||
| 22-00744-00 | Valve Diaphragm 1/8″ VCR Liquid | ||
| 22-00745-00 | Filter 1/8″ VCR 0.5 Micron | ||
| 27-032653-00 | RF Match | RF Match | |
| 93-2657 | Lamp | Doubble Bore Lamp, Ultra Violet | |
| 02-00170-00 | Wafer on Paddel | ||
| 06-2624 | Sapphire | Gasonic | Disk 4.00 x .031 W/Hole |
| 06-2625 | Sapphire | Gasonic | Disk 4.00 x .031 W/Hole |
| 06-2626 | Sapphire | Gasonic | Disk 4.00 x .031 W/Hole |
| 06-2627 | Sapphire | Gasonic | Disk 1.000 x .031 |
| 06-2628 | Sapphire | Gasonic | Tube .394 x .039 x .200 |
| 06-2629 | Sapphire | Gasonic | Disk W/Holes 4.0 |
| 06-2654 | Sapphire | Gasonic | Disk 1.000 x .031 W/Hole |
| 06-2697 | Sapphire | Gasonic | Annulus 3.26 x 6.145 |
| 06-2707 | Sapphire | Gasonic | Tube 1.168 x 0.64 x 1.250 |
| 06-2719 | Sapphire | Gasonic | Rod 0.1181 x 2.85 |
| 06-2725 | Sapphire | Gasonic | Plasma Tube 1.95 x .10 x 2.19 |
| 06-2726 | Sapphire | Gasonic | Showerhead |
| 06-2753 | Sapphire | Gasonic | Disk 1.250 x .125 |
| 15-054277-02 | Sapphire | Rod 0.125 x 4.340 | |
| 15-054296-00 | Sapphire | Rod 0.1830 x .190 | |
| 15-00641-00 | Sapphire | Window 2.306 x 7.125 x .123 | |
| 15-00641-00N | Sapphire | Window 2.306 x 7.125 x .123 | |
| 15-104288-00 | Sapphire | Rod “Lift Pin” .187 x .400 | |
| 15-109369-00 | Sapphire | Rod Lift Pin | |
| 15-110411-00N | Sapphire | Window Sapphire Concept 1 10.25 x 3.0 x .250 | |
| 15-111482-00 | Sapphire | Window 1.17 x 10.25 | |
| 15-122274-00 | Sapphire | Rod 0.123 x 5.180 | |
| 15-133091-00 | Sapphire | Rod 0.123 x 5.180 | |
| 15-136420-00 | Sapphire | Rod 0.123 x 4.702 | |
| 15-136420-00N | Sapphire | Rod 0.123 x 4.702 | |
| 15-136420-01 | Sapphire | Rod 0.123 x 4.702 | |
| 15-170594-00 | Sapphire | Disk 1.95 x .031 | |
| 15-251538-00 | Sapphire | Disk 4.4 | |
| 15-257351-00 | Sapphire | Pin | |
| 15-288460-00 | Sapphire | Lift Pin 0.1875 x 1.00 | |
| 22-054580-00 | Sapphire | Ball. | |
| 22-100613-02 | Sapphire | Ball. | |
| 19-00111-00 | Metal | Lead Screw | |
| 03-00135-00 | Cable | Assy Cable 141 | |
| 15-00578-00 | Ceramic | Heater Feedthrough Ceramic Top Hat | |
| 22-00324-00 | O-Ring | Seal Lip for Robot EXT | |
| 15-01136-00 | Bracket Arm | ||
| 22-00155-00 | O-Ring | O-Ring 2-231 LL Roughing Line to LL Floor | |
| 22-00333-00 | O-Ring | O-Ring 10.81 WTM to LL Floor Inner | |
| 22-00434-00 | O-Ring | O-Ring 010 1/4″ VCO Seal | |
| 2-343-V75 | O-Ring | O-Ring Centering Viton 2-343 75 Duro KF40 326 | |
| 19-00155-01 | Heater Block 150mm | ||
| 16-271392-00 | CVD Vector | Shower Head 300mm | |
| 16-277520-00 | Shower Head 13″ | ||
| A06-014-01 | Quartz GDP Lower | ||
| 19-00147-00 | Gear EXT. | ||
| 34-00133-00 | Sealant Teflon FT | ||
| 60-00091-00 | CYL, 1 1/8 Bore Bun A-N | ||
| 60-00180-00 | Vacuum Transducer 25KF Flange | ||
| 05-2911 R1 | Weldment plate bottom | ||
| 05-3024 R5 | Tube funnel | ||
| 06-0012-03 RH | H Injector | ||
| 06-0032 | Baffle injector | ||
| 06-0060-01 R1 Wafer cassete | Wafer Cassete | ||
| 06-0091 R C | Chamber plasma | ||
| 06-0111 R E | Boat 200mm VHP | ||
| 06-0118 R D | Boat wafers 100mm | ||
| 06-0124 R 2 | Cap ball | ||
| 06-01132 R 3 | Coupling 2-Way | ||
| 06-01142 Plate middle shower | Plate Middle Shower | ||
| 06-0152 R B | Shower head 6″ bottom | ||
| 06-2431 R B | Pin cool STA .030head | ||
| 06-2456 R A | Tube plasma | ||
| 06-2486 R 1 | Plate pattern | ||
| 06-2510 R 3 | Plate Top upper | ||
| 06-2511 R 2 | Tubing 10×12 | ||
| 06-2514 R 1 | Plate bottom | ||
| 06-2516 R 1 | Plate Top | ||
| 06-2521 R A | Plate 4.08 OD x 1.25ID | ||
| 06-2545 R A | Spool plasma | ||
| 06-2561 R 4 | Isolating plate | ||
| 06-2567 -0 R A | Bottom isolating ring | ||
| 06-2567 R A | Isolating plate ring carrier | ||
| 06-2568 R C | Centering ring | ||
| 06-2570 R C | Shower head 1.580 ID | ||
| 06-2571 R 1 | Paid load rock | ||
| 06-2576 R A | Boat 150mm wafer 81 slots | ||
| 06-2583 R 2 | Pin lift | ||
| 06-2592 R A,B,C,D | Shower head 1.83 ID | ||
| 06-2593 R A | Centering ring 150mm | ||
| 06-2598 R A | Pin lift | ||
| 06-2599 R A Plate 4.08OD x 1.75 ID | Plate 4.08 OD x 1.75 ID | ||
| 06-2606 R B | Boat 81 slots | ||
| 06-2612 R B | Key isolating plate | ||
| 06-2619 R A | Plate tri adaptor | ||
| 06-2620 R A | Pin plug | ||
| 06-2632 R A | Cap isolator | ||
| 06-2640 R C | Spool plasma | ||
| 06-2697 R A | Quartz spool plasma | ||
| 06-2694 R B | Chamber plasma plus | ||
| 06-2704 R A | Plate gas dist.200mm | ||
| 06-2705 R 2 | Liner quartz | ||
| 06-2706 R B | Cooler PEP plus | ||
| 06-2724 R A | Isolating plate | ||
| 06-2736 R A | Plate gas dist. 200mm | ||
| 06-2737 R A | Plate gas dist. | ||
| 06-2793 R A | Window quartz tray | ||
| 15-100641-00 | Window viewport inner | ||
| 15-161439-00 | Plate isolation | ||
| 15-164628-00 | View port | ||
| 15-303151-00 | Window EBR | ||
| 15-336516-00 | Orifice diffusion | ||
| 15-337510-00 | Orifice diffusion | ||
| 15-337511-00 | Orifice diffusion | ||
| 15-345274-00 | Orifice diffusion | ||
| 14738-01 R F | Bubbler | ||
| 15367-01 | Lift Pin Quartz | ||
| 16337-01 | Quartz coolar | ||
| 16359-01 | Quartz plasma chamber | ||
| 16532-01 | Plate lamp | ||
| 16784-01 | Quartz spool | ||
| 17289-01 | Pin lift | ||
| 17291-01 | Pin cool | ||
| 17302-01 | Weldment top shower head | ||
| 17303-01 | Plate middle shower | ||
| 17304-01 | Weldment bottom | ||
| 17621-01 | Plate Gas Dist. | ||
| 17622-01 | Plate diffuser lamp 4″ | ||
| 17688-01 | Plate gas dist.200mm | ||
| A06-001-01 | Window | ||
| A06-002-01 | Window | ||
| A06-010-01 | Tube plasma | ||
| A06-012-01 | Diffusion disc | ||
| A06-014 RE | Quartz shower head | ||
| A06-300-01 | Quartz window 9.5″ | ||
| A06-301-01 | Quartz window 10″ | ||
| A78-097-01 | O-Ring, Viton, MV/PC Isol valve body | ||
| A78-098-01 | O-Ring, Viton, SS/Equal/Man Isol valve | ||
| 15-392383-00 | Ceramic | Nozzle Ceramic | |
| 15-302588-00 | Membrene (Cationic) Filter | ||
| 15-336064-00 | Bell Jar C3 SPD | ||
| 02-277948-00 | |||
| 10-363935-00 | Tub | ||
| 02-136089-00 | CVD Vector | Assy Lift Pin Acturator VCTR | |
| 02-324753-00 | CVD Vector | 300mm Spindle (Oil Type) | |
| 02-130617-00 | CVD Vector | 300mm Spindle (Gear Motor Type) | |
| 02-159137-00 | CVD Vector | 300mm Spindle (Gear Motor Type) | |
| 02-259783-00 | CVD Vector | PED Lift Assy Preheat C3VCTR 300mm | |
| 02-160858-00 | CVD Vector | Lift Assy Cool Pedestal Loadlock 300mm | |
| 02-288189-00 | CVD Vector | Lift Pin Actuator 300mm | |
| 02-159939-00 | CVD Vector | ESC Bellows 4 ST PED INC625 300mm | |
| 63-136020-01 | CVD Novellus -Speed | Load Lock to DCVS Valve 300mm | |
| 16-253739-00 | CVD Novellus -Speed | Gas Ring 300mm | |
| 16-159939-00 | CVD Novellus -Speed | ESC Bellows 4.00 Stroke Pending 625 300mm | |
| 15-270165-00 | PVD Novellus-Inova | ESC Pink 300mm | |
| 60-119292-00 | PVD Novellus-Inova | Valve Gate 2.50″ Vat | |
| 60-135033-00 | PVD Novellus-Inova | RGV VAT V/V | |
| 22-123479-36 | PVD Novellus-Inova | Tubing Flex 321SS 1/4 x 36 LG FMR | |
| 22-141803-00 | PVD Novellus-Inova | DI Chiller Filter S21D0008 | |
| 02-300478-00 | PVD Novellus-Inova | Inova Heater 300mm | |
| 16-343016-00 | PVD Novellus-Inova | Inova Heater 300mm | |
| 16-118351-01 | PVD Novellus-Inova | Pedestal Bellows 300mm | |
| 16-128855-00 | PVD Novellus-Inova | Back Side AR Bump Bellows 300mm | |
| 02-109622-00 | PVD Novellus-Altus | Assy Lift Pin Actuator 300mm | |
| 16-100488-00 | PVD Novellus-Altus | Showerhead 300mm | |
| 16-150325-00 | PVD Novellus-Altus | Mixing Unit 300mm | |
| 60-052581-00 | PVD Novellus-Altus | Valve Vat Type L,50mm x 336mm | |
| 63-136020-01 | PVD Novellus-Altus | SMC TM To Chamber Valve | |
| 02-259783-00 | PVD Novellus-Altus | Pedestal Lidt Assy Preheat 300mm | |
| 02-324753-00 | PVD Novellus-Altus | 300mm Spindle (Oil Type) | |
| 02-130617-00 | PVD Novellus-Altus | 300mm Spindle (Gear Motor Type) | |
| 02-159137-00 | PVD Novellus-Altus | 300mm Spindle (Gear Motor Type) | |
| 02-134263-00 | Referb part | Novellus ESC Referb | |
| 15-033946-00 | Cover Plate Quartz | ||
| 15-050160-41 | Alumina 995 | Tube Injector Hi-Purity | |
| 15-118123-00 | Ceramic | Ceramic Ring INOVA 300mm Large | |
| 06-2794 | Quartz | Quartz Plasma Tube | |
| 10-042678-00 | Tube Assy Injector | ||
| 02-106507-00 | (C2) Spindle 8″ | ||
| 05-113897-00 | (C1) Spindle 8″ | ||
| 02-307391-00 | New Novellus Speed Dome | ||
| 02-042566-00 | New Novellus Speed Dome | ||
| 03-00258-00 | AL6061+Cu | Shower Head | |
| 19-024227-00, 02 | AL6061+NI+INCONEL | Heater Block | |
| 19-00154-00, XX | AL6061+NI+INCONEL | Heater Block | |
| 15-046814-00 | AL6061 | Gas Ring | |
| 16-103973-00 | AL6061 | Turbo Screen | |
| 15-276648-00 | AL6061 | Distribution | |
| 15-169646-00 | AL6061 | Nozzle | |
| 15-169647-00 | AL6061 | Nozzle |
