Description
NanoX-2000 Key Parameters:
- Measurement Mode:PSI + VSI WLSI
- CCD Camera:1280×960
- Z height resolution: 0.1 nm
- RMS repeatability: 0.01 nm (1σ)
- Step height repeatability:0.1%
- Z measurement range: 100 um (400 um optional)
- Illumination:long life LED
- Objective:Nikon 2.5x, 5x, 10x(standard), 20x, 50x
- XY stage:160 mm (manual/motorized optional)+ tilt adjustment(manual)
- System SW/HW:Window 7 64bit, Nanosight 3D software,Intel I7