Description
Modular Process Technology RTP-600S Rapid Thermal Processing System
The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function.
Wafer size up to 6 in.
Temp. Range: 250 to 1300 deg C.
Quartz chamber.
Up to six channels of MFC control.
Highly uniform loop array with accurate control and monitoring.
208V, 3 Ph, 60 Hz, 80A..
SS252965675177
