Description
MATTSON 100 CS RTP RAPID THERMAL PROCESSOR STEAG AST 100CS
Make: Mattson Thermal Products
Model: 100CS/ 100 CS
Type: Rapid Thermal Processor (RTP)
Voltage: 400V
Frequency: 50/60Hz
Power: 43kW
No. of Phase: 3
Full Load Current: 63A
SS272878849009