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Lam Research modules/components/Parts

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We are dedicated to the continuous improvement and cost-reduction efforts of our customers by providing innovative products and services. We repair and refurbishment services on Lam Research equipment/modules/components/Parts. This includes Pumps/Chiller/TCUs, mechanical/transport assemblies, valves, RF matches, RF generatorsPCBs/ESC & DC Power Suppliers etc.. We also provide on-site technical support services and refurbishes, installs and sells Lam Research equipment, the following modules/components/Parts . These are only for end user and they are subject to prior sales. Check for Exchange Availability.

  1. Adixen ATH 2800M Turbo Pump
  2. Edwards Turbomolecular Pump STP-XA2703
  3. Spare Parts Electrodes Anodized Aluminum. Serialized for batch control,6 & 8 inch
  4. Computer / Monitor Upgrade.(Replaces any Envision Monitor; Ability to Change out any portion or all pieces; Less Down time for repairs; Reliability; Lower cost of ownership; Greater ROI than OEM; Several Different Configurations Available; Computer/Monitor Upgrade Available; NeXT Compatible; Lam Standalone & Alliance Platform Compatible; Upgraded Processor, Hard Drive, and Power Supply; Can be shipped with a flat screen or light pen; Plug and Play option)
  5. Computers (Greater ROI than OEM; Several Different Configurations Available; Computer/Monitor Upgrade Available; NeXT Compatible; Lam Standalone & Alliance Platform Compatible; Upgraded Processor, Hard Drive, and Power Supply; Can be shipped with a flat screen or light pen; Plug and Play option)
  6. DSQ Heated Paddle Substitute (853-347146-006;853-347146-008)
  7. DSQ Heated Paddles (Upgraded heater for uniform temperature control, Drop-in replacement for OEM)
  8. Flat Panel Computer Screen(Replaces any Envision Monitor; Ability to Change out any portion or all pieces; Less Down time for repairs
    Reliability; Lower cost of ownership)
  9. Lam Research Monitor Upgrade For Envision Systems(Direct Replacement for Lam Research Monitor; Crisp Clear Quality LCD Screen; No Light Pen Required; Touch Screen Available; Fast and Easy Replacement Limiting Down Time; Also Available for Lam Classic Systems and Lam Auto Etch Systems)
  10. Silicon (Si) (6&8 inch)
  11. TGPS-Thermal Gas Purge System (Reduce Particle Problems; Reduce Polymer Flaking; Increase MTBC; Improve Yield; Resolve Defect Incursion )

All the Lam  plasma etcher equipment  trademarks belongs to Lam Research , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved. 

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers