Denton Vacuum Explorer 14 Auto Turbo High Vacuum DC Sputtering System

Description

Laboratory or light production thin film DC sputtering system with graphic user interface and touch screen control.

Manual or automatic operation of valves, pumps, low voltage sources, and fixture rotation subsystems is through this graphical interface.

Deposition Chamber: 14 in. H x 14 in. W x 14 in. D stainless construction.

Turbo pump with roughing pump.

(1) Micrometer gas-bleed valve to introduce process gas into the deposition chamber.
(1) Gas isolation (toggle) valve for process gas control.

Sputter Source:
(2) 3.0 in. dia., Denton Vacuum, internal stalk-mount, planar magnetron sputter sources:
I. RF/DC capability, only DC installed.
II. Variable source to substrate distance.
III. Clamp/bond target compatibility.

(2) Independent, electro-pneumatic source shutters (cylinder mounted air flowrate control) interfaced to system PLC for remote open/close operation.

Sputter Power Supply:
Sorensen DCS Series power supply (1.0 kW, 600 VDC).
DC switch to shunt the output of the Sorensen DCS power supply to any of the (2) installed cathodes.

Substrate Stage:
6.0 inch omni rotating fixture plate (sputter-down configuration).
Speed adjust via input to system touch screen.