CHA SE-1000 E-Beam Evaporator Deposition System

Description

CHA SE-1000 E-Beam Evaporator Deposition System

  • Electron beam high vacuum deposition system.
  • Inficon IC4 crystal deposition rate monitor.
  • Temescal CV-14 14 kW E-Beam power supply.
  • Four Pocket E-Gun.
  • CTI cryopump with compressor and roughing pump.
  • Quartz lamps for substrate heating.
  • Automatic or manual vacuum valve sequencing.
  • Water cooled stainless steel 25 in. dia. bell jar with hoist.

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