Description
Canon FPA-2500 i3 Wafer Stepper, 200mm SOLD
Canon FPA-2500 i3 Stepper
Serial Number: 401555
Wafer size: 8″
Reticle size: 5″
Complete system
Operational when powered down
IUC last checked in Nov 2017
Uniformity ~ 3.3%\
Intensity 4,750 w/m2
Magnification: 1/5 X
Image Field: 20mm x 20mm
Numerical Aperture: 0.52 ~ 0.60
Illumination Light Source: 1.5KW Super High Pressure Hg Lamp
Alignment Modes:
– TTL Off-Axis He-Ne TV
– TTL Off-Axis Broadband TV
Alignment Light Source:
– He-Ne laser (633 nm)
– Broad Band (Halogen lamp)
Wafer Leveling:
– Die by die tilt
– Global tilt
