Description
| No. | Part Number | Description |
| 1 | 0020-20340 | DOOR TRANSFER SLIT VALVE |
| 2 | 0050-41235 | GAS LINE MANIFOLD |
| 3 | 0100-35086 | PCB ASSEMBLY GAS PANEL DISTRIBUTION |
| 4 | 0100-13025 | ASSY, PCB VIDEO/SERIAL DIST BRD. |
| 5 | 0200-00402 | ISOLATOR PUMPING RING TOP 200MM PRODUCER |
| 6 | VAT 610PB-26NM-0002/903 | Adaptive Pressure Controller |
| 7 | TEL | 1D81-000009-21B / TYB 121-1/COM |
| 8 | TEL | 1D81-000129-11 TYB222-1/SW |
| 9 | TEL | SVA051 |
| 10 | TEL | TEB103 FPIF |
| 11 | 0100-09172 | 8-Channel Emission/Laser Endpoint PCB |
| 12 | 0200-36666 | Isolator Ceramic Producer |
| 13 | 0010-10290 | ASSY TOOL LID WXZ |
| 14 | 0100-13024 | INTERFACE PROCESSOR DIST. ASSY PCB |
| 15 | 0200-06000 | BLADE, POCKET LESS 200MM HP+,VHP+ |
| 16 | 0190-06926 | CABLE ASSY SQS(M) R/A TO SQS(M) STR CXN3 |
| 17 | 0090-00423 | EMO SWITCH AND INTER-CIRCUIT ASSY W/GUARD 0090-00423 |
| 18 | 0100-00430 | PCB VME P2 DISTRIBUTION BD |
| 19 | 3870-01126 | Valve Pneumatic Bellows 3/8 On/Off NCSST 3/8IN |
| 20 | 0010-41442 | SMC CYLINDER NCY2B40H-UIA970665 |
| 21 | 0100-20164 | PCB ASSY,CONT POWER DIST. |
| 22 | 0100-00269 | PCB CONTROLLER POWER DISTRIBUTION |
| 23 | 0100-00427 | PCB ASSEMBLY CHAMBER INTERLOCK BD |
| 24 | 0100-13025 | ASSY PCB VIDEOSERIAL DIST BRD |
| 25 | 0040-18219 | Lased 200MM Esc Snnf W/WTM CVD |
| 26 | 0140-02362 | MAIN HARNESS DPS CHAMBER CENTURA-II |
| 27 | 0100-01321 | PCB, Digital I/O Board |
| 28 | 0100-00246 | CHAMBER INTERCONNECT CH TRAY MCE |
| 29 | 0010-09490 | RF Match ASSY Precision 5000, P5000 |
| 30 | 0090-05790 | INDEXER BRAKE ASSY ENDURA. |
| 31 | 0100-76038 | ASSY, PCB LED-NB, FAST WAFER MAPPING |
| 32 | 0140-35671 | HARNESS ASSY,SIMPLE/STANDARD CATHODE,520 |
| 33 | 0100-35279 | PCB ASSY, LOAD LOCK BEEPER |
| 34 | 0150-20509 | CABLE ASSY, LLA WAFER MAP |
| 35 | 0100-20070 | PCB ASSY Mag/lamp Dist |
| 36 | 0140-01888 | HARNESS ASSY THROTTLING GATE VALVE DPS+ |
| 37 | 0020-33779 | BUSHING HOOP |
| 38 | 0090-70015 | ASSEMBLY, PNEU EV, 4 WAY DOUBLE |
| 39 | 0090-20044 | ASSY, 4-WAY DOUBLE VALVE |
| 40 | 0010-30143 | ASSY HARNESS CHANNEL RIGHT DPS |
| 41 | 0050-38481 | BRACKET MANOMETER DPS MEC |
| 42 | AMT85472-3 | TURBOTRONIC PUMP CONTROLLER |
| 43 | 0010-00936 | ASSY, LOWER DTCU, DPS E-DTCU |
| 44 | 0100-20004 | wPCB ASSY, CHAMBER INTERCONNECT |
| 45 | 0100-20040 | PCB ASSY REMOTE SUPPLY DISTRIBUTION |
| 46 | 0100-20000 | wPCB ASSY,64 CHANNEL MUX |
| 47 | 0100-20038 | CB ASSY RELAY CONTROL |
| 48 | 0020-20499 | Window, Protective |
| 49 | 0100-35065 | PCB ASSY SERIAL ISOLATOR |
| 50 | 0100-20001 | SEI, SYSTEM ELECTRONICS INTERFACE PCB |
| 51 | 4060-01099 | SMC VQ 5 STATION MANIFOLD W/ VALVES |
| 52 | 0040-32190 | Cathode cooling base |
| 53 | 0200-00834 | BLADE CERAMIC, 8″ WAFER CLAMP |
| 54 | 0010-05966 | 200mm Super E ESC |
| 55 | 0010-12090 | HYBRID MATCH MXP+ RF MATCH |
| 56 | 0010-09416 | RF Match Etch Precision 5000 |
| 57 | 0100-02797 | ORIENTER BOARD |
| 58 | 0100-02805 | ORIENTER BOARD |
| 59 | 0010-09292 | ASSY, TC AMP HOUSING GENERIC |
| 60 | 51A11TGA1BF003 | BARATRON PRESSURE SWITCH |
| 61 | BFA-02-100-ST-02 | Vacuum break filter |
| 62 | 0200-09450 | GAS FEED OD 6.35MM BWCVD |
| 63 | 0200-36373 | LIFT PIN, .149 DIA TRIANGULAR |
| 64 | 3870-04709 | SOLENOID, 24VDC, |
| 65 | 0090-20003 | SENSOR ASSY VALVE SENSOR AND HARNESS |
| 66 | 0090-20044 | Double Solenoid Valve 24vdc |
| 67 | 0010-39650 | ASSY WAFER LIFT PIN |
| 68 | 1310-01045 | TC PROBE K-TYPE 5/16-18 TEF INSUL |
| 69 | 0021-09445 | CLAMP, BULKHEAD, RF PIN, CATHODE, DPS |
| 70 | REX-B860-CS2 | TEMPERATURE CONTROL CIRCUIT BOARD |
| 71 | 0010-04138 | ASSY,MCVD RF MATCH |
| 72 | 51B13TCA2BA550 | Baratron Pressure Switch |
| 73 | MKS 360121 | Granville Phillips 360121 Stabil-Ion Gauge UHV-Y |
| 74 | 0190-35208 | CHAMBER INTERFACE PCB, |
| 75 | 0100-38116 | ASSY WxZ HIGH PAESSURE INTERLOCK |
| 76 | 0100-00975 | PCB A/W STEPPER CONTROLLER |
| 77 | 0015-00421 | CHAMBER SET INTERFACE BOARD |
| 78 | 0100-35124 | PCB, SERIPLEX I/O DISTRIBUTION |
| 79 | 0200-09072 | Shield 200mm |
| 80 | 0200-36696 | SHADOW RING,QUARTZ,200MM NOTCH (2),SUPER |
| 81 | 0200-00410 | UNI-INSERT,GAS DISTRIBUTION, 88 HOLES |
| 82 | 0190-09419 | DRIVE SINGLE PHASE, PHASETRONICS … |
| 83 | 0100-76280 | PCB,ASSY SMIF INTERCONNECT BOARD |
| 84 | 0100-77042 | PENTIUM INTERFACE BOARD PCB |
| 85 | 0100-00372 | I/O Expansion card |
| 86 | 3920-00385 | CNTRL PRESS ABS 20TORR 1/4MVCR VITON |
| 87 | 0041-78449 | 200MM SNF SML Pedestal |
| 88 | 0100-00265 | Mainframe Interface PCB |
| 89 | 0100-03658 | I/O Expansion board |
| 90 | 0041-30915 | 300mm TiW C101 Heater |
| 91 | 0041-30915 (E chuck) | 300mm TiW C101 E-chuck |
| 92 | 0010-28715 | 300mm TXZ E-Chuck Heater |
| 93 | 0190-75084 | VGA Board |
| 94 | 0010-08185 | ASSY, ORIENTER 650NM LASER OPTICS |
| 95 | 0010-37768 | BWCVD Throttle Valve ASSY |
| 96 | 1350-01133 | MKS BARATRON, PRESSURE TRANSDUCER, 100 PSIA |
| 97 | 1350-01141 | XDCRPRESS 0-100TORR 0-10VDC OUT 1/4VCR |
SS7898-S-1
