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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
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Chillers
Si Wafer Carriers

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SemiStar Corp. Semiconductor Equipment Parts Service

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THERMCO 4100 Furnace PLCVD

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THERMCO 8100 Furnace PLCVD

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THERMCO 8200 Furnace PLCVD

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THERMCO X80 Furnace PLCVD

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THERMCO X60 Furnace PLCVD

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THERMCO X10 Furnace PLCVD

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THERMCO 5200 Furnace PLCVD

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THERMCO 5100 Furnace PLCVD

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THERMCO 2800 Furnace PLCVD

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THERMCO 2600 Furnace PLCVD

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THERMCO 2400 Furnace PLCVD

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Used Semiconductor Equipment Parts

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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THERMCO 4100 Furnace PLCVD

THERMCO 8100 Furnace PLCVD

THERMCO 8200 Furnace PLCVD

THERMCO X80 Furnace PLCVD

THERMCO X60 Furnace PLCVD

THERMCO X10 Furnace PLCVD

THERMCO 5200 Furnace PLCVD

THERMCO 5100 Furnace PLCVD

THERMCO 2800 Furnace PLCVD

THERMCO 2600 Furnace PLCVD

THERMCO 2400 Furnace PLCVD

Used Semiconductor Equipment Parts