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SemiStar Corp. Semiconductor Equipment Parts Service

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Furnace

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BRUCE DIFFUSION FURNACE– BDF 41

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BRUCE DIFFUSION FURNACE– BDF 200

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BRUCE DIFFUSION FURNACE– BDF 300

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THERMCO SVG VTR 7000+ Furnace

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THERMCO SVG VTR 7000 Furnace

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THERMCO SVG VTR 6000 Furnace

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THERMCO 4200 Furnace PLCVD

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THERMCO 4100 Furnace PLCVD

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THERMCO 8100 Furnace PLCVD

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THERMCO 8200 Furnace PLCVD

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THERMCO X80 Furnace PLCVD

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THERMCO X60 Furnace PLCVD

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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BRUCE DIFFUSION FURNACE– BDF 41

BRUCE DIFFUSION FURNACE– BDF 200

BRUCE DIFFUSION FURNACE– BDF 300

THERMCO SVG VTR 7000+ Furnace

THERMCO SVG VTR 7000 Furnace

THERMCO SVG VTR 6000 Furnace

THERMCO 4200 Furnace PLCVD

THERMCO 4100 Furnace PLCVD

THERMCO 8100 Furnace PLCVD

THERMCO 8200 Furnace PLCVD

THERMCO X80 Furnace PLCVD

THERMCO X60 Furnace PLCVD