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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
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Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
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USIC -Wafers
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Chillers
Si Wafer Carriers

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SemiStar Corp. Semiconductor Equipment Parts Service

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SiC

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SIC BOAT SIC VERT BOAT UB06045

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Intake Pipe 0705 4438

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AGC GP86607 PADDLE

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AGC GP11000-C05

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LINER SIC CVD COATED GP10491

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TOKYO ELECTRON LTD (TEL) T.U.681

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AL 04029 Sic Liner Tube AG-CU-053-01

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Sic Liner 1105-200431-12 TEL

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AL 10073 Sic Liner Tube AG-U-0X1-02

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AMAT Quartz Ceramic SiC parts

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EPI 3 1/4″

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017893-001G-III

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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SIC BOAT SIC VERT BOAT UB06045

Intake Pipe 0705 4438

AGC GP86607 PADDLE

AGC GP11000-C05

LINER SIC CVD COATED GP10491

TOKYO ELECTRON LTD (TEL) T.U.681

AL 04029 Sic Liner Tube AG-CU-053-01

Sic Liner 1105-200431-12 TEL

AL 10073 Sic Liner Tube AG-U-0X1-02

AMAT Quartz Ceramic SiC parts

EPI 3 1/4″

017893-001G-III