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SemiStar Corp. Semiconductor Equipment Parts Service

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Hot Sale Products


MRC Sputter	CHA Evaporator	Temescal Evaporator

Heatpulse RTP	STS ICP	Tegal 90Xe

PlasmaTherm	Lam Etchers	Machining

Semiconductor process equipment

SIC&Fine Ceramic Components

We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

USIC

AG Associates Rapid Thermal Processors — Rapid Thermal Processors

Tystar

Sputter Deposition Equipment

Wafer Carriers: 2 - 18 inch

NanoMaster ALD DRIE PECVD RIE

Spare Parts Service

STS ICP DRIE Bosch RIE PECVD

Matrix 105 Matrix 303 Asher Etcher

Main Used Refurbished Equipment

Evaporators

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