Description
RIE-200C, Automatic SAMCO RIE Reactive Ion Etch System Plasma Etching System – BRAND NEW / Unused / Original Crates
Manufacturer: SAMCO
Model: RIE-200C
Type: Cassette Loading RIE Plasma Etching System
Location: Morgan Hill, CA 95037, USA
Condition: BRAND NEW – Still in Original OEM Shipping Crates (Never Installed, Never Powered On)
Quantity: 1 Complete System
Availability: Subject to Prior Sale Without Notice
Overview
The SAMCO RIE-200C is a high-throughput, cassette-to-cassette reactive ion etching (RIE) system designed for mass production and advanced process development.
Developed based on SAMCO’s long-proven CCP RIE platform, the RIE-200C delivers excellent etch uniformity, repeatability, and automation for silicon-based thin film processes.
This unit is brand new, unused, and still sealed in original OEM shipping crates. Photos shown are OEM reference images.
Key Features
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Cassette-to-Cassette Automatic Operation
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Dual cassette configuration
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Double-arm atmospheric transfer robot
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Atmospheric High-Speed Transfer System
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No conventional load lock required
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Higher throughput and reduced cycle time
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Up to 8-inch (200 mm) Wafer Capability
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Fully Automated PLC Control
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Touch panel operation
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Recipe storage, process control, and data logging
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High-Precision CCP RIE Technology
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Excellent uniformity and process stability
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Typical Applications
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High-precision etching of:
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Silicon (Si)
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Polysilicon (Poly-Si)
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Silicon Dioxide (SiO₂)
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Silicon Nitride (SiN)
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Photoresist ashing, stripping, and descum
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Removal of organic contaminants
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Ideal for:
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Semiconductor fabs
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University cleanrooms
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R&D and pilot production lines
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Condition Details
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Brand new system
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Never installed
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Never powered on
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Still in original OEM shipping crates
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Stored in a clean, controlled warehouse environment
Pricing
This system is offered at a significant discount compared to original OEM pricing.
💰 Asking Price: USD 226,000
Serious buyers only.
Please contact us through messaging for inspection arrangements, or logistics questions.
Additional Notes
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Sold AS-IS / WHERE-IS
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Buyer responsible for transportation
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International buyers welcome
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We have experienced engineers for installation at extra cost.
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| 9 | SAMCO, Inc. model RIE-200iP Inductively Coupled RIE Fluorine Etching System . It looks to be in very good cosmetic condition, showing some signs of wear. Among other things, this system features a Shimadzu TMP-003LMC Turbomolecular Vacuum Pump with EI-R04M Power Unit, a VAT Gate Valve with Controller, a pair of Adtec RF Plasma Generators (AX-600II and AX-1000II-S). Also included are a pair of Adixen Vacuum Pumps (2033C2 and 2033SD) which plug into the back panel of the Etcher. The owner has no way of testing this system, or any of its components, and it is being sold as-is. Approximate overall unpacked dimensions: 34″L x 47″W x 72″H. (ID-380EB-CA USA) |
LOCATION: SS380EB
All the used equipment trademarks belongs to the O.E.M. , the original equipment manufacturer. All rights reserved.
















