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Lam Research Spare Parts

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Please contact us for the availability of the following  Lam Research Spare Parts

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The items are subject to prior sale without notice. These items are only for end users.

Item Description
1 Aera FCPIR981C4VX9TH​A Pressure Insensitive MFC MGMR Lam 797-106426-011 Used
2 AP Tech AP1001S 2PW Valve 772-091607-001 Lot of 10 Used
3 AP Tech AP1001S 2PW Valve Reseller Lot of 8 Lam Research 839-014929-900 Used
4 AP Tech AP1001S Valve 839-014929-800 Lam Research 4420 Used Working
5 AP Tech AP1001S Valve Lam Research 839-014911-901 4420 Used Working
6 GE Fanuc VME-7671-421000 SBC Single Board Computer 605-048878-001 Rev. L Used
7 Lam Research 017-018-0390 PCB 490 590 Etcher Used Working
8 Lam Research 0577-1-L-807-07​87 Mesh Switch Used Working
9 Lam Research 12-1000-002 Dual DC Motor Controller Rev. E PCB Card DSS-200 Used
10 Lam Research 12-1000-017 Dual DC Motor Controller Rev. C PCB Card DSS-200 Used
11 Lam Research 12-1000-017 Dual DC Motor Controller Rev. D PCB Card DSS-200 Used
12 Lam Research 12-8000-012 Roller Leak Kit Set of 2 OnTrak New Surplus
13 Lam Research 13610-1-B-5149 Solenoid Tray Assembly Missing Main PCB 4420 As-Is
14 Lam Research 16-034139-00 Injector Tube Novellus STI New Surplus
15 Lam Research 17620-1-A-4318 Tri-Convectron Interface Assembly 4420 Etcher Used
16 Lam Research 22-5100-004 Isolated I/O Board PCB OnTrak DSS-200 Used Working
17 Lam Research 282858802 PCB Intelligent Stepper Card OnTrak DSS-200 Used Working
18 Lam Research 28-8875 Communication Board PCB ASM 28-8875-027 22-8875-003 New
19 Lam Research 28-8875-036 OPTO Output Board PCB Card 22-8875-036 Used Working
20 Lam Research 28-8875-037 Opto Input PCB Card Used Working
21 Lam Research 320665100 Timing Belt 960 8M 50 Reseller Lot of 4 New Surplus
22 Lam Research 413-054-00-2-0 Outer Focus Ring New
23 Lam Research 474-1-C-677-385 Motor PCB 490 590 Etcher Used Working
24 Lam Research 515-011835-001 Leveling Electrode New
25 Lam Research 638-099530-001 Transformer Assembly New Surplus
26 Lam Research 678-099744-004 Immersion Heater A001-0330-0050 New
27 Lam Research 678-099744-005 Immersion Heater HTR CRTG W/FLG New Surplus
28 Lam Research 678-099744-006 Immersion Heater HTR CRTG W/FLG New Surplus
29 Lam Research 678-801541-002 Immersion Heater HTR CRTG New Surplus
30 Lam Research 678-801541-003 Immersion Heater HTR CRTG New
31 Lam Research 678-801542-001 Heat Tape HTR FLX New Surplus
32 Lam Research 710-7930-1 PCB Board Rev. C 810-7930-1 Used Working
33 Lam Research 713-013220-001 Outer Gate Entrance Safety Cover Lot of 3 4420 Used
34 Lam Research 713-013236-001 Outer Gate Exit Safety Cover Rainbow 4420 Used
35 Lam Research 713-013236-01 Outer Gate Exit Safety Cover Lot of 3 4420 Used
36 Lam Research 713-11203-1 90 Degree Load Lock Cover Rev. D 4420 Used Working
37 Lam Research 714-013218-001 RF Cover Plate Set 714-013219-001 4420 Lot 4 Used
38 Lam Research 714-013234-001 Manometer Cover Box 4420 Used Working
39 Lam Research 715-001673-006 Electrode Lower 6″
40 Lam Research 715-007469-002 Lower Electrode
41 Lam Research 715-011035-001-​D Lower End Reaction Chamber Plate 715-11059-1 Used
42 Lam Research 715-011640-006 Ring Focus Anodized, Semi 6″
43 Lam Research 715-011902-001 Upper Baffle Plate New
44 Lam Research 715-025724-001 Flanged Gas Feed Ring 420D0026 Refurbished
45 Lam Research 715-028615-001 Upper Baffle Plate 8″ New Surplus
46 Lam Research 715-11626-001 Cooling Electrode Ring New
47 Lam Research 715-11825-001 Chamber Plate
48 Lam Research 715-12165-8 B 200mm Wafer End Effector 4420 Etcher Used Working
49 Lam Research 715-130080-008 200mm Wafer End Effector Rev. BC 4420 Etcher Used
50 Lam Research 715-130080-008 200mm Wafer End Effector Rev. E Used Working
51 Lam Research 715-130080-008 200mm Wafer End Effector Rev. F 4420 Etcher Used
52 Lam Research 715-130092-008 End Effector 200mm Wafer Rev. 2 New
53 Lam Research 715-130092-008 End Effector 200mm Wafer Rev. 2 Used Working
54 Lam Research 715-130092-008 End Effector 200mm Wafer Rev. A Copper Used Working
55 Lam Research 715-130092-008 End Effector 200mm Wafer Rev. B Used Working
56 Lam Research 715-140184-008-​E1 200mm Wafer End Effector Used Working
57 Lam Research 715-330151-004 ACTR Flange Ring 420D0027 Refurbished
58 Lam Research 715-330161-002 BAC Shield Flange 260A0033 New
59 Lam Research 715-330164-008-​E1 Chamber Plate
60 Lam Research 715-390129-001-​E2 Chamber Plate
61 Lam Research 716-026652-002 Ring, Edge, Bot, 200-300MM
62 Lam Research 716-026652-002-​B Ring, Focus
63 Lam Research 716-140427-001 Hot Edge Ring 15deg New
64 Lam Research 716-330162-002 BAC Ceramic Filler Ring Flange 420D0018 Refurbished
65 Lam Research 716-330167-281 Ceramic Bottom Ring Clamp 420D0019 Refurbished
66 Lam Research 716-330190-081 Focus Ring 8″ ESC New
67 Lam Research 716-330190-081 Focus Ring 8″ ESC Used Working
68 Lam Research 716-443179-002 Edge Wide
69 Lam Research 716-800842-005 Foc, Ring, Top, QTZ, 200mm, Jeida
70 Lam Research 718-098592-001 Locking R, Hard Anodized
71 Lam Research 734-007412-001 Load Lock Cover O-Ring Lot of 9 New
72 Lam Research 739-1856-1 Teflon Seal
73 Lam Research 740-0035-01 G8 Graphite Gasket Lot of 2 New Surplus
74 Lam Research 766-004254-003 6 Station Pneumatic Manifold New
75 Lam Research 766-020032-001 Etcher Chemical Supply Valve Block New Surplus
76 Lam Research 771-090453-001 Cov Gauge Tube Gauges/L.L. Equipment 4420 Used
77 Lam Research 810-017007-001 Convectron Tube Interface Lot of 2 4420 Used Working
78 Lam Research 810-017016-1 Stepper Motor Driver PCB Card 4420 Etcher Used Working
79 Lam Research 810-02432R Plate Focus Ring Adapter Cera-R Used Working
80 Lam Research 810-02433R 10 Hole GDP Cool Plate Used Working
81 Lam Research 810-02460R Extended Heated Ceramic Liner Used Working
82 Lam Research 810-028298-007 24 CH Temp CTL OT PCB 710-028298-007 Lot of 6 New
83 Lam Research 810-17002-001 16 Ch. Heat/Cool PCB Rev. B Used Working
84 Lam Research 810-17004-001 Solenoid Interlock Board Rev. D Used Working
85 Lam Research 810-17004-001 Solenoid Interlock PCB Board Rev. B Used Working
86 Lam Research 810-17004-001 Solenoid Interlock PCB Board Rev. F Used Working
87 Lam Research 810-17006-1 Temperature Sensor Board 4420 Etcher Used Working
88 Lam Research 810-17013-001 Gap Drive Amp Interlock Board PCB Rev. C Used Working
89 Lam Research 810-17013-001 Gap Drive Amp Interlock Board PCB Rev. D Used Working
90 Lam Research 810-17016-001 Stepper Motor Driver PCB Card Rev. C Used Working
91 Lam Research 810-17016-001 Stepper Motor Driver PCB Card Rev. D Used Working
92 Lam Research 810-17016-001 Stepper Motor Driver PCB Card Rev. E Used Working
93 Lam Research 810-17016-1 Stepper Motor Driver PCB Card Rev. B Used Working
94 Lam Research 810-17016-1 Stepper Motor Driver PCB Card Rev. C Used Working
95 Lam Research 810-17025-3 RF Generator Cart Breakout Board PCB 710-17025-3 Used
96 Lam Research 810-17041 Brushless Motor Driver-Speed Control PCB Board Used
97 Lam Research 810-17059-1 PCB Card 4428b Rainbow Plasma Etcher Used Working
98 Lam Research 810-17061-1 Connection PCB Card 4428b Rainbow Used Working
99 Lam Research 810-17082-001 16 Channel Heat/Cool PCB Rainbow 4420 Used Working
100 Lam Research 810-503-3 PCB Board Rev. B 490 590 Etcher Used Working
101 Lam Research 810-800156-101 Water Detector PCB 710-800156-101 Used Working
102 Lam Research 810-802901-300 MB Node 1 PM Common PCB 710-802901-300 Used Working
103 Lam Research 810-802901-305 MB Node 1 PM Common PCB 710-802901-305 Used Working
104 Lam Research 810-802902-006 Motherboard Node 2 PM PCB 710-802902-006 New
105 Lam Research 811-02493R Cover Elctd Hsgesc Refurbished
106 Lam Research 839-011237-001-​D Gauge Vacuum Weldment Lot of 2 Used
107 Lam Research 839-011516-001 Upper Chamber Assembly Parts 4420 Used Working
108 Lam Research 839-011516-001-​B Weldment Gas Feed 713-011517-001 Set of 2 Used
109 Lam Research 839-013513-001 Entrance L.L. Vacuum Manifold Weldment 4420 Working
110 Lam Research 839-013514-001 Exit Load Lock Vacuum Manifold Weldment 4420 Used
111 Lam Research 839-013521-001 1-1/2″ Isolation Valve 4420 Used Working
112 Lam Research 839-024563-100 Entrance & 839-024561-100 Exit Line 4420 Used
113 Lam Research 839-029227-100 Rev C Weldment He Line Manometer Adapter 4420 Used
114 Lam Research 839-465013-001 Liner Chamber VAT65 TRANSN MANF
115 Lam Research 852-017152-003-​G Front EMO Box Assembly 4420 Used Working
116 Lam Research 852-017750-001 Remote Damagaed Used Untested As-Is
117 Lam Research 853-001198-003 SEMIGROUP TEXAS 4648699-0002-RE​F Gate Inner Etch
118 Lam Research 853-002900-010 RF Cable Assembly New
119 Lam Research 853-012095-008 200mm Wafer End Effector New Surplus
120 Lam Research 853-012350-002-​J-LLFDR Outer Gate Assembly No Gate Untested Used
121 Lam Research 853-012726-001-​G-C222 4420 Etcher Wafer Transport Incomplete As-Is
122 Lam Research 853-013540-002 Heated Chamber Manifold 4420 Used Working
123 Lam Research 853-013575-002 Heated Interconnect Manifold Assembly 4420 Used
124 Lam Research 853-015686-005 Power Module Rev. B Used Working
125 Lam Research 853-015876-101 ASSY CA ARM SENSOR INTC New
126 Lam Research 853-01620-001 Tri-Convectron Assembly Rev. A 4420 Used Working
127 Lam Research 853-017163-001-​D-3710 RF Switch Box 4420 Rainbow Used Working
128 Lam Research 853-017163-001-​G-1997 RF Switch Box Rainbow 4420 Etcher Used
129 Lam Research 853-017163-001-​G-262B RF Switch Box 4420 Rainbow Used Working
130 Lam Research 853-017163-101-​3 MAIN RF Switch Box 4428b Rainbow Used Working
131 Lam Research 853-017163-101-​3-MAIN RF Switch Box Assembly 4420 Used Working
132 Lam Research 853-017427-001-​C-C136 Control Module 4420 Etcher Used Working
133 Lam Research 853-017620-001-​A Tri-Convectron Interface Assembly 4420 Etcher Used
134 Lam Research 853-017620-001-​A Tri-Convectron Interface Assembly 4420 Used
135 Lam Research 853-017620-001-​A-C222 Tri-Convectron Interface Assembly 4420 Used
136 Lam Research 853-017805-045 RF Cable 45 Foot 13 Meter Used Working
137 Lam Research 853-01807-001 RF Cable 1.25 Meter Rev. C Used Working
138 Lam Research 853-024350-100-​2-230S Liquid Tank SP Gas Panel ASSY
139 Lam Research 853-025901-001-​1-C136 EMO Assembly 4420 Etcher Used Working
140 Lam Research 853-034701-001 Front EMO Cover Assembly 4420 Used Working
141 Lam Research Etcher Shuttle Assembly Cover 4420 Rainbow Used Working
142 Lam Research Indexer Cover Assembly 4420 Etcher Used Working
143 Lam Research Indexer Cover Rainbow 4420 Etcher Used Working
144 Lam Research M0003633 Extrima 3100 PC Mounting Bracket Kit New Surplus
145 Lam Research Tri-Convectron Assembly 853-01620-001-A​-C222 Used Working
146 Millipore CMLA-21 Baratron Gauge Lam 853-017643-003-​H-LEAN Used Tested Working
147 Millipore FC-2900M Mass Flow Controller Lam 797-091413-605 500 SCCM Cl2 Used
148 Millipore FC-2900M Mass Flow Controller MFC 500 SCCM Ar Lam 797-091413-606 Used
149 Millipore FC-2900V Mass Flow Controller Lam 797-90865-304 50 SCCM O2 Used
150 Millipore FC-2900V Mass Flow Controller Lam 797-90865-602 500 SCCM He Used
151 Millipore FC-2900V Mass Flow Controller Lam 797-90865-609 500 SCCM SF6 Used
152 MKS Instruments 100997144 Isolation Valve 839-13521-1 Lam Research 4420 Used
153 MKS Instruments 100997144 Isolation Valve System 839-13521-1-195​6 Lam 4420 Used
154 MKS Instruments 839-13521-1 Isolation Angle Valve Rev. C Used Working
155 Mykrolis CMHT110232E Manometer 853-011053-002 Lam 4420 Used Working
156 Saphikon 666-062659-001 Thermocoupler Probe Sensor Lam Research New
157 Tylan FC-2900M Mass Flow Controller 500 SCCM CL2 Lam 797-91413-605 Used Working
158 Tylan FC-2900M Mass Flow Controller Lam 797-091413-524 200 SCCM HBr Used
159 Tylan FC-2900M Mass Flow Controller Lam 797-091413-625 500 SCCM NF3 Used
160 Tylan FC-2900V Mass Flow Controller 5 SCCM O2 Lam 797-90865-014 Used Working
161 Tylan FC-2900V Mass Flow Controller 50 SCCM O2 Lam 797-90865-304 Used Working
162 Tylan FC-2900V Mass Flow Controller Lam 797-90865-608 500 SCCM C2F6 Used Working
163 Tylan FC-2900V Mass Flow Controller Lam 797-90865-609 500 SCCM SF6 Used
164 Tylan FC-2900V Mass Flow Controller MFC 500 SCCM He Lam 797-90865-602 Used
165 Tylan FC-2950MEP5 Mass Flow Controller MFC 2950 Series 200 SCCM Cl2 Used Working
166 Tylan FC-2950MEP5 Mass Flow Controller MFC 797-093267-404 100 SCCM O2 Used
167 Tylan FC-2950MEP5 Mass Flow Controller MFC 797-093267-505 200 SCCM Cl2 Used
168 Tylan FC-2950MEP5 Mass Flow Controller MFC Lam 797-222040-201 500 SCCM O2 Used
169 Tylan FC-2960MEP5 Mass Flow Controller MFC 797-091413-310 20 SLPM N2 Used
170 Tylan General CMLA-11 Baratron Gauge Lam 853-017643-003 Used Tested Working
171 Tylan General CMLA-21 Baratron Capacitance Gauge 853-017643-003-​D-C222 Used
172 Tylan General CMLA-21 Baratron Capacitance Gauge 853-017643-003-​G-1135 Used
173 Tylan General CMLA-21 Baratron Capacitance Gauge Lam 853-017643-003-​D Used
174 Tylan General CMLA-21 Baratron Capacitance Gauge Lam 853-017643-003-​D-OP8 Used
175 Tylan General CMLA-21 Baratron Gauge Lam 853-017643-003-​D Used Tested Working
176 Tylan General CMLA-21 Baratron Gauge Lam 853-017643-003-​H-LEAN Millipore Used
177 Tylan General CMLA-21 Baratron Gauge Lam 853-017643-003-​H-LEAN Used Tested As-Is
178 Tylan General CMLA-21 Baratron Lam 853-017643-003-​F-C139 Used Tested Working
179 Tylan General CMLA-21 Baratron Lam 853-017643-003-​HY-LEAN Used Tested Working
180 Unit Instruments UFC-1200A Mass Flow Controller MFC 100SCCM O2 Used Working
181 Unit Instruments UPC-1300 Mass Flow Controller 797-093824-203 50 SCCM He Used
182 Unit Instruments UPC-1300 Pressure Controller Lam 797-8571-103 Used Working
183 Veriflo Lam 4420 Valve Assembly 839-029227-100-​B Used Working
184 Watlow ME6A1JP2-TB Cartridge Heater Lam Research 678-061017-001 Used Working

The items are subject to prior sale without notice. These items are only for end users.

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