Description
Tegal 900E Cassette to cassette Photoresist Strip/Backside Etching. Tegal 901e Tegal 903e.
Cassette to Cassette Photoresist Strip/Backside Etching. Spatula wafer transport from cassette to cassette. Users are guided through programming and operation by menu-driven software and soft-keys via a built in display and an external terminal. System is currently configured for 4 in. wafers. Sold As Is.
SS5626
