Description
AIXTRON 200R2 MOCVD SYSTEM
* Throughput: up to 3 X 2″ WAFERS.
* (AlInGa)AsP configuration
* IR Lamp Heater
* Gases used: AsH3, PH3, SiH4, H2, N2
* Contains: ( 8) MO Lines and (3) Lauda Baths
* MO used: TMGa, TMAI, TEGa, TMIn, CBR4
* PC Controller: (1) Aixtron, (1) HP Vectra XA.
* Reactor Temperature Gauge: Eurotherm
* Jumo Exhaust Valve: MKS 252 Controller
* Braun Glove Box with DMR Load Lock.
* Pump: Leybold Trivac D65BCS.
* Auto mode (functions can be controlled manually)
Valid Time: Subject to prior sale without notice.
SS1171558992457