Description
PVA Tepla M4L Plasma Etching System
Three gas five shelves.
Shelf Size: 11.25 in. L x 13 in. W.
The M4L is ideal for: Plasma surface modification, Plasma cleaning of organic surfaces, Bond strength enhancement, Plasma etch applications. Plasma asher applications.
The entire bench top system fits in one cabinet, except for the vacuum pump.
Controller: Windows O/S based touch screen interface offering fully automatic control.
Multi-step recipes, real time graphic display, multi-level password access, data logging, and real time SPC monitoring of all plasma parameters is provided.
SS380
