Description
- High-k gate oxides
- passivation layers for OLED
- Passivation of crystal silicon solar cells
- Nano-electronics
- Coating of nanoporous structures
Atomic Layer Deposition System Options
- Integrate with glove box
- substrate heater up to 800 ˚C
- High vacuum pumping system
- Load-Lock System
- Connect with Glove box
- Cluster able for vacuum transfer of substrates