Available Semiconductor Equipment

Description

Please contact us for the availability of the used semiconductor equipment from a giant Fab company. The items are subject to prior sale without notice. This items are only for end users.

Area	OEM	Model	Wfr Size	Configuration Overview	Process Overview
TF	AMAT	P5000	8″	Ox CVD	Alpha Silicon
Test	Credence	QUARTET One	8″	191 channels	TEST SORT
Test	Credence	KALOS HEX	8″	8 sites, 48 I/O per site	TEST SORT
Test	Credence	KALOS HEX	8″	8 sites, 48 I/O per site	TEST SORT
Metrology	NANOMETRICS	Nanospec/AFT M6100	8″	Nanospec/AFT M6099	Film Thick
WET	Semitool	Spectrum 504	8″	2 Modules x 2 Chambers	Polymer clean Via & Metal
Test	Teradyne	A580	8″	unix, Mix signal	TEST SORT
Metrology	KLA	Quantox 64100	8″		1 Load Ports (ASYST)
Metrology	SOPRA	SE 200	8″	Inspection System	metrology
Photo/Metrology	AMAT	WF-736DUV	8″		DF Defect inspection tool
Metrology	KLA	P2-H	8″	Table top unit, open cassette, handler	Profilometer (Stress Measurement Tool)
Metrology	Technos/Bruker	Trex 610T	8″	Frame	metrology
WET	Akrion	Gamma	8″	ST28, PSR, QDR, SD, IPA Dryer	Solvent
WET	Akrion	Gamma	8″	ST28, PSR, QDR, SD	Solvent
Metrology	KLA	AMRAY4200C	8″	Inspection System	SEM
Etch	Tegal	TEGAL 981	8″	Single chamber silicon nitride etcher	Nitride Etch
Etch	TEL	Unity ME 8555sss	8″	3ch Oxide	Oxide
Metorogy	Hitachi kenki	WA1300 (surface profiler tool)	12″	2 Load ports (TDK TAS300)
Metorogy	Bruker	X1D (upgradeed to X3D)	12″	1 load port (ASYST）
Metorogy	Bruker	DX3D	12″	1 load port (ASYST）
Metorogy	Hitachi kenki	WA1300 (surface profiler tool)	12″	2 load ports (TDK TAS300）
Metorogy	Tokyo Seimitsu	WINWIN50 (brightfield)	12″	2 load ports (Brooks　Fixload）
Metorogy	Sanyo Trading	IR-EPOCH3000FOUP (Analyzer spectrometer)	12″	1 load port (TDK TAS300）
Metorogy	FSM Hitachi	FSM900TC-VACC2C300	12″	1 load port (TDK TAS300）
Anneal	Veeco (UltraTEC)	LSA100 (diffusion tool)	12″	2 load ports (ASYST）

OLD Info below.

Item	OEM	Model	Serial Number	Wfr Size	Process
1	Akrion	Akrion Gama	1031 – 04	8″	Solvent
2	Akrion	Akrion Gama	1012-01	8″
3	AMAT	P5000		8″
4	AST/Mattson	AST 2800	97080373	8″	RTP
5	Canon	APT-5800	5800-075	8″
6	Canon	APT-5800	5800-091	8″
7	Canon	APT-5800	5800-074	8″
8	Canon	APT-5800	5800-110	8″
9	Credence	KALOS HEX	K32-9944027	8″	TEST SORT
10	Credence	KALOS HEX	K82-0030076	8″	TEST SORT
11	Credence	QUARTET1	DX000350	8″	TEST SORT
12	Disco	DFG 82IF	GG0245	8″	GRIND
13	Hitachi	WA200	2009	8″
14	KLA-Tencor	FLX-2908	801119481	8″
15	KLA-Tencor	KLA AMRAY 4200	424C90	8″	SEM
16	LTX	Trillium Deltamaster	100411	8″	TEST SORT
17	Nanometrics	M6100	L6100-0501-0043	8″	Film Thick
18	Sopra	Sopra model SE 200	981217/048	8″	metrology
19	Tegal	TEGAL 981	11380	8″	Nitride Etch
20	Teradyne	A580	9442267	8″	TEST SORT
21	Teradyne	A585	9220261	8″	TEST SORT
22	Teradyne	A585		8″	TEST SORT
23	Veeco	D9000	124	8″
24	Veeco	D9000	126	8″