Description

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Model:  STS MPO 520 HRM ICP DRIE

Category:  ICP/HRM

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition:It is still in a Fab at Silicon Valley. It will be available in one month (Nov. 2017) .We sell it at AS IS,WHERE IS. No warranty, No refund. De-installation and crating can be included if necessary.

Location:Silicon Valley, CA USA

Valid Time: Subject to prior sale

Price: TBD. We will help crate it for oversea shipping.

Description for your reference.

(1) Year of manufacture: 2005
(2) DRIE
(3) HR Chamber for High Rate Etch
(4) Gas Lines: 5
(5) Loadlock: Yes
(6) Set up for 150 mm Si wafer deep etch
(7) Chuck: E-chuck
(8) MACs Loader for Cassette to Cassette operation (2 load stations)
(9) Turbopump: MAG 2000 CT
(10)Load Lock Pump: Ebara AA20

(11)Chamber Pump: Edwards IH600
(12)Chiller: Affinity Chiller