Description
Model: Matrix Bobcat 209S Microwave Plasma Asher semiconductor process equipment
Category: Plasma Asher Plasma Descum
Original Equipment Manufacturer: Matrix Integrated Systems, Inc
Condition: Refurbished by seller
Vintage: 2001
S/N: 10235
Wafer Size: 8 inch configuration.
Valid Time: Subject to prior sale
Lead Time: 12 weeks
Location: Silicon Valley, CA, U.S.A.
Warranty: 12 months non-consumable parts.
Installation and training: Available at extra charge
Service Contract: Available at extra charge
Matrix Bobcat 209S plasma Asher Plasma descum semiconductor equipment General Description
| Asher Component | Details |
| Mainframe | |
| Type | Standalone |
| Model | Bobcat 209S |
| Chambers | |
| How Many? | 1 |
| Type | RIE |
| Process (e.g., Ash, Clean, Light Etch) | Photo Resist, SU8 strip |
| Load Locks/Load Plate | |
| Open Cassette or SMIF | Open Cassette |
| How Many? | 1 |
| Robots | |
| How Many? | 1 |
| Method of Transport | Transfer Unit |
| Make/Models | Rorze RR701 |
| RF Generators | |
| How Many? | 2 |
| Make/Models | Comdel FP3111R2 600 W, Microwave generator 3000W |
| Gas Box | |
| Gases used per chamber | 3 |
| Idenfity gases | O2, N2, None |
| MFC’s used (Make/Model) | MKS 1000sccm, 300sccm, 1000sccm |
| Control System | |
| PC or Control Rack? | PC |
| Software Type and Version | Windows NT |
All the Matrix Bobcat 209S Plasma Asher Plasma Descum semiconductor process equipment trademarks belongs to Matrix Integrated Systems, Inc, the original equipment manufacturer. All rights reserved.
