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Matrix Bobcat 209S Asher
Matrix Bobcat 209S AsherMatrix Bobcat 209S AsherMatrix Bobcat 209S Asher

Matrix Bobcat 209S

Model: Matrix Bobcat 209S  semiconductor process equipment

Category:  Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller 

Wafer Size: 8 inch configuration. 

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Category: . Tag: .

Product Description

Model: Matrix Bobcat 209S  Microwave Plasma Asher semiconductor process equipment

Category:  Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller 

Vintage: 2001

S/N: 10235

Wafer Size: 8 inch configuration. 

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 12 months non-consumable parts.

Installation and training: Available at extra charge 

Service Contract: Available at extra charge

Matrix Bobcat 209S plasma Asher Plasma descum semiconductor equipment General Description

 

 
 Asher Component Details
Mainframe
Type Standalone
Model Bobcat 209S
Chambers
How Many? 1
Type RIE
Process (e.g., Ash, Clean, Light Etch) Photo Resist, SU8 strip
Load Locks/Load Plate
Open Cassette or SMIF Open Cassette
How Many? 1
Robots
How Many? 1
Method of Transport Transfer Unit
Make/Models Rorze RR701
RF Generators
How Many? 2
Make/Models Comdel FP3111R2 600 W, Microwave generator 3000W
Gas Box
Gases used per chamber 3
Idenfity gases O2, N2, None
MFC’s used (Make/Model) MKS 1000sccm, 300sccm, 1000sccm
Control System
PC or Control Rack? PC
Software Type and Version Windows NT

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