Description
Model:Lam Rainbow 4525I
The item is only for end user. The item is subject to prior sale without notice.
Category: Plasma Etch
Original Equipment Manufacturer: Lam Research
Condition: Good Condition,. Sell it at AS IS,WHERE IS condition or complete,working, fully tested condition
Quantity: 1 set
Wafer Size: 8-inch
Valid Time: Subject to prior sale
Lead Time: TBD
Location:Morgan Hill,CA95037,USA
Warranty: TBD
Refund: N/A
Inspection: N/A
Installation and training: Yes at extra cost.
Description:
- Envision Software, version E1.6-011 Release
- SECS Interface
- Mechanical Clamping system
- Bottom Actuated Clamp
- Orbital gas panel
- Download recipe: Yes
- Heating of exhausts: ISO
- MTBC: 75 RF Hours
- Generator: PDW2200
- Match:LoFAT
- ISO Match:Yes
- ISO Generator: AW1250
- ISO Heated Paddle
- Throttle Valve: Main chamber and ISO chamber
- Variable Gap
- Wafer Area Pressure (WAP) Manometer
- Hines Indexers
- Exit load lock wafer sensor
- End point detection: Single EP200 Monochromator
- Temperature control
- Lower electrode temperature: 10C
- Upper electrode temperature: 40C
- Ballast and crossover
- Crossover gas number: 1
- Crossover gas flow: 300
- Ballast gas number: 1
- Ballast gas flow: 300
- Gases:
- Gas 1 Ar 1000SCCM
- Gas 2 CF4 100SCCM
- Gas 3 CHF3 100SCCM
- Gas 4 He 500SCCM
- Gas 5 SF6 100SCCM
- Gas 6 N2 100SCCM
- Gas 7
- Gas 8 NF3 1000SCCM
- Gas 11 He 500SCCM
- Gas 12
- Chamber clamp flow: 50SCCM
- Chamber clamp pressure: 50 Torr
The item is only for end user. The item is subject to prior sale without notice.
SS5816
All the Lam Plasma Etcher equipment trademarks belongs to Lam Research , the original equipment manufacturer. All rights reserved.