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Tegal Spare parts

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Description

Semiconductor Equipment Tegal Spare parts

Condition: New or Used or Refurbished

Valid: Subject to prior payment/sale without notice. This is only for end users. Appreciate your time!

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.

1

39-431-002 / FEEDTHROUGH-RF CERAMIC 39-431-002 / TEGAL

2

40-294-003D / CYLINDER, CERAMIC, LOWER ELECTRODE IT900 (4 INCH) / TEGAL

3

40-297-002 Tegal 903e Pin for Plasma Etcher

4

507008615 / AC/DC POWER SUPPLY FOR RF GENERATOR / TEGAL

5

901E Monthly PM O-ring kit, Tegal P/N

6

98-176-001 / PCB SNS-1 SENSOR 15 90X / TEGAL

7

99-002-004 / PCB MOTHERBOARD 415 / TEGAL

8

99-003-002 / PCB PROCESS AUTOMATION / TEGAL

9

99-004-001 / PCB AUTO END POINT DETECT / TEGAL

10

99-013-001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL

11

99-054-001 / PCB AUTOTUNE AT-1.5 415 / TEGAL

12

99-089-001 / PCB E6S-1 SENSOR BLANK / TEGAL

13

99-106-001 / PCB AUTOTUNE SLUG ATS-1 415 421 515 / TEGAL

14

99-165-002 / PCB ESI-2 ELEVATOR SENSOR 900 / TEGAL

15

99-187-001 / PCB AUTOTUNE ATO-1 90X / TEGAL

16

99-187-002 / PCB AUTOTUNE 2 ATO-2 90X / TEGAL

17

99-197-001 / PCB SSL-1 SLOTTED SENSOR 90X / TEGAL

18

99-207-004 / PCB MICRO PROCESSOR / TEGAL

19

99-287-003 / SHUTTLE INTERFACE BOARD SST-3 / TEGAL

20

Acromag AVME 921X Circuit Board Tegal 6550 Etcher

21

Acromag AVME 9320 1018-473B Circuit Board Tegal 6550 Etcher 

22

Acromag AVME 932X Circuit Board Tegal 6550 Etcher 

23

ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003

24

AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008

25

AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008

26

Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A

27

Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal 

28

APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER

29

BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM 

30

Carrier ring 4 inch, Tegal P/N

31

CAT 99-142-001 PCB ADIS-1 TEGAL 915

32

CD1009-00301 / 903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL

33

CERAMIC STANDOFF 1/2 OD X 3/4 LG 6-32 (TEGAL) 80-170-013

34

CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In

35

Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E

36

Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E

37

CR1113-00301EX / MATCHING NETWORK / TEGAL

38

CR1113-00801RW / TEGAL PLASMA, REWORK-MATCHING NETWORK / TEGAL

39

Curved indexer block, Tegal P/N 8100-1091

40

ECM 0-1-115 Tegal 93-101-006 Rev E Cable RF p/n 39–804-001 1 , 41-147-001

41

Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 

42

Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 

43

Endpoint cable, Fiber Optic, Tegal P/N 80-207-159

44

EPROM Firmware Load/Unload, Tegal P/N 26-003-001

45

GCA 66635-14 Circulating System Tegal Precision Scientific

46

GCA Tegal (66635-14) Circulating System (-15C-to +85C)

47

Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002, 410475

48

Isel 10-27-0038 Atmospheric Elevator Tegal 80-055-717 w/Platform & Cables Spare

49

Isel Robotik 10-27-0038 7″ Atmospheric Elevator Robot Tegal 80-055-717 

50

Isel Robotik 10-27-0038 7″ Atmospheric Elevator Tegal 80-055-717 

51

Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001

52

Manifold weldment, 4 line with ultratorr fitting, Tegal P/N

53

Manual for Tegal 801/803, operational and maintenance, schematic manual

54

manual for Tegal 804

55

MOTOR, Belt drive Barber Coleman, Tegal P/N

56

OEM Part TEGAL 39-34-005 Chamber body 903E

57

OEM Part TEGAL 39-341-005 CHAMBER BODY

58

OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901

59

ORIENTAL MOTOR PH266L-33 STEPPER MOTOR 24V 0.3A 1.8/STEP, TEGAL 901E / 903E

60

PCB, Process Control, Tegal P/N 99-019-02

61

PCB, Sensor with cables, Tegal P/N 99-089-001

62

PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001

63

PCB, Tegal P/N 99-095-001

64

Photocell, Tegal P/N 80-500-007

65

PROFACTURE TEGAL ICG-6 Gas Interface Board

66

Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 

67

QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E 5 PIN LOTS

68

RF Match Box for Tegal 803

69

RFPP RF Plasma Products T-501 RF Generator Tegal CR1087-20101 Untested As-Is

70

RFPP RF Plasma Products T-502S RF Generator Tegal CR1087-20101 Untested As-Is

71

Risshi/Tegal YR-9030DHF(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger

72

Risshi/Tegal YR-9030DHI(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger

73

SEALED Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly

74

Sekidenko 2000 Optical Fiber Thermometer Tegal 950-2013-01 Tegal 6550 

75

Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003, 410390

76

Semi-Parts SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001

77

Semitool 26-096-004 949298-00 Spin Rinse Dryer 6500 OEM Controller Tegal 6550

78

Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100

79

Sensor, E4 Ring Present, Tegal P/N

80

Sensor, temperature, Tegal P/N

81

SET OF BELTS FOR SENDER RECEIVER TEGAL 901 903

82

Shaft, Tegal P/N 50-007-001

83

SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01

84

Switch, Tegal P/N 80-678-004

85

Switch, Tegal P/N 80-678-014

86

Tegal , RF Match

87

Tegal / Bay Pneumatic 80-095-217 BES-530-8-8-24-OMT-R BES-530-8-PCB Pneumatic

88

Tegal 00755601 Temperature Display Board, PCB

89

Tegal 0100-00136 Pcb Circuit Board Rev C

90

TEGAL 03601-22-040 / 0360122040 

91

Tegal 045-048 Temperature Probe Assembly for 903e

92

Tegal 07-175-004 RF CART AC MODULE w/ 1 Pipe Protect High Voltage Cable

93

Tegal 1011-00301 Display Board Assembly

94

TEGAL 211 PLASMA-ASHER

95

Tegal 211 Plasmaline Etcher Asher Chamber

96

Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS

97

Tegal 30-251-001 RF Conn Assy

98

Tegal 31-086-006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module

99

Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module

100

TEGAL 33-337-001 INNER BELLOWS

101

Tegal 33-527-001 Bellow Chuck 

102

Tegal 37-231-602 Chuck Ring 

103

Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules

104

Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System 

105

Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e

106

Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9″

107

Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum

108

Tegal 39-733-003 Lower Non-anodize Electrode

109

Tegal 39-735-003 Lower Electrode, 5″

110

Tegal 39-735-003 Lower Non-anodize Electrode

111

Tegal 40-046-001 Quartz Window Rev. D 

112

Tegal 40-140-003D, Ring, Insultator, Ceramic

113

TEGAL 40-275-001 UPPER INSULATOR

114

Tegal 40-606-004 Ceramic Liner HRE2

115

Tegal 41-137-001, Chuck, BTTM Flag 903

116

TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND

117

Tegal 41-238-008 RF Shield React Fill

118

Tegal 41-399-001 Gasket, RF-90Xe

119

TEGAL 415 PLASMA ASHER

120

TEGAL 42-401-001 Bracket Slide Rear LH T915

121

Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS

122

Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is

123

Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003

124

TEGAL 50590 01

125

TEGAL 50590 01 PCB

126

Tegal 50590-01 PCB Plasma Etching

127

Tegal 50590-01 Wafer Etcher Main Controller 80-095 CD1043 Daughter Board PCB

128

TEGAL 515 PLASMA ASHER (With Warranty)

129

Tegal 53-024-003 Sensor Assembly

130

Tegal 53-025-001 Retina Lamp

131

TEGAL 58-027-001

132

Tegal 59-011-001, Linkage Top PL Latch

133

Tegal 6550 CC1326-00600 Chamber Stripper CR1324-00400 MTCH NTWK Source Strip

134

Tegal 701 Inline Automatic Wafer RF Plasma Etcher 

135

Tegal 701 Plasma Inline Wafer RF Etcher Made in USA

136

TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423

137

TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424

138

Tegal 80-095-1026 PCB MATCH CONTROLLER IP1.5

139

Tegal 80-095-270 50555-01 ISS-8 Wafer Etcher CD1043 Main Controller Module Board

140

TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004

141

TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915

142

Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole

143

Tegal 80-202-186, Timing Belt

144

Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70

145

TEGAL 80-202-291

146

TEGAL 80-202-361 Bearing

147

Tegal 803 Inline Automatic RF Plasma Wafer Etcher

148

Tegal 803 Inline Automatic Wafer RF Plasma Etcher 

149

Tegal 803 Inline Automatic Wafer RF Plasma Etcher 

150

Tegal 80-500-002 Photocell 250V 55K

151

Tegal 80-640-018 Profacture For Tegal 901e 903e 12v 0.8w Bay Base

152

Tegal 80-678-029 Flow Switch, AUTOFLOW FS574-587

153

Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series

154

Tegal 81-105-223 Heater 120V 60Hz

155

TEGAL 83-099-001 Lift Pin 3ea

156

Tegal 83-126-003 Rev.C Industrial/Laboratory Controller Aux Board Assy

157

Tegal 900 series upper Chamber, complete

158

Tegal 901e Plasma Etcher #2

159

Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply

160

Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E

161

TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS PN: 39-680-003 Rev D

162

TEGAL 903e ALUMINUM UPPER ELECTRODE, PN: 39-680-003 Rev F

163

Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver

164

TEGAL 903e PLASMA ETCHER EIA-3 ELEVATOR PCB P/N 99-246-003

165

Tegal 903E PLASMA ETCHER PCB, 50590-01

166

Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002

167

Tegal 93-137-009, RF Cable

168

Tegal 94-400-001, Harness Sensor

169

Tegal 94-484-001 Cable Assy

170

Tegal 965 / 915 Plasma Asher / Removed Operational from facility /Complete/Clean

171

TEGAL 98-129-003 PCB CIRCUIT BOARD REV A NIB

172

Tegal 98-176-001 B 99-176-001 K Wafer Plasma Etcher Sensor SNS Board Assembly

173

Tegal 98-176-001 Pcb Circuit Board Rev D

174

Tegal 98-223-002 Pcb Circuit Board Rev B

175

TEGAL 98-249-001 PCB CIRCUIT BROAD REV 2

176

TEGAL 98-249-002 PCB CIRCUIT BOARD, REV C

177

TEGAL 98-287-002 PCB CIRCUIT BOARD REV A

178

Tegal 98-354-002 CPU Transition Board VME PCB Card 

179

Tegal 98-363-00 VME Backplane Board PCB CTC-ML 

180

Tegal 98-398-002 Pcb Circuit Board Rev A

181

Tegal 98-429-001 PCB, 

182

Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB

183

TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy

184

TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy

185

TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy

186

Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher

187

Tegal 99-096-09 DIP Board PCB Rev. G Untested As-Is

188

TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 

189

Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001

190

TEGAL 99-112-001 Top display control, TDC-1 PCB board assy

191

Tegal 99-126-005 903e IGC-5 PCB Module / Card for Plasma Etcher Semiconductor

192

Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N

193

Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E

194

Tegal 99-126-005 PCB Gas Interface

195

Tegal 99-126-005 PCB, IGC-6, Gas Interface, 99-126-005

196

TEGAL 99-126-005 REV H.IGC-5 PCB GAS INTERFACE CONTROLLER BOARD

197

TEGAL 99-126-005 REV P.IGC-5 98-126-005 PLASMA DS-5-4-002 CONTROLLER SHIPSAMEDAY

198

Tegal 99-126-006 Interface Board PCB ICG-6 Untested AS-IS

199

Tegal 99-126-006 PCB IGC-6 Gas Interface

200

Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005

201

Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006

202

Tegal 99-129-003 Pcb Circuit Board Rev B

203

TEGAL 99-129-006 PCB CIRCUIT BOARD REV A NNB

204

Tegal 99-138-001 PCB Assembly, FAB 98-138-001

205

TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E, TMC-4

206

TEGAL 99-138-004 TEMPERATURE MONITOR CONTROL CONTROL BOARD, REV. E TMC-4

207

Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly

208

Tegal 99-160-006 Rev.E Industrial/Laboratory RFI-6 Controller Board Assembly

209

TEGAL 99-165-003 REV A ESI-3 Plasma Etcher Etching

210

Tegal 99-169-005 PHC-5 Wafer Etcher Detector Light Sensor Photocell Board PCB

211

Tegal 99-172-003 PCB

212

Tegal 99-173-003 RFG-3 PCB

213

TEGAL 99-173-004 GENERATOR BOARD. REV D

214

Tegal 99-173-004 Pcb Circuit Board Rev E

215

Tegal 99-173-004 PCB, RFG-4, RF Gen Interface

216

Tegal 99-173-005 PCB RFG-5

217

tegal 99-173-007 RF Interface PCB

218

Tegal 99-173-008 PCB, RFG-8, RF Gen Interface

219

Tegal 99-173-008 PCB, RFG-8, RF Gen Interface

220

Tegal 99-174-007 Rev.1 BPL-7 Industrial PCB Printed Circuit Board Card Unit

221

Tegal 99-174-008 REV A BPL-8 Wafer Module Driver Controller I/O Interface Board

222

Tegal 99-174-008 REV. A BPL-8 Wafer Etcher Interface Main I/O Backplane Board

223

Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit

224

Tegal 99-184-004 MIC-4 Main Controller Module CD1043 Interface Connector Board

225

Tegal 99-185-002 MMI-2 Wafer Etcher CD1043 Main Controller Rear Interface Board

226

Tegal 99-186-001 Rev. 2A Interface Board PCB Att-1 Untested As-Is

227

Tegal 99-187-002 ATO-2 Board

228

Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B Untested As-Is

229

Tegal 99-196-002 ATI-2 PCB Rev. W

230

Tegal 99-196-002 PCB ATI-2 for Tegal 901e

231

Tegal 99-196-003 ATI-3 Microprocessor Controller Module RF Processor Board Assy

232

Tegal 99-196-003 Rev.A Industrial ATI-3 Auto-Tune Board Assembly Unit

233

Tegal 99-200-005 M300353 903e Sensor Interface Spatula SIS-5 REV G

234

Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002

235

Tegal 99-200-005 Sensor Interface PCB SIS-5

236

TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE

237

Tegal 99-201-001 IIQ-1 REV D Wafer Chamber Etcher System Driver Interface Board

238

TEGAL 99-203-004 PCB MNP-4 MTCH NTWK

239

Tegal 99-203-004 Rev G MNP-4 Control Board

240

Tegal 99-204-001 Rev. E OMD-1 Wafer Elevator Handling Selector Driver PCB Board

241

Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW

242

Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board

243

Tegal 99-207-004 PCB

244

Tegal 99-207-004/K MBE-4 PCB

245

Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly

246

Tegal 99-209-003 Pcb Circuit Board Rev D

247

TEGAL 99-214-003 / G AME-3

248

TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3

249

Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board

250

Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board

251

Tegal 99-223-002 Pcb Circuit Board Rev G

252

Tegal 99-223-002 PCB, DSN-2, Dual Sensor

253

Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001

254

Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB

255

Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module

256

Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module

257

Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module

258

Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module

259

Tegal 99-232-004RW PCB

260

Tegal 99-235-004 Rev E MCM-4 Control Board

261

Tegal 99-237-002 Interface Board PCB EEP-2 Untested AS-IS

262

Tegal 99-240-002 PCB

263

Tegal 99-240-003 PCB

264

Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB

265

Tegal 99-247-002 PCB

266

Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher

267

Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy

268

Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS

269

Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board

270

Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy

271

Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy 

272

Tegal 99-287-001D REV C SST PCB

273

Tegal 99-287-003 PCB SST-3 Shuttle Interface

274

Tegal 99-287-003 SST-3 Board

275

Tegal 99-287-003RW Board

276

Tegal 99-287-003RW Platine

277

Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board

278

Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board

279

Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit

280

Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit

281

Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly

282

Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly

283

Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly

284

Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly

285

Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly

286

Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy

287

Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 

288

Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency

289

Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency 

290

Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 

291

Tegal 99-80267-01 PCB Shuttle Interface

292

Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS

293

Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS

294

Tegal 9XX PCB, 99-165-003 REV.J, NOS

295

Tegal 9XX PCB, 99-207-003 REV.2 MBE-3

296

Tegal 9XX PCB, 99-207-004 REV.C MBE-4

297

Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS

298

Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003

299

Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B

300

Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001

301

TEGAL AC MODULE 1028-00302

302

Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board

303

Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit

304

Tegal CC1326-00100 Chamber-Stripper For Parts As-Is

305

Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe 

306

Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit

307

Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In

308

Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In #2

309

Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module

310

Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module

311

Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame

312

Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module

313

TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS

314

Tegal CD1310-00104 Endpoint Module

315

Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher *

316

Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher *

317

Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH

318

Tegal CE00840 WDE 103 ZA053-600

319

Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1

320

Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1

321

Tegal CE00843 2 CTS MALE PLUG S 104 A051-130

322

Tegal CE00844 4 CTS MALE PLUG S 103 A053-130

323

Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1

324

Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I

325

Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module

326

Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly

327

Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module

328

Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly

329

Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit

330

Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit

331

Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame

332

Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU

333

Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit

334

Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit

335

Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit

336

Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly

337

Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In

338

Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit

339

Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly

340

Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit

341

Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS

342

Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module

343

Tegal CE1323-10101 AC Module Distribution

344

Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 

345

Tegal CE1354-00200 DC Power Supply Module

346

Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly

347

Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly

348

Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit

349

Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit

350

Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module

351

Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH

352

Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER

353

Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2)

354

Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK

355

Tegal Compact Air Products Water Chuck, Vacuum Pump

356

Tegal Control Unit

357

Tegal Corp 39-452-002A ARM UPPER LH DOOR T915

358

TEGAL CORP 39-453-001

359

TEGAL CORP 39-453-002

360

Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915

361

Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915

362

TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″

363

TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER

364

Tegal Corp 42-401-002 O-Ring, 235 V

365

Tegal Corp 42-402-001 Bracket Slide Front LH T915

366

Tegal Corp 42-402-002 Bracket Slide Front RH T915

367

Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915

368

Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420

369

Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER

370

Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915

371

Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915

372

Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS

373

Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit

374

Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit

375

Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly

376

Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit

377

Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS

378

Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher

379

Tegal CR1324-00100 RF Match Network Source Strip Untested As-Is

380

Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe 

381

Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE *

382

Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher 

383

Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 

384

Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 *

385

Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher

386

Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool

387

Tegal CV00110 O-RING 699

388

Tegal CV00133 O-RING 178 01250

389

Tegal CV00134 O-RING 200 21313 G2 T47501 FPM

390

Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE

391

Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE

392

Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE

393

Tegal CV00476 O-RING 0.138 X 0.609

394

Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ

395

Tegal CV00481 O-RING 0.210 X 1.1 (PKG 2)

396

Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 (PKG 2)

397

Tegal CV00507 O-RING 533

398

Tegal CV00508 O-RING 270 (PKG 2)

399

Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH

400

Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH

401

Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING (PKG 2)

402

Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit

403

Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000

404

Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor

405

Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor

406

Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly

407

Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly #2

408

Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor

409

Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly AS-IS

410

Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module

411

Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit

412

Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly

413

Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly #2

414

Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module

415

Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board

416

Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher

417

Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher

418

TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201

419

Tegal elevator frame assembly

420

TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202

421

TEGAL EPROM 400k MEMORY PCB, PN 99-095-320

422

Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display 

423

TEGAL Front Robot Loader interface

424

TEGAL GENERATOR ENI MODEL ACG.107

425

Tegal Heater Controller Tegal 6550 Etcher 

426

Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack

427

Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007

428

Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2

429

Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit

430

Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS

431

Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002

432

Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module

433

Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter

434

Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter

435

Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100

436

Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB

437

Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS

438

Tegal Model 421 Manual PCB 99-011-001

439

Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot

440

Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, 1

441

Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS

442

Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS

443

Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M

444

Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH 

445

Tegal MyDax 2H14A Temperature Controller Instruction Manual

446

Tegal P/N 31-165-006 Stepping Motor, Carrier

447

TEGAL PCB ASSY (PARTS) 98-391-004

448

TEGAL PCB ASSY 31-398-002

449

TEGAL PCB ASSY 98-391-004

450

TEGAL PCB ASSY 99-406-001

451

TEGAL PCB ASSY 99-416-001

452

Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply

453

Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A

454

TEGAL PLASMA 903

455

TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B

456

TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F

457

TEGAL Plasma ETCHER SST TEMPERATURE PROBE, P/N 80095-057, NOS

458

Tegal PlasmaLine 200 Plasma Barrel Etcher 

459

Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve

460

TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS

461

TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER

462

Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher *

463

Tegal Quartz PIN P/N 40-297-001-E

464

Tegal RF Delivery

465

Tegal RF Interface PCB # 99-173-008

466

TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E

467

Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit

468

Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit

469

Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400

470

Tegal SPI-80-095-057 Probe Temperature SST

471

Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module

472

Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply

473

Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2

474

Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART

475

Tegal TGL 99-013-001 Rev. G SET-1 Circuit Board TGL 99-013-001

476

Tegal TGL 99-106-001 PCB ATS Auto Tune Slug / 99-106-001 Rev.K

477

Tegal TGL 99-106-001 PCB ATS Auto Tune Slug Printed Circuit Board

478

Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883

479

Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2)

480

Tegal Type 41-137-001 Flag Chuck For Tegal Etcher

481

Tegal Type 80-202-186 Timing Belt (Pack Of 4)

482

Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878

483

Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler

484

Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea.

485

Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS

486

TEGAL XJET-11503 TCU Elbow Fitting, 416192

487

Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board

488

Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit

489

TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B

490

TEGAL1513e MOTOR CONTROLLER ITEM CE 1093

491

Thermo Couple (TC) TEGAL 80-700-xx JES-CE

492

Unit/Tegal CHF3 80SCCM — UFC-1000

493

Vacuum valve, KF-40. Tegal P/N

494

VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe 

495

Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge

496

Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher *

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