Description
Semiconductor Equipment Tegal Spare parts
Condition: New or Used or Refurbished
Valid: Subject to prior payment/sale without notice. This is only for end users. Appreciate your time!
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
1 |
39-431-002 / FEEDTHROUGH-RF CERAMIC 39-431-002 / TEGAL |
2 |
40-294-003D / CYLINDER, CERAMIC, LOWER ELECTRODE IT900 (4 INCH) / TEGAL |
3 |
40-297-002 Tegal 903e Pin for Plasma Etcher |
4 |
507008615 / AC/DC POWER SUPPLY FOR RF GENERATOR / TEGAL |
5 |
901E Monthly PM O-ring kit, Tegal P/N |
6 |
98-176-001 / PCB SNS-1 SENSOR 15 90X / TEGAL |
7 |
99-002-004 / PCB MOTHERBOARD 415 / TEGAL |
8 |
99-003-002 / PCB PROCESS AUTOMATION / TEGAL |
9 |
99-004-001 / PCB AUTO END POINT DETECT / TEGAL |
10 |
99-013-001 / PCB 3 SET POINT TIMER 60HZ 515 / TEGAL |
11 |
99-054-001 / PCB AUTOTUNE AT-1.5 415 / TEGAL |
12 |
99-089-001 / PCB E6S-1 SENSOR BLANK / TEGAL |
13 |
99-106-001 / PCB AUTOTUNE SLUG ATS-1 415 421 515 / TEGAL |
14 |
99-165-002 / PCB ESI-2 ELEVATOR SENSOR 900 / TEGAL |
15 |
99-187-001 / PCB AUTOTUNE ATO-1 90X / TEGAL |
16 |
99-187-002 / PCB AUTOTUNE 2 ATO-2 90X / TEGAL |
17 |
99-197-001 / PCB SSL-1 SLOTTED SENSOR 90X / TEGAL |
18 |
99-207-004 / PCB MICRO PROCESSOR / TEGAL |
19 |
99-287-003 / SHUTTLE INTERFACE BOARD SST-3 / TEGAL |
20 |
Acromag AVME 921X Circuit Board Tegal 6550 Etcher |
21 |
Acromag AVME 9320 1018-473B Circuit Board Tegal 6550 Etcher |
22 |
Acromag AVME 932X Circuit Board Tegal 6550 Etcher |
23 |
ADM-3 POWER MONITOR PCB FOR TEGAL 9XXe SYSTEMS PN: 99-209-003 |
24 |
AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 |
25 |
AIRTROL F-4200-60 Pressure Swtich, Tegal p/n: 80-679-008 |
26 |
Applied Ceramics 40-588-003B Insulator Outer Tegal 95-00054A |
27 |
Applied Ceramics 40-753-004-3 Disc Top Oblated Stripper Tegal |
28 |
APPLIED CERAMICS TEGAL RING, INSULATOR , OUTER |
29 |
BURKS 81-007-145 SEAL PUMP TEGAL SEAL 1/2 TEPOLITE TGL-1013 PHANTOM |
30 |
Carrier ring 4 inch, Tegal P/N |
31 |
CAT 99-142-001 PCB ADIS-1 TEGAL 915 |
32 |
CD1009-00301 / 903E MICROPROCESSOR BOARD FOR PLASMA ETCHER / TEGAL |
33 |
CERAMIC STANDOFF 1/2 OD X 3/4 LG 6-32 (TEGAL) 80-170-013 |
34 |
CollabRx/Tegal CD1043-00601 Industrial Main Controller Control Module/Plug-In |
35 |
Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E |
36 |
Comdel T1000E/RF RF Signal Generator Supply Tegal T-1000E |
37 |
CR1113-00301EX / MATCHING NETWORK / TEGAL |
38 |
CR1113-00801RW / TEGAL PLASMA, REWORK-MATCHING NETWORK / TEGAL |
39 |
Curved indexer block, Tegal P/N 8100-1091 |
40 |
ECM 0-1-115 Tegal 93-101-006 Rev E Cable RF p/n 39–804-001 1 , 41-147-001 |
41 |
Edwards 1850 Mechanical Vacuum Throttle Valve ISO200 Tegal 6500 |
42 |
Edwards W185-08-001 Mechanical Vacuum Throttle Valve 1850 ISO200 Tegal 6500 |
43 |
Endpoint cable, Fiber Optic, Tegal P/N 80-207-159 |
44 |
EPROM Firmware Load/Unload, Tegal P/N 26-003-001 |
45 |
GCA 66635-14 Circulating System Tegal Precision Scientific |
46 |
GCA Tegal (66635-14) Circulating System (-15C-to +85C) |
47 |
Integrated Circuit Support ICS-40-297-002 Quartz Pin, Tegal 40-297-002, 410475 |
48 |
Isel 10-27-0038 Atmospheric Elevator Tegal 80-055-717 w/Platform & Cables Spare |
49 |
Isel Robotik 10-27-0038 7″ Atmospheric Elevator Robot Tegal 80-055-717 |
50 |
Isel Robotik 10-27-0038 7″ Atmospheric Elevator Tegal 80-055-717 |
51 |
Manifold weldment, 3 line with ultratorr fitting, Tegal P/N 33-091-001 |
52 |
Manifold weldment, 4 line with ultratorr fitting, Tegal P/N |
53 |
Manual for Tegal 801/803, operational and maintenance, schematic manual |
54 |
manual for Tegal 804 |
55 |
MOTOR, Belt drive Barber Coleman, Tegal P/N |
56 |
OEM Part TEGAL 39-34-005 Chamber body 903E |
57 |
OEM Part TEGAL 39-341-005 CHAMBER BODY |
58 |
OEM Part TEGAL 40-297-110C TEGAL 40-297-110C Pin Ceramic 901 |
59 |
ORIENTAL MOTOR PH266L-33 STEPPER MOTOR 24V 0.3A 1.8/STEP, TEGAL 901E / 903E |
60 |
PCB, Process Control, Tegal P/N 99-019-02 |
61 |
PCB, Sensor with cables, Tegal P/N 99-089-001 |
62 |
PCB, TEGAL Main, Tegal P/N 99-114-001, 99-117-001 |
63 |
PCB, Tegal P/N 99-095-001 |
64 |
Photocell, Tegal P/N 80-500-007 |
65 |
PROFACTURE TEGAL ICG-6 Gas Interface Board |
66 |
Qualidyne 234AA0A-0172 Power Supply 23092EFG Tegal VME-PS400-01 |
67 |
QUARTZ LIFT PINS TEGAL 903ACS, 903e 40-297-002 Rev E 5 PIN LOTS |
68 |
RF Match Box for Tegal 803 |
69 |
RFPP RF Plasma Products T-501 RF Generator Tegal CR1087-20101 Untested As-Is |
70 |
RFPP RF Plasma Products T-502S RF Generator Tegal CR1087-20101 Untested As-Is |
71 |
Risshi/Tegal YR-9030DHF(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger |
72 |
Risshi/Tegal YR-9030DHI(T) 2-Ch. Constant Temperature Circulator/Heat Exchanger |
73 |
SEALED Tegal XJET-14004-2 HGST Carrier 6500 Centring Ring Assembly |
74 |
Sekidenko 2000 Optical Fiber Thermometer Tegal 950-2013-01 Tegal 6550 |
75 |
Semi Parts SPI-99-247-003ALT Spatula Inerface SPI-3, Tegal 99-247-003, 410390 |
76 |
Semi-Parts SPI-99-224-001 Center Sensor, CSN-1, PCB, Tegal 99-224-001 |
77 |
Semitool 26-096-004 949298-00 Spin Rinse Dryer 6500 OEM Controller Tegal 6550 |
78 |
Sensor, Cybeq, Siltec, Tegal P/N 0121-6260-100 |
79 |
Sensor, E4 Ring Present, Tegal P/N |
80 |
Sensor, temperature, Tegal P/N |
81 |
SET OF BELTS FOR SENDER RECEIVER TEGAL 901 903 |
82 |
Shaft, Tegal P/N 50-007-001 |
83 |
SMC / Tegal 98-008-01 Rev-B PCB Assy ULUSP-98008-01 |
84 |
Switch, Tegal P/N 80-678-004 |
85 |
Switch, Tegal P/N 80-678-014 |
86 |
Tegal , RF Match |
87 |
Tegal / Bay Pneumatic 80-095-217 BES-530-8-8-24-OMT-R BES-530-8-PCB Pneumatic |
88 |
Tegal 00755601 Temperature Display Board, PCB |
89 |
Tegal 0100-00136 Pcb Circuit Board Rev C |
90 |
TEGAL 03601-22-040 / 0360122040 |
91 |
Tegal 045-048 Temperature Probe Assembly for 903e |
92 |
Tegal 07-175-004 RF CART AC MODULE w/ 1 Pipe Protect High Voltage Cable |
93 |
Tegal 1011-00301 Display Board Assembly |
94 |
TEGAL 211 PLASMA-ASHER |
95 |
Tegal 211 Plasmaline Etcher Asher Chamber |
96 |
Tegal 211 Plasmaline Industrial Semiconductor Etcher Asher Chamber Unit PARTS |
97 |
Tegal 30-251-001 RF Conn Assy |
98 |
Tegal 31-086-006 Wafer Etcher Microprocessor Mag Phase RF Input Output Module |
99 |
Tegal 3152140-00B PEP 250-T Industrial Z-Match Antenna Tuner Module |
100 |
TEGAL 33-337-001 INNER BELLOWS |
101 |
Tegal 33-527-001 Bellow Chuck |
102 |
Tegal 37-231-602 Chuck Ring |
103 |
Tegal 37-423-001 Rev.4 Industrial Lab Metal Disk w/ Dual Protruding Modules |
104 |
Tegal 37-441-004 Cooling Flange 6500 HRe Dual Frequency Etch System |
105 |
Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e |
106 |
Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e Aluminum 9″ |
107 |
Tegal 39-680-003, Electrode, Non-anodize shower head Tegal 903, Aluminum |
108 |
Tegal 39-733-003 Lower Non-anodize Electrode |
109 |
Tegal 39-735-003 Lower Electrode, 5″ |
110 |
Tegal 39-735-003 Lower Non-anodize Electrode |
111 |
Tegal 40-046-001 Quartz Window Rev. D |
112 |
Tegal 40-140-003D, Ring, Insultator, Ceramic |
113 |
TEGAL 40-275-001 UPPER INSULATOR |
114 |
Tegal 40-606-004 Ceramic Liner HRE2 |
115 |
Tegal 41-137-001, Chuck, BTTM Flag 903 |
116 |
TEGAL 41-215-001 GASKET GROUND RING RETAINER FOR USE WITH SOLID GROUND |
117 |
Tegal 41-238-008 RF Shield React Fill |
118 |
Tegal 41-399-001 Gasket, RF-90Xe |
119 |
TEGAL 415 PLASMA ASHER |
120 |
TEGAL 42-401-001 Bracket Slide Rear LH T915 |
121 |
Tegal 42-841-001 Rev.B Industrial Upper Chamber Assembly 39-700-007 Rev.A PARTS |
122 |
Tegal 46-952-002 Stripper Gas Panel UFC-1100A As-Is |
123 |
Tegal 50566-02-ISS3 AUX/RF Controller Control Module/Board/Card 83-126-003 |
124 |
TEGAL 50590 01 |
125 |
TEGAL 50590 01 PCB |
126 |
Tegal 50590-01 PCB Plasma Etching |
127 |
Tegal 50590-01 Wafer Etcher Main Controller 80-095 CD1043 Daughter Board PCB |
128 |
TEGAL 515 PLASMA ASHER (With Warranty) |
129 |
Tegal 53-024-003 Sensor Assembly |
130 |
Tegal 53-025-001 Retina Lamp |
131 |
TEGAL 58-027-001 |
132 |
Tegal 59-011-001, Linkage Top PL Latch |
133 |
Tegal 6550 CC1326-00600 Chamber Stripper CR1324-00400 MTCH NTWK Source Strip |
134 |
Tegal 701 Inline Automatic Wafer RF Plasma Etcher |
135 |
Tegal 701 Plasma Inline Wafer RF Etcher Made in USA |
136 |
TEGAL 701 RFG Plasma Inline Wafer RF Etcher, RF MATCH, 106423 |
137 |
TEGAL 701-SP MN RF Match Plasma in-line etcher, 106424 |
138 |
Tegal 80-095-1026 PCB MATCH CONTROLLER IP1.5 |
139 |
Tegal 80-095-270 50555-01 ISS-8 Wafer Etcher CD1043 Main Controller Module Board |
140 |
TEGAL 80-095-278 PCB MICROPROCESSOR CONTROLLER 99-207-004 |
141 |
TEGAL 80-200-219 “SLIM-TRACK” BARNES ENG. CO.; SLIDE CHAMBER T915 |
142 |
Tegal 80-202-046, Gromnet, 5/16ID, 7/16DIA Hole |
143 |
Tegal 80-202-186, Timing Belt |
144 |
Tegal 80-202-190, O-R 10, 1/2ID 3/16W, D70 |
145 |
TEGAL 80-202-291 |
146 |
TEGAL 80-202-361 Bearing |
147 |
Tegal 803 Inline Automatic RF Plasma Wafer Etcher |
148 |
Tegal 803 Inline Automatic Wafer RF Plasma Etcher |
149 |
Tegal 803 Inline Automatic Wafer RF Plasma Etcher |
150 |
Tegal 80-500-002 Photocell 250V 55K |
151 |
Tegal 80-640-018 Profacture For Tegal 901e 903e 12v 0.8w Bay Base |
152 |
Tegal 80-678-029 Flow Switch, AUTOFLOW FS574-587 |
153 |
Tegal 81-007-138 Bellow Plug for Plasma Etcher 900 Series |
154 |
Tegal 81-105-223 Heater 120V 60Hz |
155 |
TEGAL 83-099-001 Lift Pin 3ea |
156 |
Tegal 83-126-003 Rev.C Industrial/Laboratory Controller Aux Board Assy |
157 |
Tegal 900 series upper Chamber, complete |
158 |
Tegal 901e Plasma Etcher #2 |
159 |
Tegal 901e Plasma Etcher 901e Plasma Etcher #1 with ENI ACG-10 RF Power Supply |
160 |
Tegal 903 Showerhead Profacture Pro-37-221-002 Electrode Upper 903E |
161 |
TEGAL 903e ALUMINUM UPPER ELECTRODE, NOS PN: 39-680-003 Rev D |
162 |
TEGAL 903e ALUMINUM UPPER ELECTRODE, PN: 39-680-003 Rev F |
163 |
Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver |
164 |
TEGAL 903e PLASMA ETCHER EIA-3 ELEVATOR PCB P/N 99-246-003 |
165 |
Tegal 903E PLASMA ETCHER PCB, 50590-01 |
166 |
Tegal 903e Plasma ETCHER Quartz Pins, Set of 6, 40-297-002 |
167 |
Tegal 93-137-009, RF Cable |
168 |
Tegal 94-400-001, Harness Sensor |
169 |
Tegal 94-484-001 Cable Assy |
170 |
Tegal 965 / 915 Plasma Asher / Removed Operational from facility /Complete/Clean |
171 |
TEGAL 98-129-003 PCB CIRCUIT BOARD REV A NIB |
172 |
Tegal 98-176-001 B 99-176-001 K Wafer Plasma Etcher Sensor SNS Board Assembly |
173 |
Tegal 98-176-001 Pcb Circuit Board Rev D |
174 |
Tegal 98-223-002 Pcb Circuit Board Rev B |
175 |
TEGAL 98-249-001 PCB CIRCUIT BROAD REV 2 |
176 |
TEGAL 98-249-002 PCB CIRCUIT BOARD, REV C |
177 |
TEGAL 98-287-002 PCB CIRCUIT BOARD REV A |
178 |
Tegal 98-354-002 CPU Transition Board VME PCB Card |
179 |
Tegal 98-363-00 VME Backplane Board PCB CTC-ML |
180 |
Tegal 98-398-002 Pcb Circuit Board Rev A |
181 |
Tegal 98-429-001 PCB, |
182 |
Tegal 99-052-001 PCB, AUX-1, 99-049-001 PCB |
183 |
TEGAL 99-081-001 Gas control interface, GCS-1 PCB assy |
184 |
TEGAL 99-081-001 Gas control interface, GCS-1 PCB board assy |
185 |
TEGAL 99-082-003 gas control logic, GCL-3 PCB board assy |
186 |
Tegal 99-089-001 Sensor and Cables for 903 or 915 Etcher/Asher |
187 |
Tegal 99-096-09 DIP Board PCB Rev. G Untested As-Is |
188 |
TEGAL 99-104-001 PCB ELEVATOR CONTROL FAB 98-104-001 |
189 |
Tegal 99-104-001, PCB Elevator Control, FAB 98-104-001 |
190 |
TEGAL 99-112-001 Top display control, TDC-1 PCB board assy |
191 |
Tegal 99-126-005 903e IGC-5 PCB Module / Card for Plasma Etcher Semiconductor |
192 |
Tegal 99-126-005 IGC-5 Gas Control PCB Rev. N |
193 |
Tegal 99-126-005 IGC-5 PCB Rev. J for 901E and 903E |
194 |
Tegal 99-126-005 PCB Gas Interface |
195 |
Tegal 99-126-005 PCB, IGC-6, Gas Interface, 99-126-005 |
196 |
TEGAL 99-126-005 REV H.IGC-5 PCB GAS INTERFACE CONTROLLER BOARD |
197 |
TEGAL 99-126-005 REV P.IGC-5 98-126-005 PLASMA DS-5-4-002 CONTROLLER SHIPSAMEDAY |
198 |
Tegal 99-126-006 Interface Board PCB ICG-6 Untested AS-IS |
199 |
Tegal 99-126-006 PCB IGC-6 Gas Interface |
200 |
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-005 |
201 |
Tegal 99-126-006 PCB, IGC-6, Gas Interface, 98-126-006 |
202 |
Tegal 99-129-003 Pcb Circuit Board Rev B |
203 |
TEGAL 99-129-006 PCB CIRCUIT BOARD REV A NNB |
204 |
Tegal 99-138-001 PCB Assembly, FAB 98-138-001 |
205 |
TEGAL 99-138-004 TEMP MONITOR CONTROL PCB. Rev.E, TMC-4 |
206 |
TEGAL 99-138-004 TEMPERATURE MONITOR CONTROL CONTROL BOARD, REV. E TMC-4 |
207 |
Tegal 99-160-006 Industrial/Laboratory Controller Board Assembly |
208 |
Tegal 99-160-006 Rev.E Industrial/Laboratory RFI-6 Controller Board Assembly |
209 |
TEGAL 99-165-003 REV A ESI-3 Plasma Etcher Etching |
210 |
Tegal 99-169-005 PHC-5 Wafer Etcher Detector Light Sensor Photocell Board PCB |
211 |
Tegal 99-172-003 PCB |
212 |
Tegal 99-173-003 RFG-3 PCB |
213 |
TEGAL 99-173-004 GENERATOR BOARD. REV D |
214 |
Tegal 99-173-004 Pcb Circuit Board Rev E |
215 |
Tegal 99-173-004 PCB, RFG-4, RF Gen Interface |
216 |
Tegal 99-173-005 PCB RFG-5 |
217 |
tegal 99-173-007 RF Interface PCB |
218 |
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface |
219 |
Tegal 99-173-008 PCB, RFG-8, RF Gen Interface |
220 |
Tegal 99-174-007 Rev.1 BPL-7 Industrial PCB Printed Circuit Board Card Unit |
221 |
Tegal 99-174-008 REV A BPL-8 Wafer Module Driver Controller I/O Interface Board |
222 |
Tegal 99-174-008 REV. A BPL-8 Wafer Etcher Interface Main I/O Backplane Board |
223 |
Tegal 99-174-008 REV-F BLP-8 Industrial PCB Printed Circuit Board Card Unit |
224 |
Tegal 99-184-004 MIC-4 Main Controller Module CD1043 Interface Connector Board |
225 |
Tegal 99-185-002 MMI-2 Wafer Etcher CD1043 Main Controller Rear Interface Board |
226 |
Tegal 99-186-001 Rev. 2A Interface Board PCB Att-1 Untested As-Is |
227 |
Tegal 99-187-002 ATO-2 Board |
228 |
Tegal 99-187-002 ATO-2 Interface Board PCB Rev. B Untested As-Is |
229 |
Tegal 99-196-002 ATI-2 PCB Rev. W |
230 |
Tegal 99-196-002 PCB ATI-2 for Tegal 901e |
231 |
Tegal 99-196-003 ATI-3 Microprocessor Controller Module RF Processor Board Assy |
232 |
Tegal 99-196-003 Rev.A Industrial ATI-3 Auto-Tune Board Assembly Unit |
233 |
Tegal 99-200-005 M300353 903e Sensor Interface Spatula SIS-5 REV G |
234 |
Tegal 99-200-005 PCB, SIS-5, Sensor Interface, 98-200-002 |
235 |
Tegal 99-200-005 Sensor Interface PCB SIS-5 |
236 |
TEGAL 99-200-300 REV. B, PCB SENSOR INTERFACE |
237 |
Tegal 99-201-001 IIQ-1 REV D Wafer Chamber Etcher System Driver Interface Board |
238 |
TEGAL 99-203-004 PCB MNP-4 MTCH NTWK |
239 |
Tegal 99-203-004 Rev G MNP-4 Control Board |
240 |
Tegal 99-204-001 Rev. E OMD-1 Wafer Elevator Handling Selector Driver PCB Board |
241 |
Tegal 99-207-004 MBE-4 Mem And Baud PCB Lagacy Semi Repaired 99-207-004RW |
242 |
Tegal 99-207-004 MBE-4 Wafer Main Controller CD1043 Module PCB Daughter Board |
243 |
Tegal 99-207-004 PCB |
244 |
Tegal 99-207-004/K MBE-4 PCB |
245 |
Tegal 99-209-002 Industrial AC/DC Power Monitor PCB Circuit Board Assembly |
246 |
Tegal 99-209-003 Pcb Circuit Board Rev D |
247 |
TEGAL 99-214-003 / G AME-3 |
248 |
TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3 |
249 |
Tegal 99-217-001 SOH-1 Wafer Elevator Motor Transfer Selector PCB Board |
250 |
Tegal 99-219-001 Wafer Elevator 15-Pin Interface Sensor Controller PCB Board |
251 |
Tegal 99-223-002 Pcb Circuit Board Rev G |
252 |
Tegal 99-223-002 PCB, DSN-2, Dual Sensor |
253 |
Tegal 99-228-001 PCB, FLS-1, Flag Sensor, 98-228-001 |
254 |
Tegal 99-231-001 ITP-1 Wafer Etcher CE1029 DC Module Power Supply Board PCB |
255 |
Tegal 99-232-003 Rev.5 M0C-3 Plug-In PCB Circuit Board Assembly Module |
256 |
Tegal 99-232-003 Rev.P M0C-4 Plug-In PCB Circuit Board Assembly Module |
257 |
Tegal 99-232-004 EX Plug-In PCB Circuit Board Assembly Module |
258 |
Tegal 99-232-004 Rev.T M0C-4 Plug-In PCB Circuit Board Assembly Module |
259 |
Tegal 99-232-004RW PCB |
260 |
Tegal 99-235-004 Rev E MCM-4 Control Board |
261 |
Tegal 99-237-002 Interface Board PCB EEP-2 Untested AS-IS |
262 |
Tegal 99-240-002 PCB |
263 |
Tegal 99-240-003 PCB |
264 |
Tegal 99-240-004 ETS-4 Wafer Etcher CD1043 Main Controller Daughter Board PCB |
265 |
Tegal 99-247-002 PCB |
266 |
Tegal 99-249-002 PCB For Tegal 901E & 903E Plasma Etcher |
267 |
Tegal 99-253-001 PMT-1 Rev-K Industrial Board Module Assy |
268 |
Tegal 99-261-002 MFC-2 Wafer Chamber Etcher Gas Delivery Interface Board PARTS |
269 |
Tegal 99-261-002 REV.C MFC-2 Wafer Etcher Gas Flow Control Interface PCB Board |
270 |
Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
271 |
Tegal 99-261-002 Rev.C-MFC-2 Industrial/Laboratory Connector Board Assy |
272 |
Tegal 99-287-001D REV C SST PCB |
273 |
Tegal 99-287-003 PCB SST-3 Shuttle Interface |
274 |
Tegal 99-287-003 SST-3 Board |
275 |
Tegal 99-287-003RW Board |
276 |
Tegal 99-287-003RW Platine |
277 |
Tegal 99-299-001 REV. D MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
278 |
Tegal 99-299-001 REV. F MCR-1 Wafer Etcher Transfer Driver Interface PCB Board |
279 |
Tegal 99-299-001 Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
280 |
Tegal 99-299-001RW Rev.F Industrial/Laboratory MCR-1 Board Assembly Unit |
281 |
Tegal 99-318-001/B Industrial/Laboratory CSI-1 PCB Board Assembly |
282 |
Tegal 99-339-001 PMC CPU Transition Board Plug-In Module Assembly |
283 |
Tegal 99-340-001/A PMC Serial Transition Board Plug-In Module Assembly |
284 |
Tegal 99-341-001 Industrial/Laboratory Console Interface Board PCB Assembly |
285 |
Tegal 99-343-001/A Industrial/Laboratory Master Control Console Board Assembly |
286 |
Tegal 99-344-001/C Industrial/Laboratory System Cable Interface Board Assy |
287 |
Tegal 99-360-001 Processor Board VME PCB Card AOB-1 98-360-001 |
288 |
Tegal 99-385-001 DC/DC Converter Board PCB Rev. 4 6500 HRe Dual Frequency |
289 |
Tegal 99-385-001 DC/DC Converter Board PCB Rev. A 6500 HRe Dual Frequency |
290 |
Tegal 99-395-002 CIP-2 CTC Board PCB Card 98-395-001 |
291 |
Tegal 99-80267-01 PCB Shuttle Interface |
292 |
Tegal 9XX PCB TMC-3 TEMP MONITOR CONTROL, P/N 99-138-003, NOS |
293 |
Tegal 9XX PCB TMC-4 TEMP MONITOR CONTROL, P/N 99-138-004, NOS |
294 |
Tegal 9XX PCB, 99-165-003 REV.J, NOS |
295 |
Tegal 9XX PCB, 99-207-003 REV.2 MBE-3 |
296 |
Tegal 9XX PCB, 99-207-004 REV.C MBE-4 |
297 |
Tegal 9XX PLASMA ETCHER INTERFACE PCB, P/N 98-223-002 REV A, NOS |
298 |
Tegal 9XX PLASMA ETCHER PCB IMN-3 RF MATCH INTERFACE, 99-172-003, 98-172-003 |
299 |
Tegal 9XX PLASMA ETCHER PCB SIS-5 SENSOR INTERFACE P/N 99-200-005 REV B |
300 |
Tegal 9XX PLASMA ETCHER SOLENOID VALVE ASSY SND/RCV 31-173-001 |
301 |
TEGAL AC MODULE 1028-00302 |
302 |
Tegal BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
303 |
Tegal CC1147-00303 REAC Industrial/Laboratory Triode Split Assembly Unit |
304 |
Tegal CC1326-00100 Chamber-Stripper For Parts As-Is |
305 |
Tegal CC1327-00300 EZ Reactor Assembly HRE-PM1 6500 HRe |
306 |
Tegal CD1039-00301 Industrial/Laboratory Endpoint Detector Assembly Unit |
307 |
Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In |
308 |
Tegal CD-1039-00303 Endpoint Detector Detection System Module/Plug-In #2 |
309 |
Tegal CD1039-00403 Wafer Etcher Plasma Chamber System Endpoint Detector Module |
310 |
Tegal CD1043-00601 Industrial Wafer Etcher System Main Controller Module |
311 |
Tegal CD1043-00601 Wafer Etcher Plasma Main Controller Module Chassis Frame |
312 |
Tegal CD1043-00601RW Industrial/Lab Main Controller Assembly Module |
313 |
TEGAL CD1298-02300 CON-MDL-VME-1HD CHASIS |
314 |
Tegal CD1310-00104 Endpoint Module |
315 |
Tegal CD1310-00300 Endpoint Module PM1 PM Tegal 6550 Etcher * |
316 |
Tegal CD1310-00300 Endpoint Module Tegal 6550 Etcher * |
317 |
Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH |
318 |
Tegal CE00840 WDE 103 ZA053-600 |
319 |
Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1 |
320 |
Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1 |
321 |
Tegal CE00843 2 CTS MALE PLUG S 104 A051-130 |
322 |
Tegal CE00844 4 CTS MALE PLUG S 103 A053-130 |
323 |
Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1 |
324 |
Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I |
325 |
Tegal CE1028-00303 AC Module Wafer Etcher 1/3/5/10/15A Power Controller Module |
326 |
Tegal CE1028-00303 Industrial AC Module Wafer Processing Plug-In Assembly |
327 |
Tegal CE1028-00304 AC Module Wafer Etcher 1/2/5/15A Power Controller Module |
328 |
Tegal CE1028-00304 Industrial AC Module Wafer Processing Plug-In Assembly |
329 |
Tegal CE1028-00304 Industrial/Laboratory AC Module Assembly Unit |
330 |
Tegal CE1028-00401RW Industrial/Lab AC Module Assembly Unit |
331 |
Tegal CE1029-00201 DC Module Wafer Etcher Power Supply Chassis Enclosure Frame |
332 |
Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply PSU |
333 |
Tegal CE1029-00201 DC Module Wafer Etcher System -15/5/15/24V Power Supply Unit |
334 |
Tegal CE1029-00201 Industrial/Laboratory DC Module Assembly Unit |
335 |
Tegal CE1029-00201 Industrial/Laboratory DC Power Module Plug-In Unit |
336 |
Tegal CE1029W00840 Industrial/Laboratory DC Power Module Plug-In Assembly |
337 |
Tegal CE1093-0030 Industrial Motor Controller Control Module/Unit/Plug-In |
338 |
Tegal CE1093-00303 Industrial Motor Controller Module Plug-In Unit |
339 |
Tegal CE1093-00303 Industrial Plug-In Motor Controller Module Assembly |
340 |
Tegal CE1153-00102 Industrial/Lab PSVTN Module Assy w/Watlow 804 Controller Unit |
341 |
Tegal CE1153-00102 Watlow 804 Temperature Controller Passivation Module PARTS |
342 |
Tegal CE1153-00102RW PSVTN Watlow 804 Temperature Controller Passivation Module |
343 |
Tegal CE1323-10101 AC Module Distribution |
344 |
Tegal CE1323-10101 AC Module Distribution Unit 6500 HRe SW HTR 208 |
345 |
Tegal CE1354-00200 DC Power Supply Module |
346 |
Tegal CG1041-00402RW Industrial Pressure Controller Module Assembly |
347 |
Tegal CG1148-00602 Wafer Chamber Gass Delivery Valve UFC-1020 BCI3 MFC Assembly |
348 |
Tegal CG1150-00205RN Industrial 8-Channel RWK Gas Controller Plug-In Module Unit |
349 |
Tegal CG1150-00206 Industrial 8-Channel Plug-In Gas Controller Module Unit |
350 |
Tegal CG1150-0020G Industrial 8-Channel Gas Controller Module |
351 |
Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH |
352 |
Tegal CM05136 O-RING KIT VAT PENDULUM THROTTLE VALVE PUMPING CHAMBER |
353 |
Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2) |
354 |
Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK |
355 |
Tegal Compact Air Products Water Chuck, Vacuum Pump |
356 |
Tegal Control Unit |
357 |
Tegal Corp 39-452-002A ARM UPPER LH DOOR T915 |
358 |
TEGAL CORP 39-453-001 |
359 |
TEGAL CORP 39-453-002 |
360 |
Tegal Corp 39-659-001 Screw Stud Standoff Aluminum 38 T915 |
361 |
Tegal Corp 39-958-001 TEGAL PULLEY TENSION DOOR T915 |
362 |
TEGAL CORP 40-575-002-C RING, CHUCK FRONTLINE – 6″ |
363 |
TEGAL CORP 40-751-601-A RING, 6″ WAFER CENTER STRIPPER |
364 |
Tegal Corp 42-401-002 O-Ring, 235 V |
365 |
Tegal Corp 42-402-001 Bracket Slide Front LH T915 |
366 |
Tegal Corp 42-402-002 Bracket Slide Front RH T915 |
367 |
Tegal Corp 57-017-001 TEGAL PULLEY IDLER (BIG) DOOR T915 |
368 |
Tegal Corp 80-095-146 Transformer 220/115-24V AC Module T9156-P-1623420 |
369 |
Tegal Corp 81-105-222 Sensor, Control(Platinum)Temperature TEGAL T915 RES-ASHER |
370 |
Tegal Corp 99-196-003RW PCB ATI-3 AUTO TUNE T915 |
371 |
Tegal Corp 99-206-001 PCB AGCP-1 TEGAL 915 |
372 |
Tegal CP1037 CRT Program Terminal 13″ Wafer Etcher System Display Monitor PARTS |
373 |
Tegal CR1031-00305 Industrial 100kHz Matching Network Plug-In Module Unit |
374 |
Tegal CR1031-00305RW Industrial 100kHz Matching Network Plug-In Module Unit |
375 |
Tegal CR1031-00306 Industrial/Laboratory 100kHz Matching Network Assembly |
376 |
Tegal CR1040-00205EX Industrial RF Controller Plug-In Module Unit |
377 |
Tegal CR1040-00205RW RF Controller Wafer Etcher Signal Generator Module PARTS |
378 |
Tegal CR1296-00100 KHZ Controller CONT MTCH NTWK 500W 45 Tegal 6500 Etcher |
379 |
Tegal CR1324-00100 RF Match Network Source Strip Untested As-Is |
380 |
Tegal CR1324-00400 RF Match Network Source Strip 6500 HRe |
381 |
Tegal CR1325-00300 MHz Controller CONT MTCH NTWK STRIPPE * |
382 |
Tegal CR1330-10100 MHz Controller Cont 6550 RF Source Tegal 6550 Etcher |
383 |
Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 |
384 |
Tegal CR1338-10102 RF Match MTCH NTWK 450KHZ-ESC T Tegal 6550 * |
385 |
Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher |
386 |
Tegal CR1350-00100 Source Reactor Module Process Chamber Tegal 6550 Etcher Tool |
387 |
Tegal CV00110 O-RING 699 |
388 |
Tegal CV00133 O-RING 178 01250 |
389 |
Tegal CV00134 O-RING 200 21313 G2 T47501 FPM |
390 |
Tegal CV00136 O-RING 300 41145 COOLANT LOWER COOLING PLATE OUTER SOURCE |
391 |
Tegal CV00137 O-RING 300 38500 COOLANT LOWER COOLING PLATE OUTER SOURCE |
392 |
Tegal CV00325 O-RING 200 23100 COOLANT LOWER COOLING PLATE INNER SOURCE |
393 |
Tegal CV00476 O-RING 0.138 X 0.609 |
394 |
Tegal CV00477 O-RING 0.139 X 0.734 CHEMRAZ |
395 |
Tegal CV00481 O-RING 0.210 X 1.1 (PKG 2) |
396 |
Tegal CV00482 O-RING CHEMRAZ 366C639 7.225 INCH X 0.210 INCH SC639 (PKG 2) |
397 |
Tegal CV00507 O-RING 533 |
398 |
Tegal CV00508 O-RING 270 (PKG 2) |
399 |
Tegal CV00527 O-RING TOR 240 00660 HE FEED ESCP SH |
400 |
Tegal CV00528 O-RING 200 00570 HE FEED ESCP SH |
401 |
Tegal CV00553 O-RING KIT VAT VALVE PROCESS PUMPING (PKG 2) |
402 |
Tegal CW 1047-00302 Industrial Electrostatic Wafer Chuck Assembly Unit |
403 |
Tegal CW 1047-01101RW Industrial Wafer Chuck Assembly W/ 2x SMC NAQ2000 |
404 |
Tegal CW1033-00301 Industrial Wafer Elevator Assembly w/Stepping Motor |
405 |
Tegal CW1033-00302 Industrial Wafer Elevator Assembly w/Stepping Motor |
406 |
Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly |
407 |
Tegal CW1033-00303 Wafer Elevator Library Selector Transfer Handling Assembly #2 |
408 |
Tegal CW1038-00402 Industrial Spatula Drive Belt Assembly w/Stepping Motor |
409 |
Tegal CW1038-00402RW Industrial/Laboratory Spatula Drive Assembly AS-IS |
410 |
Tegal CW1048-00502 Industrial Wafer Shelf Lift Assembly Machine Indexer Module |
411 |
Tegal CW1048-00502 Industrial/Lab Pneumatic Indexer Module Assembly Unit |
412 |
Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly |
413 |
Tegal CW1048-00502 Industrial/Laboratory Indexer Pneumatic Assembly #2 |
414 |
Tegal CW1048-00502 Wafer Chamber Shelf Lift Assembly Machine Indexer Module |
415 |
Tegal CW1078-W00304RW Spatula Drive, 99-200-003 PCB Board |
416 |
Tegal CW1299-20103 VCE Left Generic Load Lock Chamber Tegal 6550 Etcher |
417 |
Tegal CW-1302 00500 Wafer Aligner Tegal 6550 Etcher |
418 |
TEGAL DEIONIZED WATER HEATER CONTROLLER CE132100201 |
419 |
Tegal elevator frame assembly |
420 |
TEGAL ENDPOINT MODULE, STRIPP, 99-390-004 CD1310-00202 |
421 |
TEGAL EPROM 400k MEMORY PCB, PN 99-095-320 |
422 |
Tegal FLIP 03601-22-040 Alphanumeric Fluorescent Display |
423 |
TEGAL Front Robot Loader interface |
424 |
TEGAL GENERATOR ENI MODEL ACG.107 |
425 |
Tegal Heater Controller Tegal 6550 Etcher |
426 |
Tegal Industrial Computer Source 7410-14H Control Unit CD1100-00302 4U Rack |
427 |
Tegal Industrial Heated Upper Electrode Chamber Assembly Unit 39-700-007 |
428 |
Tegal Industrial Lab Plasma Etcher Upper Body Chamber Ring w/Viewing Port #2 |
429 |
Tegal Industrial Lab REAC Heated Upper Electrode Chamber Assembly Plate Unit |
430 |
Tegal Industrial Lab Upper Body Chamber Ring Unit w/Viewing Side Ports PARTS |
431 |
Tegal Industrial Lab Upper Body Chamber Ring w/Viewing Side Ports 39-662-002 |
432 |
Tegal Industrial Optical Fiber Laser Head System I/O RF Driver Amplifier Module |
433 |
Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 12.5″ Diameter |
434 |
Tegal Industrial Plasma Etcher Chamber Ceramic Insulator Ring 13.5″ Diameter |
435 |
Tegal Industrial REAC Heated Upper Electrode Chamber Assembly Plate CC1230-00100 |
436 |
Tegal INS-1 Wafer Etcher System 15-Pin Connector Sensor Component Board PCB |
437 |
Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS |
438 |
Tegal Model 421 Manual PCB 99-011-001 |
439 |
Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot |
440 |
Tegal Model 421, 3″, 75 mm Aluminum Wafer Carrier, 25 Slot, 1 |
441 |
Tegal Model 901e / 903e Plasma Etcher SHUTTLE REBUILD KIT, 80-202-034, NOS |
442 |
Tegal Model 903e Plasma Etcher FRONT PANEL INTERFACE PCB, 99-125-008, NOS |
443 |
Tegal Model 903e Plasma Etcher GAS INTERFACE PCB ICG5 99-126-005 REV M |
444 |
Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH |
445 |
Tegal MyDax 2H14A Temperature Controller Instruction Manual |
446 |
Tegal P/N 31-165-006 Stepping Motor, Carrier |
447 |
TEGAL PCB ASSY (PARTS) 98-391-004 |
448 |
TEGAL PCB ASSY 31-398-002 |
449 |
TEGAL PCB ASSY 98-391-004 |
450 |
TEGAL PCB ASSY 99-406-001 |
451 |
TEGAL PCB ASSY 99-416-001 |
452 |
Tegal PEP-250-Te High Voltage Power AC Plasma Source Generator 100Kz RF Supply |
453 |
Tegal PEP-250-Te Industrial/Laboratory AC Plasma Source Assembly 3157508-000A |
454 |
TEGAL PLASMA 903 |
455 |
TEGAL PLASMA ETCHER 9XX 98-247-002, TSI. REV B |
456 |
TEGAL PLASMA ETCHER 9XX GAS INTERFACE PCB, ICG-6, 99-126-006 REV F |
457 |
TEGAL Plasma ETCHER SST TEMPERATURE PROBE, P/N 80095-057, NOS |
458 |
Tegal PlasmaLine 200 Plasma Barrel Etcher |
459 |
Tegal Plasmaline 415 Plasma Chamber w/Varian L6267-301 NW40 Vacuum Valve |
460 |
TEGAL PLASMALINE MODEL 421 WITH SPARE PARTS |
461 |
TEGAL PLASMOD w/ MARCH GCM 100 PLASMA ASHER CLEANER ETCHER |
462 |
Tegal PM3 Over Temp PM4 Level Sense Tegal 6550 Etcher * |
463 |
Tegal Quartz PIN P/N 40-297-001-E |
464 |
Tegal RF Delivery |
465 |
Tegal RF Interface PCB # 99-173-008 |
466 |
TEGAL RF SIGNAL GENENRATOR SUPPLY T-1000E |
467 |
Tegal SE 1496A A/D Plug-In PCB Circuit Board Assembly Unit |
468 |
Tegal SE 2059 AX CPU Plug-In PCB Circuit Board Assembly Unit |
469 |
Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400 |
470 |
Tegal SPI-80-095-057 Probe Temperature SST |
471 |
Tegal T-1000E Comdel T1000E/DCX Wafer RF Signal Generator DC Power Supply Module |
472 |
Tegal T-1000E Comdel T1000E/RFG 13.56MHz RF Signal High Voltage Power Supply |
473 |
Tegal T-1000E Industrial 40VDC DC Power Supply Plug-In Module Unit Assembly #2 |
474 |
Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART |
475 |
Tegal TGL 99-013-001 Rev. G SET-1 Circuit Board TGL 99-013-001 |
476 |
Tegal TGL 99-106-001 PCB ATS Auto Tune Slug / 99-106-001 Rev.K |
477 |
Tegal TGL 99-106-001 PCB ATS Auto Tune Slug Printed Circuit Board |
478 |
Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883 |
479 |
Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2) |
480 |
Tegal Type 41-137-001 Flag Chuck For Tegal Etcher |
481 |
Tegal Type 80-202-186 Timing Belt (Pack Of 4) |
482 |
Tegal Vacuum Cassette Elevator Loadlock VCE, 100/150MM, Left CW1299-10102 324878 |
483 |
Tegal Wafer Elevator Vexta Motorized Linear Transfer Selector Library Handler |
484 |
Tegal Wafer Lift Quartz Tip ANOD PIN, 49-042-002, 6 ea. |
485 |
Tegal Wafer Transfer System Motorized Linear Selector Handler +Vexta C4412 PARTS |
486 |
TEGAL XJET-11503 TCU Elbow Fitting, 416192 |
487 |
Tegal/Bay Pneumatic BES-530-8-PCB 8-Port/Channel Solenoid Valve Control Board |
488 |
Tegal/Comdel T1000E/RF Industrial/Laboratory 13.56MHz RF Power Supply Unit |
489 |
TEGAL/DDI SHUTTLE INTERFACE CIRCUIT BOARD 00094072, 98-287-002 REV. A DVO 450-B |
490 |
TEGAL1513e MOTOR CONTROLLER ITEM CE 1093 |
491 |
Thermo Couple (TC) TEGAL 80-700-xx JES-CE |
492 |
Unit/Tegal CHF3 80SCCM — UFC-1000 |
493 |
Vacuum valve, KF-40. Tegal P/N |
494 |
VAT 14046-PE44-1016 HV High Vacuum Gate Valve Tegal 6500 HRe |
495 |
Veriflo NPR400Z (TEGAL) High Pressure Regulator w/ Vacuum Torr Gauge |
496 |
Xycom MVME-490/1 Circuit Board Tegal 6550 Etcher * |
SS380EB20221116