Description
KOFLOC Mass Flow Controller 3660 SERIES MFC
Condition: New
Lead time: TBD
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
Typical Hot MFCs :
- KOFLOC Mass Flow Controller 3660 SERIES MFC Ar 50 SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC Ar 100sccm
- KOFLOC Mass Flow Controller 3660 SERIES MFC Ar, 200sccm
- KOFLOC Mass Flow Controller 3660 SERIES MFC Ar 10 SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC CF4 50SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC CHF3 50 SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC He 50SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC N2 100sccm
- KOFLOC Mass Flow Controller 3660 SERIES MFC N2 1 SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC N2 2000SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC N2 10SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 50 SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 100 SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 500SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 2000SCCM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 1SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 5SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC O2 10SLM
- KOFLOC Mass Flow Controller 3660 SERIES MFC SF6 50SCCM
Features
・Equipped with an advanced flow sensor of constant-current tem-perature difference detection type to ensure high-speed response
・Use of a normally closed valve to ensure safety
・High reliability ensured using a solenoid actuator
・Low differential pressure type control available for combustible gases (LP option)
Standard Specifications
| Model | 3660 | 3665 |
| Flow range (N2 equivalent, | 10 SCCM–20 SLM (freely | 30 SLM–100 SLM (freely |
| 20℃/1 atm) | selectable) | selectable) |
| Sensor | Thermal mass flow sensor | |
| Valve type | Proportional solenoid valve (closed when not energized) | |
| Control range | 2–100% (F.S.) | 5–100% (F.S.) |
| Response | 2 sec. or less (0–100% within | 3 sec. or less (0–100% within |
| ±2% typical) | ±2% typical) | |
| Accuracy | ±1.0% F.S. (25℃) | ±1.5% F.S. (25℃) |
| Temperature coefficient | ±0.1 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
| Repeatability | ±0.5%F.S. | |
| Operating differential | F.S. ≤ 5 SLM: 50–300 kPa (G) | F.S. ≤ 50 SLM: 150–300 kPa (G) |
| pressure | F.S. > 100 SLM: 50–300 kPa (G) | F.S. > 50 SLM: 200–300 kPa (G) |
| Option: Medium differential pressure (MP) and low differential | ||
| pressure (LP) specifications are available. | ||
| Allowable operating pressure | 500 kPa (G) or less | |
| Proof pressure | 980 kPa (G) | |
| Leak rate | 1 × 10-8 Pa・m3/s or less (excluding permeation of He) | |
| Allowable ambient temperature | 5–45°C | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in | Body: SUS316 | |
| contact with gases | Valve seat: FKM (option: CR or NBR) | |
| Sealing: FKM (option: CR or NBR) | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard | |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) | |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA | |
| Joint (Main unit bore) | Standard: 1/4SWL | Standard: 3/8SWL |
| Option: 1/8SWL 1/4VCR RC1/4, etc. | Option: 1/2SWL 3/8VCR RC3/8, etc. | |
| Weight | Approx. 1000 g | Approx. 1500 g |
SS4408
