Description
Used Equipment in stock. Location: USA. Condition: Used.We sell it at AS IS,WHERE IS.
ATV PEO 601 furnace, anneal
Info on the system from OEM website for your reference only.
Multipurpose table top fast ramping furnaces PEO series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment.
The PEO series is ideal tool for R&D purposes. The PEO-601 can be applied easily for new unique and sophisticated process development as well low volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.
Next to floor space saving advantages the PEO also has close to Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easily exchangeable liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled
Technical Data PEO-601
Depending on system configuration
- Footprint:
- 710 x 650 x 450mm (LxWxH)
- Weight:
- 47kg (minimum configuration)
- Inner Quartz tube:
- 112mm (4-1/2”)
- Maximum Product Temperature:
- 1.000°C continuously
- Flat Zone:
- Up to 40 wafers, 100mm diameter
- Power connection:
- 3Phases, 230/400V, 16A, max.7kW
Common Applications PEO-601
depending on system configuration
- Solid Source Diffusion
- Wet/Dry Oxidation
- SiAl/SiAu/SiMo alloying
- Annealing:
- Inert/Atmosphere
- Polyimide, Curing/Baking
- LTCC Sintering, Thick film paste sintering
Features PEO-601
depending on system configuration/options
- Floor space saving by small foot print
- Energy saving by close to zero at ambient standby
- Max 40 wafer/process run
- Up to 100mm wafers
- Easily exchangeable quartz In Liners
- Low temperature processing by gas preheating
- 100 steps/program
These are subject to prior sale. These are only for end user. Appreciate your time.
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
SS380EB
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- PEO-604 : MULTIPURPOSE FAST RAMPING FURNAC
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- DIAMOND SCRIBER
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