Description
Please contact us for the availability of the used semiconductor equipment.
| No | Category | Manufacturer | Model | Vintage | Wafer Size | Notes |
| 1 | Aligner | Canon | PLA-600FA | Jan-00 | 4 | Contact Aligner |
| Aligner | Canon | PLA-500 | ||||
| Karl Suss | MA150 (BSA) | 6inch | ||||
| 2 | Annealer | DNS | LA820 | Apr-03 | 8 | Anneal |
| 3 | Asher | Canon | MAS-8220 | 6 | Plasma Asher | |
| 4 | Asher | Canon | MAS-8220 | 6 | Plasma Asher | |
| 5 | Asher | Canon | MAS-8220 | 6 | Plasma Asher | |
| 6 | Bake | Axcelis(Eaton/Fusion) | 200PC | 8 | UV Cure | |
| 7 | Bake | ORC MANUFACTURING | VUM-3359 | Feb-06 | 8 | UV Exposure System |
| 8 | Bake | Ushio | UMA-2003 | Jan-06 | 12(300mm) | UV Cure |
| 9 | Bake | Ushio | UV-CURE UNIHARD | Aug-97 | 8 | UV Cure |
| 10 | Bonder | Canon Machinary | BESTEM-D01R | Jun-10 | 3 | LED |
| 11 | Bonder | Canon Machinary | BESTEM-D01R | Jun-10 | 3 | LED |
| 12 | Bonder | Canon Machinary | BESTEM-D01R | Jun-10 | 3 | LED |
| 13 | Bonder | Canon Machinary | BESTEM-D01R | Jun-10 | 3 | LED |
| 14 | Bonder | Canon Machinary | BESTEM-D01R | Jun-10 | 3 | LED |
| 15 | Bonder | Canon Machinary | BESTEM-D10SP | May-11 | 4 | LED |
| 16 | Bonder | Canon Machinary | BESTEM-D10SP | Jun-11 | 4 | LED |
| 17 | Cleaning／WET | DNS | MP-3000 | Sep-03 | 12(300mm) | Wet |
| 18 | Cleaning／WET | DNS | MP-3000 | Feb-06 | 12(300mm) | Wet |
| 19 | Cleaning／WET | DNS | MP-3000 | Jun-04 | 12(300mm) | Wet |
| 20 | Cleaning／WET | DNS | SR-2000 | Mar-03 | 8 | Spin Etcher |
| 21 | Cleaning／WET | DNS | SU-3000 | Dec-05 | 12(300mm) | Wet |
| 22 | Cleaning／WET | FSI | MERCURY | Oct-95 | 8 | Post CMP, HNO3,H2O2, HF, HN4OH |
| 23 | Cleaning／WET | Hugle Electronics | UPC-8300 | 8 | SMIF, POD Cleaner | |
| 24 | Cleaning／WET | Hugle Electronics | UPC-8300 | Oct-01 | 8 | Cassette cleaner |
| 25 | Cleaning／WET | SAMCO | PXA-100 | May-14 | 8 | Plasma Cleaner |
| 26 | Cleaning／WET | SAMCO | PXA-100 | Jun-14 | 8 | Plasma Cleaner |
| 27 | Cleaning／WET | Sawa Corporation | SC-A22 | Oct-13 | 8 | Metal Mask Cleaner |
| 28 | Cleaning／WET | Semitool | Raider | Sep-09 | 12(300mm) | |
| 29 | Cleaning／WET | TEL | PR-300Z | Nov-02 | 12(300mm) | Wet |
| 30 | Cleaning／WET | TEL | PR-300Z | Jun-05 | 12(300mm) | Wet |
| 31 | Cleaning／WET | TEL | PR-300Z | Nov-02 | 12(300mm) | Wet |
| 32 | Cleaning／WET | TOYOKO | STORM | 12(300mm) | FOUP Cleaner | |
| 33 | Coat／Deve | DNS | SC-200W-AV | Feb-00 | 8 | SMIF, SCx2/HPx5/CPx2/2PCPx2 |
| 34 | Coat／Deve | DNS | SC-80BW-AVG | Apr-02 | 8 | SMIF, SOGx1/CPx3/ HHx9/INDx4 |
| 35 | Coat／Deve | DNS | SC-80BW-AVP | 8 | 3 Coater | |
| 36 | Coat／Deve | DNS | SC-W80A-AVG | Jun-95 | 8 | SOGx1/CPx2/SPx2/HHx4 |
| 37 | Coat／Deve | DNS | SC-W80A-AVG | Jul-96 | 8 | SOGx1/HHx4/CPx2/INDx4 |
| 38 | Coat／Deve | DNS | SD-200W-AVPE | Apr-03 | 8 | SMIF, SDx2/RHPx2/HPx3/CPx1 |
| 39 | Coat／Deve | DNS | SD-200W-AVPE | Apr-02 | 8 | SMIF, SDx2/RHPx2/HPx3/CPx1 |
| 40 | Coat／Deve | DNS | SD-200W-AVPE | Apr-03 | 8 | SMIF, SDx2/RHPx2/HPx3/CPx1 |
| 41 | Coat／Deve | DNS | SD-200W-AVPE | Apr-01 | 8 | SMIF, SDx2/RHPx2/HPx3/CPx1 |
| 42 | Coat／Deve | DNS | SD-80BW-AVQ | Sep-96 | 8 | SDx2/HHx12/CPx4/INDx4 |
| 43 | Coat／Deve | DNS | SD-W200D-AVPE | Jun-06 | 8 | SMIF, SDx2/RHPx2/HPx3/CPx1 |
| 44 | Coat／Deve | DNS | SK-2000-BVPEU | Feb-01 | 8 | SMIF, SCx3/SDx3/RHPx6/HHx2 |
| 45 | Coat／Deve | DNS | SK-200W-AVPE | Apr-03 | 8 | SMIF, SCx2/SDx2/RHPx6/HHx2 |
| 46 | Coat／Deve | DNS | SK-200W-AVPE | Apr-03 | 8 | SMIF, SCx2/SDx2/PEBx6/HHx2 |
| 47 | Coat／Deve | DNS | SK-80BW-AVPE | 8 | ||
| 48 | Coat／Deve | TEL | Lithius | Mar-06 | 12(300mm) | |
| 49 | Coat／Deve | TEL | Lithius | Mar-06 | 12(300mm) | |
| 50 | Coat／Deve | TEL | Mark Vz | Missing: T&H | ||
| 51 | ＣＶＤ | AMAT | Centura SiNgen Plus | Apr-04 | 12(300mm) | LP-CVD(SiN) |
| 52 | ＣＶＤ | AMAT | Producer SE | |||
| 53 | ＣＶＤ | AMAT | Producer SE | Jan-03 | 12(300mm) | P-TEOS(USG) 2 TWIN |
| 54 | ＣＶＤ | AMAT | Producer SE | Jan-06 | 12(300mm) | SA-BPSG 3 TWIN |
| 55 | ＣＶＤ | AMAT | Producer SE | Jan-06 | 12(300mm) | UV Cure & SiN |
| 56 | ＣＶＤ | AMAT | Producer SE | Jan-03 | 12(300mm) | SA-USG 2 TWIN |
| 57 | ＣＶＤ | ASM | Eagle-12 | Dec-02 | 12(300mm) | P-TEOS |
| 58 | ＣＶＤ | ASM | Eagle-12 | Mar-04 | 12(300mm) | P-TEOS |
| 59 | ＣＶＤ | ASM | Eagle-12 | Jun-04 | 12(300mm) | P-TEOS |
| 60 | ＣＶＤ | ASM | Eagle-XP | Nov-10 | 12(300mm) | P-TEOS |
| 61 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace1) | 12(300mm) | LPCVD | |
| 62 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace1) | 12(300mm) | LPCVD | |
| 63 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace1) | 12(300mm) | LPCVD | |
| 64 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Jun-05 | 12(300mm) | Si3N4/HTO(ONO) |
| 65 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Nov-07 | 12(300mm) | Si3N4/HTO(ONO) |
| 66 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Dec-04 | 12(300mm) | Si3N4/HTO(ONO) |
| 67 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | 12(300mm) | LPCVD | |
| 68 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Jun-08 | 12(300mm) | Si3N4/HTO(ONO) |
| 69 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | 12(300mm) | LPCVD | |
| 70 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | 12(300mm) | LPCVD | |
| 71 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Dec-04 | 12(300mm) | Si3N4/HTO(ONO) |
| 72 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206V-DF(Quixace2) | Oct-07 | 12(300mm) | Si3N4/HTO(ONO) |
| 73 | ＣＶＤ | Hitachi Kokusai Electric | DJ-1206VN-DM(Quixace1-ALDINNA) | Jul-06 | 12(300mm) | SiO(ALD) |
| 74 | ＣＶＤ | Novellus | SABRE xT | Mar-05 | 8 | Sabre xT 200 + Anneal Module, EBR |
| 75 | ＣＶＤ | Novellus | SABRE xT | Jan-07 | 8 | Electro Copper Plating |
| 76 | ＣＶＤ | TEL | ALPHA-303i | 12(300mm) | LP-CVD(SiN) | |
| 77 | ＣＶＤ | TEL | ALPHA-303i | 12(300mm) | LP-CVD(SiN) | |
| 78 | ＣＶＤ | TEL | ALPHA-303i-K | Mar-05 | 12(300mm) | DCS-SiN N2,NH3,SiH2Cl2,ClF3 |
| 79 | ＣＶＤ | TEL | ALPHA-303i-K | Feb-05 | 12(300mm) | DCS-SiN N2,NH3,SiH2Cl2,ClF3 |
| 80 | ＣＶＤ | TEL | ALPHA-303i-K | Jun-05 | 12(300mm) | BSG N2,O2,ClF3,HF,TEOS,TMB |
| 81 | ＣＶＤ | TEL | ALPHA-303i-K | Mar-05 | 12(300mm) | BSG N2,O2,ClF3,HF,TEOS,TMB |
| 82 | ＣＶＤ | TEL | ALPHA-303i-K | Mar-05 | 12(300mm) | BSG N2,O2,ClF3,HF,TEOS,TMB |
| 83 | ＣＶＤ | TEL | ALPHA-303i-K | Feb-05 | 12(300mm) | DCS-SiN N2,NH3,SiH2Cl2,ClF3 |
| 84 | ＣＶＤ | TEL | ALPHA-303i-K | Apr-05 | 12(300mm) | DCS-SiN N2,NH3,SiH2Cl2,ClF3 |
| 85 | ＣＶＤ | TEL | ALPHA-303i-K | Apr-05 | 12(300mm) | BSG N2,O2,ClF3,HF,TEOS,TMB |
| 86 | ＣＶＤ | TEL | ALPHA-303i-K | Mar-05 | 12(300mm) | BSG N2,O2,ClF3,HF,TEOS,TMB |
| 87 | ＣＶＤ | TEL | ALPHA-8S | Jul-96 | 8 | SiN Pure N2, NH3, SiH2Cl2, SiH4 |
| 88 | ＣＶＤ | TEL | TELINDY PLUS | 12(300mm) | HTO Pure N2,NH3,SiH2Cl2,(N2O),ClF3 | |
| 89 | ＣＶＤ | TEL | TRIAS | Jun-06 | 12(300mm) | ALD |
| 90 | ＣＶＤ | TEL | TRIAS | Aug-04 | 12(300mm) | ALD |
| 91 | ＣＶＤ | WJ | 999 R 3.5 | no missing as-is | ||
| 92 | Dicer | Disco | DFD6340 | May-06 | Package Saw, 1.5x +1/3″ CCD Rectangle | |
| 93 | Dicer | Disco | DFD6340 | May-08 | Wafer Saw, 6 or 8″ Round C & T | |
| 94 | Dicer | Disco | DFD6340 | Jul-07 | Package Saw, 7.5x +1/3″ CCD Rectangle | |
| 95 | Etcher | AMAT | Centura-DPS | Jan-07 | 12(300mm) | Etch |
| 96 | Etcher | TEL | TE8400 | Aug-10 | 8 | SiO Etch |
| 97 | Etcher | TEL | UN85 SCCM_Depo | Apr-04 | 8 | |
| 98 | Etcher | TEL | UNITY IIe 855SS | Jan-00 | 8 | SCCM,STP-A1303W1 |
| 99 | Etcher | TOK | TCE-3822 | Jan-95 | 6 | Plasma Etch |
| 100 | Etcher | Lam | TCP 9600 classic | |||
| 101 | Facility | Edwards | TPU | Jan-00 | Scrubber | |
| 102 | Facility | Edwards | TPU | Jan-02 | Scrubber | |
| 103 | Facility | Edwards | TPU-STD | Apr-04 | ||
| 104 | Facility | Edwards | TPU-STD | Jun-04 | ||
| 105 | Facility | Edwards | TPU-STD | Feb-06 | ||
| 106 | Facility | Edwards | TPU-STD | May-06 | ||
| 107 | Facility | Edwards | TPU-STD | Mar-04 | ||
| 108 | Facility | Edwards | ZENITH | Jul-04 | ||
| 109 | Facility | Kanken Techno | KT1000MFS | |||
| 110 | Facility | Takatori | ATM-1100 | Feb-92 | 6 | Taper |
| 111 | Facility | Takatori | FTL200 | Aug-15 | 8 | Taper |
| 112 | Facility | Takatori | SAR-300 | Nov-13 | 8 | Tape Remover |
| 113 | Furnace | Hitachi Kokusai Electric | DD-833V | Jun-96 | 8 | H2 Anneal/SOG-Cure,N2,H2 |
| 114 | Furnace | Hitachi Kokusai Electric | QUIXACE | Mar-04 | 12(300mm) | Diffusion |
| 115 | Furnace | TEL | ALPHA-85-Z | 8 | ||
| 116 | Furnace | TEL | ALPHA-8SE-Z | |||
| 117 | Furnace | TEL | FORMULA | Nov-02 | 12(300mm) | Diffusion(NH3 Anneal) |
| 118 | Furnace | TEL | IW-6D | Apr-97 | 5 | Diffusion(Polyimide Cure) |
| 119 | Implanter | Varian | E220 | May-10 | 8 | Implant |
| 120 | Implanter | Varian | VIISion80 | Oct-95 | 8 | Implant |
| 121 | Inspection | Agilent Technologies(HP) | 4156A | Mar-94 | 8 | |
| 122 | Inspection | Agilent Technologies(HP) | FTS-175C | Apr-07 | 8 | |
| 123 | Inspection | Asia Electronics | PRS-800A | |||
| 124 | Inspection | FRONTIER | FSM128LC2C | 12(300mm) | ||
| 125 | Inspection | GIGA TECH | TSA2000 | 8 | Wafer Thickness Measurement | |
| 126 | Inspection | Hitachi High-Technologies | IS-1600 | Aug-10 | 8 | |
| 127 | Inspection | Hitachi High-Technologies | LS6600 | Jul-06 | 12(300mm) | Wafer Monitoring System |
| 128 | Inspection | Hitachi High-Technologies | S-5200 | Jan-03 | SEM | |
| 129 | Inspection | Hitachi High-Technologies | SEM | Apr-02 | 8 | |
| 130 | Inspection | Hitachi Kokusai Electric | VR-120S | Nov-02 | 12(300mm) | |
| 131 | Inspection | KLA-Tencor | Archer10XT | 12(300mm) | ||
| 132 | Inspection | KOBELCO | ID SORTER | Apr-07 | 8 | DP4200SI WAFER SORTER |
| 133 | Inspection | Mikasa | MT60M | May-06 | 8 | |
| 134 | Inspection | Nanometrics | 6100X | 8 | Film Thickness Measurement | |
| 135 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 136 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 137 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 138 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 139 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 140 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 141 | Inspection | NIDEK | IM-15 | Apr-07 | 8 | |
| 142 | Inspection | Nikon | OPTIPHOT-200 | Sep-96 | 8 | Metal Microscope |
| 143 | Inspection | Nikon | OPTIPHOT-200 | Nov-99 | 8 | Wafer Inspection |
| 144 | Inspection | Olympus | AL2000＆Microscope | 8 | ||
| 145 | Inspection | Olympus | AL3110F | Nov-02 | 12(300mm) | |
| 146 | Inspection | Olympus | AL3110F | Nov-02 | 12(300mm) | |
| 147 | Inspection | Olympus | AL3110FDUV | Nov-02 | 12(300mm) | |
| 148 | Inspection | Olympus | AL3120F | Jan-06 | 12(300mm) | |
| 149 | Inspection | Olympus | AL3120F | Nov-05 | 12(300mm) | |
| 150 | Inspection | Olympus | AL3120F | Oct-04 | 12(300mm) | |
| 151 | Inspection | Olympus | AL3120F | Feb-06 | 12(300mm) | |
| 152 | Inspection | Olympus | WLS8000 | Jun-09 | 12(300mm) | |
| 153 | Inspection | Rorze | RORZ | Apr-07 | 8 | RR8131 WAFER-ID-READE |
| 154 | Inspection | Rudolph Technologies | CV-9812 | 12(300mm) | CX023 | |
| 155 | Inspection | Rudolph Technologies | MetaPULSE | 8 | SMIF(LPO2200) | |
| 156 | Inspection | TOKYO AIRCRAFT MEASUREMENT | EDIS3000 | 12(300mm) | Macro Inspection | |
| 157 | Inspection | TOKYO AIRCRAFT MEASUREMENT | MAC-92 | 5 | ||
| 158 | Inspection | Topcon | DS-720 SEM | Apr-07 | 8 | |
| 159 | Inspection | Topcon | VI-3200 | May-09 | 12(300mm) | Chip Visual Inspection |
| 160 | Inspection | Toray Engineering | INSPECTRA 1000EX-II300 | Sep-05 | 12(300mm) | Surface Monitoring System |
| 161 | Inspection | Veeco | Dektak-3ST | Feb-99 | 8 | Surface Profiler |
| 162 | Metrology | KLA-Tencor | 6220 | Refurbished | ||
| 163 | Metrology | KLA-Tencor | SP1 classic | initial pass | ||
| 164 | KLA-Tencor | 2139 | ||||
| 165 | Other | – | ELS-5405 | |||
| 166 | Other | Ebara | AA200 | |||
| 167 | Other | Ebara | AA200 | |||
| 168 | Other | Ebara | AA70 | |||
| 169 | Other | Ebara | AA70 | |||
| 170 | Other | Semitool | STORM-3 | Apr-07 | 8 | |
| 171 | Other | Toray Engineering | VE-500RBC | Mar-11 | 8 | Vacuum Printing and Encapsulation System |
| 172 | Other | Trans Technology | Asymtek S-920 | Jul-12 | Dispenser/ Conformal Die Coater | |
| 173 | Other | Trans Technology | Asymtek S-920 | Jul-12 | Dispenser/ Conformal Die Coater | |
| 174 | Other | Novellus | ESC chuck 13sets | as-is good | ||
| 175 | Prober | TEL | 78S | Sep-96 | 8 | Prober |
| 176 | ＰＶＤ | AMAT | ELECTRA ECP | May-99 | 8 | Cu ECP, 2Cell |
| 177 | ＰＶＤ | AMAT | Endura II | Jan-07 | 12(300mm) | PVD |
| 178 | ＰＶＤ | ULVAC | CERAUS Z-1000 | Mar-98 | 8 | PVD |
| 179 | ＰＶＤ | ULVAC | CERAUS Z-1000 | Dec-01 | 8 | PVD |
| 180 | Stepper | Nikon | NSR-2205EX14C | Jan-98 | 8 | KrF Stepper |
| 181 | Stepper | Nikon | NSR-4425i | Jun-96 | 8 | Reticle:6inch, Loader:Type2 |
| 182 | Stepper | Nikon | i12D | Working condition | ||
| 183 | Stepper | Ultratech | UNITY AP300 | May-09 | 12(300mm) | i-Line stepper |
| 184 | Stepper | Ultratech | Spectrum 3 | no missing as-is | ||
| 185 | Tester | Agilent Technologies(HP) | 4062F | Nov-96 | 8 | Tester |
| 186 | Tester | Nikon Instech | N-SISVR | Field size 65X65mm | ||
| 187 | Tester | Advantest | T5371 | |||
| 188 | Tester | Multitest | 9918 / 9928 | Dual temp | ||
| 189 | Prober | EG | 4090U | |||
| 190 | Prober | TSK | UF200 | |||
| 191 | Dicer | Disco | DFD651 |
