used semiconductor equipment

Description

Please contact us for the availability of the used semiconductor equipment Parts-Front-End.

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The items are subject to prior sale without notice. These items are only for end users. Appreciate your time.

Item	Maker	Category	Model	Process	Vintage	Wafer Size
1	ADE	Metrology	WaferSight	Wafer Flatness Measurement	2006	12
2	AG Associates	RTP	HeatPulse 4100	RTP	1989	6
3	AG Associates	RTP	HeatPulse 8800	RTP	2000	8
4	Alcatel	Etch	Alcatel Gir	Dry Etch	–	5
5	AMAT	CVD	Centura TAO	Ta2O5 CVD	2006	8
6	AMAT	CVD	NLighten	Epi MOCVD	2012	4
7	AMAT	CVD	P5000	2CH/ WCVD	–	6
8	AMAT	CVD	P5000	CVD	1993	8
9	AMAT	CVD	P5000	LTO CVD, TEOS	1996	8
10	AMAT	CVD	P5000	LTO CVD, TEOS	1996	8
11	AMAT	CVD	P5000	LTO CVD, TEOS	1995	8
12	AMAT	CVD	P5000	LTO CVD, TEOS	1996	8
13	AMAT	CVD	P5000	LTO CVD, TEOS	1996	8
14	AMAT	CVD	P5000	Oxide	1996	8
15	AMAT	CVD	P5000	PECVD	–	4
16	AMAT	CVD	P5000	PECVD	–	4
17	AMAT	CVD	P5000	PECVD	–	4
18	AMAT	CVD	P5000	PECVD	–	5
19	AMAT	CVD	P5000	TEOS	1988	6
20	AMAT	CVD	P5000	TEOS	1990	6
21	AMAT	CVD	P5000	TEOS	1991	6
22	AMAT	CVD	Producer	SA BPSG	2004	8
23	AMAT	CVD	Producer SE	HARP-USG	2003	12
24	AMAT	CVD	Producer SE	HT ACL	2007	12
25	AMAT	CVD	Producer SE	ULK	2006	12
26	AMAT	Etch	Centura DPS	Metal	1998	8
27	AMAT	Etch	Centura DPS	Metal	1997	8
28	AMAT	Etch	Centura DPS G5	Poly	2006	12
29	AMAT	Etch	Centura DPS G5	Poly	2007	12
30	AMAT	Etch	Centura DPS G5 MESA	Poly	2007	12
31	AMAT	Etch	Centura DPS2	Metal	2005	12
32	AMAT	Etch	Centura DPS2	Metal	2005	12
33	AMAT	Etch	Centura DPS2	Metal	2005	12
34	AMAT	Etch	Centura DPS2	Metal	2005	12
35	AMAT	Etch	Centura DPS2	Metal	2005	12
36	AMAT	Etch	Centura DPS2	Poly	–	12
37	AMAT	Etch	Centura DPS2	Poly	2005	12
38	AMAT	Etch	Centura DPS2	Poly	2005	12
39	AMAT	Etch	Centura DPS532	Metal	2006	12
40	AMAT	Etch	Centura eMax CT	Oxide	2004	12
41	AMAT	Etch	Centura eMax CT+	Oxide	2006	12
42	AMAT	Etch	Centura Enabler	Oxide	2010	12
43	AMAT	Etch	Centura Enabler	Oxide	2007	12
44	AMAT	Etch	Centura Enabler	Oxide	2008	12
45	AMAT	Etch	Centura Enabler	Oxide	2010	12
46	AMAT	Etch	Centura Enabler	Oxide	2006	12
47	AMAT	Etch	Centura MXP	Metal	1998	6
48	AMAT	Etch	Centura MXP	Poly	1996	6
49	AMAT	Etch	P5000	Metal	1998	6
50	AMAT	Etch	P5000	Metal	1997	6
51	AMAT	Etch	P5000	Metal	1992	6
52	AMAT	Etch	P5000	Poly	1995	5
53	AMAT	Etch	P5000	Poly	1996	6
54	AMAT	Etch	P5000	Poly	1995	8
55	AMAT	Etch	P5000	W	1995	6
56	AMAT	Metrology	COMPASS 300	Patterned Wafer Inspection	2000	8
57	AMAT	Metrology	ComPlus MP	Wafer Inspection	2004	8
58	AMAT	Metrology	Orbot WF720	Metrology	–	5
59	AMAT	Metrology	SEMVision CX	Defect Review SEM	2003	8
60	AMAT	Metrology	SEMVision G2	Defect Review SEM	2003	12
61	AMAT	Metrology	SEMVision G3	Defect Review SEM	2006	12
62	AMAT	Metrology	WF720	Metrology	1997	6
63	AMAT	Metrology	WF730	Metrology	1996	6
64	AMAT	PVD	Endura CL	PVD	2000	12
65	AMAT	RTP	AMC7800RPX	EPI	1982	6
66	AMAT	RTP	AMC7811	EPI	1990	6
67	AMAT	RTP	AMC7821	EPI	2001	6
68	AMAT	RTP	AMC7821	EPI	1983	6
69	ASM	CVD	Dragon 2300	PECVD Equipment for Barrier	2003	12
70	ASM	CVD	Eagle10	DARC	–	8
71	ASM	CVD	Eagle10	PETEOS	–	8
72	ASM	CVD	Eagle12	Curing	2010	12
73	ASM	CVD	PXJ-200	PECVD	1989	6
74	ASML	Stepper	PAS 2500/30	Lithography	–	5
75	ASML	Stepper	PAS 2500/40	Lithography	–	5
76	ASML	Stepper	PAS 2500/40	Lithography	–	5
77	ASML	Stepper	PAS 5500/100D	i-Line	1995	6
78	ASML	Stepper	PAS 5500/300	Stepper	2000	8
79	Aviza/SVG	Furnace	10K	Diffusion	–	5
80	Aviza/SVG	Furnace	10K	Diffusion	–	5
81	Axcelis	Asher	Microlite	Lithography	–	5
82	Axcelis	Track	RapidCure 320FC	UV anneal Unit	2007	12
83	Blue M	Others	DCC 606 EMP550	–	2005	12
84	Brooks	Metrology	Bright light 200	UV Inspection	2002	8
85	Brooks	Metrology	PRI7500	Pod Stocker	1997	8
86	Canon	Asher	MAS-801HR	PR Stripper	–	6
87	Canon	Asher	MAS-801HR	PR Stripper	–	6
88	Canon	CVD	APT-4800	BPSG	2000	8
89	Canon	Stepper	FPA-3000iW	i-Line Stepper	–	8
90	Canon	Stepper	FPA-5500iZ	i-Line Stepper	2002	12
91	CI Science	Etch	TORUS200	Bevel Etching	2007	8
92	CI Science	Track	Charm2000	Final Cure	2001	8
93	Cymer	Scanner	ELS-5400	KrF Laser	1997	–
94	Cymer	Scanner	ELS-5410	KrF Laser	1998	–
95	DNS	RTP	LA-820	Anneal	2000	8
96	DNS	RTP	LA-820	Lamp Anneal	1996	8
97	DNS	RTP	LA-W820-A	Lamp Anneal	1996	8
98	DNS	Track	RF-300A	Track	–	8
99	DNS	Track	SS-3000-A	4 Front Scrubber	2007	12
100	DNS	Track	SS-3000-A	4 Front Scrubber	2007	12
101	DNS	Track	SS-3000-A	4 Front Scrubber	2006	12
102	DNS	Track	SS-3000-A	4 Front Scrubber	2007	12
103	DNS	Track	SS-3000-A	4 Front Scrubber	2007	12
104	DNS	Track	SS-3000-A	4 Front Scrubber	2006	12
105	DNS	Track	SS-3000-AR	Double Side Scrubber	2007	12
106	DNS	Track	SS-3000-AR	Double Side Scrubber	2006	12
107	DNS	Track	SS-3000-AR	Double Side Scrubber	2006	12
108	DNS	Track	SS-W80A-A	Scrubber	–	8
109	DNS	Track	SS-W80A-A	Scrubber	–	8
110	DNS	Track	SS-W80A-A	Scrubber	–	8
111	DNS	Track	SS-W80A-A	Scrubber	–	8
112	DNS	Track	SS-W80A-A	Scrubber	–	8
113	DNS	Track	SS-W80A-A	Scrubber	–	8
114	DNS	Track	SS-W80A-A	Scrubber	–	8
115	DNS	WET	FC-3000	Wet Station	2003	12
116	DNS	WET	MP-3000	Wet Cleaning Equipment	2003	12
117	Dong-A	Metrology	LCM Inspector	Pattern Generator (Cameleon)	2008	8
118	EBARA	CMP	EPO-222	WCMP	1996	8
119	EBARA	CMP	EPO-222	WCMP	1997	8
120	EBARA	CMP	EPO-222	WCMP	1997	8
121	EBARA	CMP	EPO-222	WCMP	1997	8
122	EBARA	CMP	EPO-222	WCMP	1996	8
123	EBARA	CMP	EPO-2228	CMP	1998	8
124	EBARA	CMP	EPO-222A	W	1999	8
125	EBARA	CMP	EPO-222A	W	2000	8
126	EBARA	CMP	EPO-222A	W	2000	8
127	EBARA	CMP	EPO-222A	W	1999	8
128	EBARA	CMP	EPO-222A	W	2000	8
129	EBARA	CMP	EPO-222A	W	1999	8
130	EBARA	CMP	EPO-223	W	1997	8
131	EBARA	CMP	EPO-223	W	1997	8
132	EBARA	CMP	EPO-223	W	1997	8
133	EBARA	CMP	F-REX300S	W	2006	12
134	EBARA	CMP	F-REX300S	W	2004	12
135	EBARA	CMP	F-REX300S	W	2003	12
136	Fusion	Track	M150	Dry Etch	–	5
137	Fusion	Track	M150PC	Lithography	–	6
138	Fusion	Track	M150PC	Lithography	–	6
139	Fusion	Track	M150PC	UV cure	–	6
140	Fusion	Track	M150PC	UV cure	–	5
141	Fusion	Track	M150PCJ	UV cure	–	5
142	Hirayama	Metrology	PC-304R7	PCT System	1998	8
143	Hitachi	Etch	DM421P	Etch	1995	8
144	Hitachi	Others	UTS2020	Lithography	–	6
145	Hitachi	Metrology	I6300	Defect Inspection	–	12
146	Hitachi	Metrology	I6300	Defect Inspection	–	12
147	Hitachi	Metrology	IS2700	Dark Field inspection	2005	12
148	Hitachi	Metrology	RS3000	Review SEM	2003	8, 12
149	Hitachi	Metrology	RS3000T	Review SEM	2007	12
150	Hitachi	Metrology	RS4000	Review SEM	2006	12
151	Hitachi	Metrology	S-4700	FE SEM	2002	12
152	Hitachi	Metrology	S-5200	FE SEM	2001	–
153	Hitachi	Metrology	S-9300T	CD SEM	2002	12
154	Hitachi	Metrology	S-9360	CD SEM	2003	12
155	Hitachi	Metrology	S-9380	CD SEM	2004	12
156	Hitachi	Metrology	S-9380II	CD SEM	2007	12
157	Hitachi Kokusai	Asher	RAM-8500II	Asher	1994	8
158	Hitachi Kokusai	Asher	RAM-8500II	Asher	1994	8
159	Hitachi Kokusai	Asher	RAM-8500II	Asher	1994	8
160	Hitachi Kokusai	Asher	RAM-8500ZX	Asher	1996	8
161	Hitachi Kokusai	Metrology	VR-120SD	Resistivity Measurement	–	12
162	Horiba	Metrology	PR-PD2	Reticle/Mask Particle Detection System	2006	6
163	Horiba	Metrology	PR-PD2	Reticle/Mask Particle Detection System	2005	6
164	Hugle	WET	CRD-1000	Auto Cassette Cleaner	–	6
165	Hypervision	Metrology	CHIP UNZIP	Chip Unzip Process	1996	8
166	JEOL	Metrology	JSM-7401F	FE SEM	2006	12
167	Karl SUSS	Stepper	MA150	Aligner	1994	6
168	Karl SUSS	Stepper	MA150	Aligner	1995	6
169	Karl SUSS	Stepper	MA200	Aligner	1989	8
170	Karl SUSS	Stepper	MA200	Aligner	1992	8
171	KLA-Tencor	Metrology	AIT Fusion	Dark Field inspection	2003	12
172	KLA-Tencor	Metrology	AIT Fusion XUV	Dark Field inspection	2004	12
173	KLA-Tencor	Metrology	AIT UV	Dark Field inspection	2002	8
174	KLA-Tencor	Metrology	AIT UV	Dark Field inspection	2003	8
175	KLA-Tencor	Metrology	Aleris HX8500	Thickness Measurement	2008	12
176	KLA-Tencor	Metrology	Archer 10 AIM+	Overlay	2002	12
177	KLA-Tencor	Metrology	Archer AIM MPX	Overlay	2005	12
178	KLA-Tencor	Metrology	Archer AIM+	Overlay	2006	12
179	KLA-Tencor	Metrology	AWIS-3110	Particle counter	2003	8
180	KLA-Tencor	Metrology	AWIS-3110	Particle counter	2001	8
181	KLA-Tencor	Metrology	AWIS-3110	Wafer Inspection System	–	8
182	KLA-Tencor	Metrology	EDR5210	Defect Review SEM	–	12
183	KLA-Tencor	Metrology	EDR5210	Defect Review SEM	2010	12
184	KLA-Tencor	Metrology	Ergolux	Metrology	–	6
185	KLA-Tencor	Metrology	INM100+INS10	Metrology	–	6
186	KLA-Tencor	Metrology	INS3300G1	Macro inspection	2001	12
187	KLA-Tencor	Metrology	KLA2552	Data Review Station	1996	8
188	KLA-Tencor	Metrology	KLA2800	Bright Field Inspection	2007	12
189	KLA-Tencor	Metrology	KLA5100	Metrology	–	8
190	KLA-Tencor	Metrology	KLA5200XP	Overlay	1998	6, 8
191	KLA-Tencor	Metrology	LDS3300M	Macro inspection	–	8
192	KLA-Tencor	Metrology	MPV CD2 AMC	Metrology	–	5
193	KLA-Tencor	Metrology	MPV CD2 AMC	Metrology	–	5
194	KLA-Tencor	Metrology	MPV-CD	Metrology	–	5
195	KLA-Tencor	Metrology	NANOMAPPER	Wafer Inspection	2006	12
196	KLA-Tencor	Metrology	OP-5240	Thickness measurement	2000	8
197	KLA-Tencor	Metrology	P11	Profiler	–	6
198	KLA-Tencor	Metrology	Puma 9000S	Dark Field inspection	2005	12
199	KLA-Tencor	Metrology	Puma 9130	Dark Field inspection	2005	12
200	KLA-Tencor	Metrology	SFS7700	Particle Counter	–	5
201	KLA-Tencor	Metrology	SP2-XP	Particle Counter	2014	12
202	KLA-Tencor	Metrology	Surfscan 2.1	Particle Counter	–	5
203	Komatsu	Scanner	G20K2-1	KrF Laser	1999	–
204	Komatsu	Scanner	G20K2-1	KrF Laser	1999	–
205	Komatsu	Scanner	G20K4-1	KrF Laser	2002	–
206	Komatsu	Scanner	G20K4-1	KrF Laser	2001	–
207	Komatsu	Scanner	G20K4-1	KrF Laser	2002	–
208	Lam	Etch	2300 Versys	Poly	2003	12
209	Lam	Etch	9600	Etch	1996	8
210	Lam	Etch	9600SE	Al	–	8
211	Lam	Etch	9600SE	Al	–	8
212	Lam	Etch	9600SE	Al	–	8
213	Lam	Etch	R4420	Poly	2004	8
214	Lam	Etch	R4520	Oxide	1998	8
215	Lam	Etch	R4520	Oxide	1998	8
216	Lam	Etch	R4720	Oxide	–	8
217	LTK	Asher	200 Photomask	PR Stripper	–	8
218	Mattson	Asher	Aspen 3	Light etch, 3LP + 2 chamber	2006	12
219	Mattson	Etch	Paradigme SP	Light Etch	2010	12
220	Mattson	Etch	Paradigme SP	Light Etch	2010	12
221	Mattson	RTP	AST3000	RTP	2004	12
222	Mattson	RTP	AST3000	RTP	1998	8
223	Mattson	RTP	AST3000	RTP	2003	12
224	Mattson	RTP	AST3000	RTP	2002	8
225	Mattson	RTP	AST3000	RTP	2004	12
226	Mattson	RTP	AST3000 plus	RTP	2003	12
227	Mattson	RTP	Helios	RTP	2005	12
228	Mattson	RTP	Helios	RTP	2007	12
229	Mattson	RTP	Helios	RTP	2004	12
230	Met One	Metrology	DE712AF-5	Surface Particle Counter	–	8
231	MKS	CVD	GHW50A-13DF3H0-10	HDP for STI	2015	–
232	Montair	Etch	Prefurnace clean	General	–	5
233	Montair	Etch	Wafer etch	General	–	5
234	MSP	Metrology	2110	Particle Sampler	–	8
235	Nanometrics	Metrology	Caliper Mosaic	Overlay	2005	12
236	Nanometrics	Metrology	Caliper Mosaic	Overlay	2002	12
237	Nanometrics	Metrology	Caliper Mosaic	Overlay	2009	12
238	Nanometrics	Metrology	CDS-200	Optical CD SEM	2003	8
239	Nanometrics	Metrology	METRA 2200M	Overlay	1996	8
240	Nanometrics	Metrology	METRA-7200	Overlay	–	8
241	Nanometrics	Metrology	NanoSpec 210	Metrology	–	5
242	Nanometrics	Metrology	NanoSpec AFT400	Film Thickness Measurement	1997	8
243	Nanometrics	Metrology	SIPHER	EPI Slip and Defect	2002	8
244	Nikon	Metrology	OPTIPHOT 66	Microscope	–	6
245	Nikon	Metrology	SMZ-U	Sterescopic Zoom Microscope	1996	8
246	Nikon	Metrology	SMZ-U	Sterescopic Zoom Microscope	1996	8
247	Nikon	Scanner	NSR-S204B	KrF Scanner	2001	8
248	Nikon	Scanner	NSR-S204B	KrF Scanner	2001	8
249	Nikon	Scanner	NSR-S204B	KrF Scanner	2001	8
250	Nikon	Scanner	NSR-S205C	KrF Scanner	–	8
251	Nikon	Scanner	NSR-S205C	KrF Scanner	–	8
252	Nikon	Scanner	NSR-S205C	KrF Scanner	–	8
253	Nikon	Scanner	NSR-S205C	KrF Scanner	–	8
254	Nikon	Scanner	NSR-S205C	KrF Scanner	–	8
255	Nikon	Scanner	NSR-S306C	ArF Scanner	2002	8
256	Nikon	Stepper	NES1-H04	Mini stepper	2011	4
257	Nikon	Stepper	NSR-2205EX12B	KrF Stepper	–	8
258	Nikon	Stepper	NSR-2205EX12B	KrF Stepper	–	8
259	Nikon	Stepper	NSR-2205EX12B	KrF Stepper	–	8
260	Nikon	Stepper	NSR-2205EX14C	KrF Stepper	1997	8
261	Nikon	Stepper	NSR-2205EX14C	KrF Stepper	1999	8
262	Nikon	Stepper	NSR-2205EX14C	KrF Stepper	2001	6
263	Nikon	Stepper	NSR-2205i11D	i line stepper	1995	4
264	Novellus	Asher	Gamma Express	Asher	2005	12
265	Novellus	CVD	C2 Altus	WCVD	1994	8
266	Novellus	CVD	C2 Altus Shrink	WCVD(PNL)	1996	8
267	Novellus	CVD	C2 Speed Shrink	HDP	2000	8
268	Novellus	CVD	C2 Speed Shrink	HDP	1999	8
269	Novellus	CVD	C2 Speed Shrink	HDP	2001	8
270	Novellus	CVD	C3 Speed MAX	HDP	2006	12
271	Novellus	CVD	C3 Speed NEXT	HDP	2004	12
272	Novellus	CVD	C3 Speed XT	ILD, IMD	2008	12
273	Novellus	CVD	Concept One	CVD	–	8
274	Novellus	CVD	Concept One	CVD	–	8
275	Novellus	CVD	Concept One	CVD	–	5
276	Novellus	CVD	Concept One	CVD	–	5
277	Novellus	CVD	Concept One	CVD	–	5
278	Novellus	CVD	Vector	CVD	–	12
279	Novellus	CVD	Vector	CVD	–	12
280	Novellus	CVD	Vector	CVD	–	12
281	Novellus	CVD	Vector	CVD	–	12
282	Novellus	CVD	Vector	CVD	–	12
283	Novellus	CVD	Vector	CVD	2004	12
284	Novellus	CVD	Vector Extreme	CVD	2010	12
285	Novellus	WET	Sabre XT	Electro Copper Plating	2000	8
286	Novellus	WET	Sabre XT	Electro Copper Plating	2001	8
287	Novellus	WET	Sabre XT	Electro Copper Plating	1999	8
288	Novellus	WET	Sabre XT	Electro Copper Plating	2001	8
289	Novellus	WET	Sabre XT	Electro Copper Plating	1999	8
290	OAI	Metrology	358	Stepper Exposure Analyzer	–	6
291	OAI	Metrology	358	Stepper Exposure Analyzer	–	6
292	OAI	Metrology	358	Stepper Exposure Analyzer	–	6
293	Olympus	Metrology	BHMJL	Microscope	–	6
294	Olympus	Metrology	BHMJL	Microscope	–	6
295	Oshitari	Others	SCOV-8594	Hard Bake Oven	1996	8
296	PSK	Asher	DES-212-304AVL	PR Stripper	–	4, 5
297	PSK	Asher	Tera 21	PR Ashing	2008	12
298	Rigaku	Metrology	TXRF3750	X-Ray Fluorescence	2007	8
299	Rudolph/August	Metrology	3Di8500	Wafer Inspection	2008	12
300	Rudolph/August	Metrology	Axi-S	Macro inspection	2005	12
301	Rudolph/August	Metrology	Axi-S	Macro Wafer Inspection	2005	8
302	Rudolph/August	Metrology	FE-IV	Inspection	1995	8
303	Rudolph/August	Metrology	FE-VII	Ellipsometer	–	8
304	Rudolph/August	Metrology	FE-VII	Focus Ellipsometer	1993	8
305	Rudolph/August	Metrology	FE-VII-D	Focus Ellipsometer	–	8
306	Rudolph/August	Metrology	FE-VII-D	Focus Ellipsometer	1997	8
307	Rudolph/August	Metrology	MetaPULSE 300	Thickness Measurement	2004	12
308	Rudolph/August	Metrology	NSX105	Macro Inspection	2004	8
309	Rudolph/August	Metrology	NSX105	Macro Inspection	2003	8
310	Semitel	WET	Parts Cleaner	Parts Cleaner	2004	8
311	Semitel	WET	Parts Cleaner	Parts Cleaner	2002	8
312	Semitel	WET	Parts Cleaner	Parts Cleaner	2003	8
313	Semitel	WET	Parts Cleaner	Parts Cleaner	2003	8
314	Semitool	WET	Raider ECD	Electroplating	2004	8
315	Semitool	WET	Raider ECD	Electroplating	2009	12
316	Semitool	WET	SST-F-421-280-F	Spin Dryer	1996	6
317	Semitool	WET	SST-F-421-280-F	Spin Dryer	1999	5
318	Semitool	WET	SST-F-421-280-FK	Spin Dryer	1998	6
319	Semitool	WET	SST-F-421-280-K	Spin Dryer	2000	6
320	Semitool	WET	SST-F-421-280-K	Spin Dryer	1996	5
321	Semix	Track	Semix SOG coater	Lithography	–	6
322	Semix	Track	TZP	Lithography	–	6
323	SEN	Implant	NV-GSD-HE	High Energy	1998	8
324	Seojin	Metrology	SSM5200	Capacitancy-Voltage Tester	1997	–
325	Shibaura	PVD	SWN5000	Metal	–	8
326	Signatone	Metrology	S-1060R-6SND3L	Thermal Probing System	–	8
327	Silvaco	Metrology	S3245A	Noise Amplifier	2006	8
328	SOSUL	Etch	EXTRIMA6000	Bevel Etcher	2007	12
329	SOSUL	Etch	EXTRIMA6000	Bevel Etcher	2010	12
330	SOSUL	Etch	EXTRIMA6000	Bevel Etcher	2007	12
331	Soul Brain	WET	Electrolysis water Unit	CLN	2014	12
332	Star	Others	2000 Primer	ATV	–	5
333	Star	Others	2000 Primer	General	–	5
334	STL	Track	SPARROW	CFA	2001	8
335	STL	Track	SPARROW	Quench	2000	8
336	Sumitomo	WET	KC-200A	Cassette Cleaner	1995	8
337	Sungjin Semitech	WET	F1BC02	Ultrasonic Cleaner	2000	12
338	Sungjin Semitech	WET	Ultra Sonic	Wet Clean Station	2001	12
339	Surftens	Metrology	Measurement	Metrology	–	6
340	SVG	Furnace	5204	Diffusion	–	5
341	SVG	Furnace	5204	Diffusion	–	5
342	Taeyangtech	WET	TYT-PC	Wet Clean Station	2001	12
343	TEL	CVD	Trias	CVD Ti	–	12
344	TEL	CVD	Trias	CVD Ti	–	12
345	TEL	CVD	Trias	CVD Ti	2016	12
346	TEL	CVD	Trias	CVD Ti	2016	12
347	TEL	CVD	Trias	CVD Ti	2016	12
348	TEL	CVD	Trias	CVD TiN	2004	12
349	TEL	CVD	Trias	Metal	2012	12
350	TEL	Etch	Unity SCCM Shin	Etch	2007	12
351	TEL	Etch	Unity SCCM Shin	Etch	2004	12
352	TEL	Etch	Unity SCCM Shin	Etch	2007	12
353	TEL	Etch	Unity SCCM Shin	Etch	2007	12
354	TEL	Etch	Unity SCCM Shin	Oxide Etch	2003	12
355	TEL	Furnace	Alpha-303i-H	D-Poly	2001	12
356	TEL	Furnace	Alpha-303i-H	D-Poly	2002	12
357	TEL	Furnace	Alpha-303i-H	LP-N2 Anneal	2002	12
358	TEL	Furnace	Alpha-303i-H	MTO	2002	12
359	TEL	Furnace	Alpha-303i-H	MTO	2002	12
360	TEL	Furnace	Alpha-303i-H	MTO	2001	12
361	TEL	Furnace	Alpha-303i-K	MTO	2004	12
362	TEL	Furnace	Alpha-303i-K	MTO	2004	12
363	TEL	Furnace	Alpha-303i-K	MTO	2004	12
364	TEL	Furnace	Alpha-8S-C	PAD/LINER/ISO	1995	8
365	TEL	Furnace	Alpha-8S-C	Poly	1995	8
366	TEL	Furnace	Alpha-8S-Z	Dry Oxide, part machine	1996	8
367	TEL	Furnace	Alpha-8S-Z	Pyro, part machine	1996	8
368	TEL	Furnace	Formula	DCS-Sin	2010	12
369	TEL	Furnace	Formula	Nit	2003	12
370	TEL	Furnace	Formula	Nit	2003	12
371	TEL	Furnace	Formula	SiGe-POLY	2003	12
372	TEL	PVD	MarkIV	PVD	2011	8
373	TEL	Track	ACT8	COT/DEV	1999	6
374	TEL	Track	LITHIUS	5C5D	2006	12
375	TEL	Track	LITHIUS i+	COT/DEV	2006	8
376	TEL	Track	Mark7	BAKE	1996	8
377	TEL	Track	Mark7	COT	1996	8
378	TEL	Track	Mark7	COT	1996	8
379	TEL	Track	Mark7	COT/DEV	1995	8
380	TEL	Track	Mark7	COT/DEV	1996	8
381	TEL	Track	Mark7	COT/DEV	1994	8
382	TEL	Track	Mark7	COT/DEV	1995	8
383	TEL	Track	Mark7	COT/DEV	1994	8
384	TEL	Track	Mark7	COT/DEV	1995	8
385	TEL	Track	Mark7	COT/DEV	1994	8
386	TEL	Track	Mark7	COT/DEV	1998	8
387	TEL	Track	Mark7	COT/DEV	1993	8
388	TEL	Track	Mark7	DEV	1997	8
389	TEL	Track	Mark7	DEV	1996	8
390	TEL	Track	Mark7	DEV	1997	8
391	TEL	Track	Mark8	COT/DEV	1997	8
392	TEL	Track	Mark8	COT/DEV	1997	8
393	TEL	Track	Mark8	COT/DEV	1997	8
394	TEL	Track	Mark8	COT/DEV	1994	8
395	TEL	Track	Mark8	COT/DEV	1995	8
396	TEL	Track	Mark8	COT/DEV	1995	8
397	TEL	Track	Mark8	COT/DEV	1995	8
398	TEL	Track	Mark8	COT/DEV	1998	8
399	TEL	Track	Mark8	COT/DEV	1992	8
400	TEL	Track	Mark8	COT/DEV	1995	8
401	TEL	Track	Mark8	COT/DEV	1996	8
402	TEL	Track	Mark8	COT/DEV	1997	8
403	TES	CVD	Challenger 300	DCVD	2008	–
404	Ultratech	Stepper	1500	Lithography	2000	6
405	Ultratech	Stepper	1500	Lithography	2000	6
406	Ultratech	Stepper	1500	Lithography	1996	6
407	Ulvac	Asher	RISE-200	Asher	2006	8
408	Ulvac	PVD	Ceraus Z-1000	Metal	–	8
409	Ulvac	PVD	Ceraus ZX-1000	PVD	2000	8
410	Ulvac	PVD	Ceraus ZX-1000	PVD	2000	8
411	Ulvac	PVD	Ceraus ZX-1000	PVD	2000	8
412	Ulvac	PVD	Ceraus ZX-1000	PVD	1995	8
413	Ulvac	PVD	Ceraus ZX-1000	PVD	1996	8
414	Ulvac	PVD	Ceraus ZX-1000	PVD	1996	8
415	Ulvac	PVD	Entron EX	TSV Bump UBM	2006	12
416	Ulvac	PVD	Entron EX W300	PVD	2007	12
417	Ulvac	PVD	Entron EX W300	PVD	2011	12
418	Ulvac	PVD	Entron S	PVD	–	12
419	Ulvac	PVD	Entron T	PVD	–	12
420	UNAXIS	PVD	LLS900	PVD	–	8
421	Ushio	Track	UMA-1002-HC93FS	Stabilizer	1997	8
422	Ushio	Track	UMA-1002-HC93FWL	Stabilizer	1997	8
423	Veeco	Metrology	UVX310	Step Profiler	2003	8
424	Veeco	Metrology	V200	Profiler	–	8
425	WONIK IPS	CVD	Bluetain	MCVD	2008	12
426	Yield Engineering System	Others	YES-5	Lithography	–	6
427	Yield Engineering System	Others	YES-5E	Lithography	–	6
428	Yield Engineering System	Others	YES-5E	Lithography	–	6