Description
Please contact us for the availability of the used semiconductor equipment.
| Semiconductor Manufacturing | Model Number |
| CHEMICAL VAPOR DEPOSITION (CVD) | |
| Kokusai DJ815V-8L LPCVD Silicon Nitride Reactor | DJ815V-8L |
| SemiTherm VTP 1500 LH LPCVD Reactor (SiN) | VTP-1500-LH |
| TEL Alpha 8S LPCVD PolySi/SiN/ HTO Reactor | Alpha 8S |
| Thermco 4504 Four-Stack LPCVD Reactor | 4504 |
| EVAPORATION & SPUTTERING (PVD) | |
| Denton DV-502C (CRYO) Thermal Evaporator | DV-502C (CRYO) |
| Riber 2300 MBE | 2300 |
| VCR Group IBS/TM200S Ion Beam Sputterer | IBS/TM200S |
| DIFFUSION & OXIDATION | |
| BTU Bruce BDF-4 Oxidation Furnace (2) | BDF-4 |
| Lindberg Brazing Mesh Conveyor Belt Furnace | |
| TEL Alpha 8S Vacuum Metal Anneal Furnace | Alpha 8S |
| LITHOGRAPHY & PHOTORESIST | |
| Brewer Science CEE 4000 Wafer Track | CEE 4000 |
| FAS Micro-E 200 Extrusion Coater | MicroE-200 |
| GCA ULTRATECH XLS 7800 248nm DUV Stepper | cxlattm01duv |
| Karl Suss MA24 Mask Aligner | MA24 |
| Karl Suss MA25 Mask Aligner | MA25 |
| Karl Suss MA56 Mask Aligner | MA56 |
| SVGL MICRASCAN MPT 193nm Scanner | MICRASCAN MPT |
| Tamarack Scientific 165 Mask Aligner | 165R |
| TEL CLEAN TRACK MARK 8 | MARK 8 |
| RAPID THERMAL PROCESSING | |
| AG Heatpulse 8108 RTA | 8108 |
| DRY ETCHING | |
| AMAT AME-8100 Series Plasma Etcher | AME-8100 |
| GaSonics PEP 4800DL Iridia | PEP-4800DL(L) |
| MRC 51 RIE | RIE 51 |
| STS ASPECT Cluster Etcher | Multiplex Cluster System |
| Technics Micro StrIpper 220 | 220 |
| CHEMICAL MECHANICAL POLISHING (CMP) | |
| IPEC Westech AVANTI 472 Chemical Mechanical Polisher | 472-01001 |
| WET PROCESSING | |
| Amerimade Plastic Cobalt Etch and P-Clean Bench | WPS-4FT-CP7D |
| Amerimade Plastic KOH Wet Bench | WPS-4FT-CP7D |
| Dexon Plastic Au Etch Wet Bench | |
| Dexon Plastic Developer Wet Bench | |
| Dexon Plastic Dilute HF Filtered Etch Baths Wet Bench | 7EBCPS |
| Dexon Plastic Wet Bench | 4PVCS-A |
| Reynoldstech Plastic General Acid Wet Bench | |
| Reynoldstech Plastic Metal-Etch Wet Bench | |
| Reynoldstech Plastic Ni-Plating Wet Bench | Acid Anodize |
| Reynoldstech Plastic Slop Sink | |
| Reynoldstech Plastic Slop Sink | |
| Reynoldstech Plastic TMAH Wet Bench | 4PVCPS-A(MOD) |
| Reynoldstech Stainless Steel Pourous Silicon Etch Wet Bench | Solvent Annodize |
| Verteq Automated Hot Phosphoric Acid Plastic Bench | VSHR-18P T/A 1091458.1 |
| Verteq Automated P-Clean Plastic Wet Bench | 3110387.1 |
| RINSERS AND DRYERS | |
| Semitool ST-270D Rinser/Dryer, 5″ | ST-270D |
| Verteq Single Rinser/Dryer 1800-50 (Cobalt), 8″ | 1800-50 |
| Verteq Single Rinser/Dryer 1800-50 (Gen. Etch Bench), 8″ | 1800-50 |
| Verteg Single Rinser/Dryer 1800-50 (Dry Only), 8″ | 1800-50 |
| WAFER TESTING | |
| Dektak 3030ST Surface Profiler | 3030ST |
| Dektak 3030 Surface Profiler | 3030 |
| Electroglas 690 Prober | 690 |
| Keithley Quantox 64000 Silicon and Oxide Monitoring System | 64000 |
| Metricon 2010 Prism Coupler | 2010 |
| Nanometrics Nanospec/AFT Model 200 | 200 |
| Nicolet Magna 560 FTIR Spectrophotometer | MAGNA |
| Prometrix Omnimap RS35e Resistivity Mapping System | RS35e |
| Rudolph AutoEL Ellipsometer | TT NIR 3W/3 2.4E |
| Tencor P-1 Long Scan Profiler | 0995454 |
| Tencor SurfScan 6200 | 168904 |
| Umech Technologies Microvision Networked Probe Station | |
| Veeco Dektak 200-Si Profilometer | 333909 |
| METROLOGY AND INSPECTION | |
| BioRad Quaestor Q7 Overlay Metrology System | Y7000550 |
| Digital Instruments Nanoscope III Multi-mode SPM System | Nanoscope III |
| Leitz Ergolux Microscope | Ergolux |
| Nikon Measurescope UM2 with Nikon AFX-IIA | UM2 (No. 30089) |
| Reichert-Jung Polyvar MET Microscope | 30064 |
| Zeiss AXIOMAT NAC Microscope | AXIOMAT NAC |
| Zygo Interferometer | |
| WAFER HANDLING & ROBOTICS | |
| Genmark GENCOBOT 4/3L CLASSIC Robot | GB/4P-20 |
| GAS CABINETS | |
| Air Products GG AP10 (Fluorine) Gas Cabinet | 46308 |
| Air Products GG250 (Fluorine) Gas Cabinet | 801-4513808 |
| Air Products GG250 (Fluorine) Gas Cabinet | 801-4702887 |
| Air Products GG250 (C4F8) Gas Cabinet | 801-4704440 |
| Air Products GG250 (HBr) Gas Cabinet | 801-4702500 |
| Air Products GG250 (HF) Gas Cabinet | 801-4705437 |
| Air Products GG250 (Nitric Oxide) Gas Cabinet | 801-4701898 |
| Air Products GG250 (Forming Gas) Gas Cabinet | 801-4701973 |
| Air Products GG250 (CH4+N2) Gas Cabinet | 801-4702466 |
| Air Products GG500 (Silane) Gas Cabinet | 801-470919 |
| Air Products (CO2) Gas Cabinet | 809-416941 |
| Homemade (TEOS Delivery) Gas Cabinet | |
| SemiGas (CH3F) Gas Cabinet | |
| SemiGas (NF3) Gas Cabinet | 801-P-459897 |
| LASER WELDER | |
| Newport LASERWELD Series 4000 3-Beam Laser Welding Station | LW4500 |
| LEAK DETECTOR | |
| Varian Portatest II Vacuum Leak Detector | 956 |
| LASERS | |
| Cymer ELS 4000 Laser System | ELS-4000 |
| Cymer ELS 5600 Laser System | ELS-5600 |
| Lambda Physik COMPex 150 Laser System | COMPex 150 |
| Lambda Physik NovaLine Litho | Novaline Litho 193-25 |
| HOODS | |
| Air Control Inc. Custom Laminar Flow Fume Hood | 4F-55-4-SS |
| Amtec Hood | |
| Envirco Corp, Resist Apply Laminar Flow Hood | NA |
| Polyimide Apply Hood | NA |
| OVENS | |
| Blue M Oven | CR07-206B/C |
| Blue M/Lindberg Oven | GO1300A |
| Cole Parmer Vacuum Oven | 273700 |
| Fisher Scientific ISOTEMP Model 281 Vacuum Oven | 281 |
| OTI Oven | |
| Quincy Lab (QL) 10 Laboratory Oven | 10GC |
| YES-6 HMDS Oven | YES-6 |
| YES-310 HMDS Oven | YES-310 |
| YES-310 HMDS Dual Function Oven | YES-310 |
| MONITORING SYSTEMS | |
| Siemens PLC Alarm Response System | |
| Swan Oxygen Trace System | Oxy Trace, Type 2113 |
| Victor Associates Exhaust Monitor (x2) | |
| Zellweger CM-4 | CM-4 |
| Zellweger MDA System 16 | System 16 |
| Zellweger MDA System 16 (for Spare parts) | System 16 |
| QUARTZ TUBE CLEANER | |
| Solitec VQC-200 Vertical Quartz Tube Cleaner | BJ-60/100/120 |
| WATER HEATERS | |
| Lufran DI Water Heater | 075-RE-480-100-u |
| Process Technology Water Heater | HCT544-G |
| WATER PURIFICATION SYSTEM | |
| US Filter DI Purification System | CP-100 |
| US Filter DI Purification System for Dainippon Screen FC 821L | |
| UPS | |
| EXIDE Electronics Powerware Plus 500 UPS (Model 500) | 500 |
| EXIDE Powerware Plus 12/8 UPS | 12/8 |
| Ferrups FE Series UPS | FE 5.3KVA |
| REFRIDGERATORS | |
| Norlake Scientific Refrigerator Storage | NSPR211 |
| Norlake Scientific Refrigerator Storage | NSPR211 |
| AIR TABLES | |
| AIR TABLE (30″W x 36″L x 30″H) | |
| AIR TABLE (30″W x 36″L x 30″H) | |
| AIR TABLE (30″W x 30″L x 30″H) | |
| AIR TABLE (30″W x 30″L x 30″H) | |
| AIR TABLE (30″W x 48″L x 30″H) | |
| SERVA BENCH AIR TABLE (30″W x 36″L x 30″H) | Mark IV-2 |
| Kinetic Systems Vibraplane Air Table (54″W x 38″L x 36″H) for KLA8100 | 330601-03-0082 |
| Kinetic Systems Vibraplane Air Table (46″W x 46″L x 37″H) for Optiprobe2600 | 4046-36-6400 |
| Kinetic Systems Vibraplane Air Table (40″W x 44″L x 36″H) for BioRad | 4440-36-9600 |
| Kinetic Systems Vibraplane Air Table (36″W x 71″L x 36″H) for KLA-Rutgers | 308028-04-0081 |
| TMC MICRO-g Air Table (46″W x 55″L x 27″H) for Optiprobe 5240 | 672813201 |
| TMC STACIS (67’W X 101″L X 5″D) -used for ASML | |
| STATIC TABLES | |
| STATIC TABLE (42″W x 48″L x 27″H) | |
| STATIC TABLE (30″W x 48″L x 30″H) | |
| OPTICAL TABLES & LEGS | |
| Newport Research Series Plus High Performance Sealed Hole Table (48″W x 144″L x 12″D) | NA |
| Newport Sealed Hole Table (48″W x 72″L x 8″D) | NA |
| Newport Research Series Sealed Hole Table (48″W x 120″L x 8″D) | NA |
| Newport Research Series Sealed Hole Table (48″W x 120″L x 8″D) | NA |
| Newport RS4000 Sealed Hole Table with Tuned Damping (48″W x 96″ x 8″D) | RS4000 |
| Newport Scientific Series Performance Sealed Hole Table (48″W x 120″L x 8″D) | NA |
| Newport Sealed Hole Table (48″W x 72″L x 8″D) | NA |
| Newport Sealed Hole Table (48″W x 144″‘L x 12″D) | NA |
| Newport Research Series Sealed Hole Table (36″W x 84″L x 8″D) | NA |
| Newport Research Series Sealed Hole Table (48″W x 72″L x 18″D) | |
| Ealing Optical Table (60″L x 40″W x 8″D) | |
| Newport Static Leg Set (4 legs) (22 1/2″ Height) | NA |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) (27 1/2″ Height) | XL-A |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) (24 1/2″ Height) | XL-A |
| Newport Pneumatic Isolation Mount XL-B Leg Set (4 legs) (27 1/2″ Height) | XL-B |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) (27 1/2″ Height) | XL-A |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) (27 1/2″ Height) | XL-A |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) (23 1/2″ Height) | XL-A |
| Micro-g TMC Leg Set (4 legs) (24 1/2″ Height) | 14-436-00 |
| Micro-g TMC Leg Set (4 legs) (24 1/2″ Height) | 79-19239 |
| Newport 1-VH-4280 Leg Set (4 legs) (28″ Height) | |
| NRC Pneumatic Isolation Mount XL-A Leg Set (4 legs) | |
| Newport Stabilizer High Performance Laminar Flow Isolator Leg Set (2 legs) (24 1/2″ Height) | I-2000 |
| WIRE BONDERS | |
| Kulicke and Soffa Wire Bonder | 4123 |
| WEST BOND Manual Wire Bonder | 7777-16-23-34 |
| ELECTRONIC TESTING | |
| Ando AQ6310C Optical Spectrum Analyzer/Ando AQ-6002 Side-Mode Measuring Unit | AQ6310C/AQ6002 |
| HP 4194A Impedance/Gain-Phase Analyer | 4194A |
| HP 4274A Multi-Frequency LCR Meter | 4274A |
| HP E8402A VXI Mainframe | E8402A |
| Tektronix 7403N Oscilloscope | 7403N |
| CHILLERS | |
| NesLab CoolFlow CFT-33 Chiller | 332151 |
| NesLab CoolFlow HX-150 Chiller (x2) | HX-150 |
| DICING SAW | |
| MicroAutomation M-1100 Programmable Dicing Saw | M-1100 |
| LAMINATORS | |
| TMP 18″x18″ High Temperature Lamination Press 3000 psi | 50 ton |
| MBE INJECTORS | |
| Varian MBE Gas Injector (1/4) | 05-704515-01 |
| Varian MBE Gas Injector (2/4) | 05-704515-02 |
| Varian MBE Gas Injector (3/4) | NA |
| Varian MBE Gas Injector (4/4) | NA |
| GAS SCRUBBERS | |
| Hitachi SCDS | CD-60 |
| SILICON WAFERS | |
| Non-Metal High Resistivity Si Wafers 8″ (x776 wafers) | NA |
| Metal Deposited High Resistivity Si Wafers 8″ (x26 wafers) | NA |
| N-type High Resistivity Si Wafers New 6″ (x25 wafers) | NA |
| High Resistivity Si Wafers 6″ (x16 wafers) | NA |
| VACUUM PUMPS | |
| ALCATEL | 2010SD |
| BUSCH (CE 97) | F0 0030A 0H0. XX |
| EBARA Dry Pump | 40X20 |
| EBARA Dry Pump Package (Dual) | 40X20 |
| EBARA Dry Pump Package (Dual) | 40X20 |
| LEYBOLD RUVAC & TRIVAC | WSU251(Top)/D65BCS (Bottom) |
| LEYBOLD DRYVAC2 Dry Pump | DRYVAC2 50B |
| LEYBOLD RUVAC & TRIVAC | WAU251(Top) / D65BCS (Bottom) |
| LEYBOLD | WAU251/D40B |
| LEYBOLD (Refurbished) | NA (Top) / D40BCS (bottom) |
| AUXILIARY ITEMS | |
| Bay Voltex LT-HRE Series Heat Exchanger | LT-HRE-1650-9650-52 |
| BOC Rare Gas Purifier-4 | RGP-4 |
| High Dielectric Constant Measurement System | |
| GCA MANN TYPE 485 Radiometer | 485A |
| Fire Sentry Electro-Optical Fire Detector | FS7-2173 |
| NSK X-Driver | M-ESLZ10CF1 |
| NSK Y-Driver | ESB014CF-01A |
| SPARE PARTS | |
| SPUTTERING TARGETS FOR VARIAN M2000 | Lot # |
| Ta – 5% Al (3N purity), New, Size M, Type Quantum, Al alloy support | 7B2461101 |
| Al – 5% Ti, Used, Size M, Type Quantum, Al alloy support | |
| Al – 0.5% Zr, Used, Size M, Type Quantum, Al alloy support | |
| Zr, Used, Size M, Type Quantum, Al alloy support | |
| 10% Ti – W, Used, Size M, Type Quantum, Cu support | W2448803 |
| Al – Si – Cu, Used, Size M, Type Quantum, Al alloy support | 4715234 |
| Si – B (6N purity), Used, Size M, Type Quantum, Cu support | 34710290027250 |
| Ge (5N purity), Used, Size M, Type Quantum, Cu support | 074215801 |
| Cu, Used, Size M, Type Quantum, Al alloy support | 04709769 |
| W, Used, Size M, Type Quantum, Cu support | 34710290027250 |
| Element Unidentified, Used, Size M, Type Quantum, Al alloy support | 34710290027250 |
| Al – 1% Si, Used, Size M, Type Quantum, Al alloy support | |
| Al – Ti (?), Used, Size M, Type Quantum, Al alloy support | |
| QUARTZWARE FOR SEMITHERM VTP 1500 LH LPCVD | |
| Tower, SiC, 6″ ID, 32.5″ L, New, APOGEE (x1) | |
| Tower, Quartz, 5″ ID, 20.3″ L, New (x2) | |
| Tower, Quartz, 6″ ID, 20.3″ L, New (x4) | |
| Tower, Quartz, 8″ ID, 20.3″ L, New (x2) | |
| Tower, Quartz, 4″ ID, 20.3″ L, Used (x1) | |
| Tower, Quartz, 6″ ID, 20.3″ L, Used (x1) | |
| Tower, Quartz, 8″ ID, 20.3″ L, Used (x4) | |
| Bell Jar, 9″ ID, 30″ L, New (x1) | |
| Bell Jar, 9″ ID, 30″ L, Used (x4) | |
| Tower Base (x5) | |
| Exhaust Sleeve (x4) | |
| Tower Base Plate (x2) | |
| Tower Shield (x1) | |
| Quartz Inject Holder (x8) | |
| Thermocouple sheaths (19) | |
| Gas Snorkels (31) | |
These items are subject to prior sale without notice. These items are only for end users.
SS6570
