Main Maker

STS PRO -ICP

STS PRO ICP Etcher

SKU: STS Multiplex ICP -5-1 Category:

Description

STS PRO ICP Etcher, Located in Morgan Hill,CA,USA

  1. The system was fully operational prior to deinstallation in a Fab in Silicon Valley.
  2. Process pump: Edwards IH80 or equivalent (not included, optional at extra cost)
  3. Leybold Turbo is on the chamber and a Varian scroll pump is used on the load lock.
  4. Gases ran were N2, O2, Cl3 and Argon
  5. This system runs 2” wafers
  6. Chuck type: ESC , 2 inch now. Can be upgraded for 4 inch, 5 inch, 6 inch, 8 inch.
  7. Chamber: Single
  8. Model number and/or a shot of the serial plate.  MP0607
  9. Vintage 2008
  10. Process before deinstallation : InP etch process
Price Term: AS IS,WHERE IS
Options: We can also sell it at extra cost at (1) Complete, Working, functional test; (2) Refurbished condition with warranty . Pls contact us for detail. Appreciate your time.

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