Description
STS PRO ICP Etcher, Located in Morgan Hill,CA,USA
- The system was fully operational prior to deinstallation in a Fab in Silicon Valley.
- Process pump: Edwards IH80 or equivalent (not included, optional at extra cost)
- Leybold Turbo is on the chamber and a Varian scroll pump is used on the load lock.
- Gases ran were N2, O2, Cl3 and Argon
- This system runs 2” wafers
- Chuck type: ESC , 2 inch now. Can be upgraded for 4 inch, 5 inch, 6 inch, 8 inch.
- Chamber: Single
- Model number and/or a shot of the serial plate. MP0607
- Vintage 2008
- Process before deinstallation : InP etch process
Price Term: AS IS,WHERE IS
Options: We can also sell it at extra cost at (1) Complete, Working, functional test; (2) Refurbished condition with warranty . Pls contact us for detail. Appreciate your time.
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