STS PRO ICP Etcher, Located in Morgan Hill,CA,USA
- The system was fully operational prior to deinstallation in a Fab in Silicon Valley.
- Process pump: Edwards IH80 or equivalent (not included, optional at extra cost)
- Leybold Turbo is on the chamber and a Varian scroll pump is used on the load lock.
- Gases ran were N2, O2, Cl3 and Argon
- This system runs 2” wafers on a pallet that holds 4 wafers. Loaded one at a time.
- Clamp type: SEMCO ESC Clamp Type
- Max wafer size: 2 inch and 4 inch. Capable for 6″, 8″ at extra cost.
- Chamber: Single
- Model number and/or a shot of the serial plate. MP0607
- Vintage 2008
- Process before deinstallation : InP etch process