Description
The RTP-600S system is an advanced benchtop rapid thermal processing system with multi-gas capabilities. The system processes wafers up to 6″ in diameter. The integrated process control system features real-time graphics, recipe management, data acquisition and display and has a comprehensive diagnostic function.
Key Features:
- Easy to use
- Wide temperature range
- A favorite for R&D
- Widely used by Universities
- Accurate temperature control
- Close temperature uniformity
- Process repeatability
Rapid Thermal Process, Rapid Thermal Processing, Rapid Thermal Anneal, Rapid Thermal Annealing, Rapid Thermal Oxidation, Rapid Thermal Nitride, RTA, RTP, RTO, RTN,, Semiconductor Equipment, Used Semiconductor Equipment, Semiconductor Process Equipment, AG210, AG310, AG 410, AG610, AG 610I, AG Associates, Heatpulse 210, Heatpulse 410, Minipulse 310, Heatpulse 610, Heatpulse 610I, AG Heatpulse 410, AG Heatpulse 610, AG Heatpulse 210, AG Minipulse 310, Atmospheric Rapid Thermal Process, Vacuum Rapid Thermal Process, Furnace, Oven, Thermal Furnace, Thermal Process, Thermal Processing,JIPELEC, ag2146,JetClip,JetStar, AST SHS2000, AST STEAG 2800, ssintegration, Rapid Thermal Oxide,JetFirst ,Mattson, annealsys, heatpulse ,ag 2146,Koyo Thermo Systems,AST STEAG-MATTSON 2800, heat pulse, Solaris, Eclipse ,modularpro, RLA-1000, AG Heatpulse, rapid thermal processor, Steag AST SHS2000, Solaris 75, Solaris75,STEAG Electronic Systems ,eng-sol, Annealsys, RLA-3000, Engineering Solutions ，Solaris 150, Rapid Thermal Annealer , AS-Master ,modularpro,RTO ,Modular Process Technology, Solaris150,AS-One,AS-Micro.Modular Process Technology supplies advanced RTP process solutions with the industry’s highest productivity. The MODULAR One™ multi-chamber RTP system enables high capacity manufacturing of leading edge devices and sets a new standard of performance and reliability for 300mm or 200mm wafer processing. Modular Process Technology also supplies the RTP-3000, a production 300mm or 200mm RTP system, the RTP-3000autoloader, a production susceptor solution for the compound semiconductor sector, the RTP-800S for pilot production, the RTP-600S for process monitoring and process development, and the UV-RTP and UV stand alone systems which incorporate UV-Ozone processing capability. The following is a list of our products:Rapid Thermal Processing Production System: MODULAR One™ (200 mm);Rapid Thermal Processing System: RTP-3000 (300 mm or 200mm or 200mm w/Susceptor Autoloader) ; Rapid Thermal Processing System: RTP-800S (200 mm); Rapid Thermal Annealing System: RTP-600S (150 mm) ;UV-RTP System: UV-RTP-600 (150 mm);UV-OZONE Cleaning System: UV-600 (150 mm)
Modular Process Technology is a semiconductor equipment manufacturer of Rapid Thermal Processing Systems, hybrid UV-RTP systems, and stand alone UV Ozone Cleaning Systems. There are many unique features incorporated into our product lines which make our products attractive to advanced research and development and manufacturing. Modular Process Technology has in-depth experience in fundamental materials science research and process development. Our extensive process technology is reflected in the quality of our system design and integration.
