Refurbished 150MM CVD AMAT P5000

Description

Refurbished 150MM CVD AMAT P5000

Quantity: 1 set

Location: CA USA, SS1075

Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.

Condition: Refurbished with OEM Specifications

Product info for your reference:

Refurbished 150MM CVD P5000
 Mark II Mainframe
 208VAC 50/60Hz
 Dual SATA RAID hard drive
 Compact flash floppy emulator
 Flat Screen Monitors x2
 8 slot storage elevator
 Phase III robot
 AMAT 0 Heat Exchanger
 Remote AC frame with three (3) ENI OEM 12B 13.56Mhz generators
 28 slot Gas Panel

Chamber A: Silane SiO2 PECVD Chamber
 Standard chamber
 SiO2 lid with single gradient feed thru
 Throttle valve
 Lamp module
 Phase IV RF match
 Manometer
 MFC’s calibrated to customer specification
( Customer needs to specify the gas and flow range )

Chamber B: SiN PECVD Chamber
 Standard chamber
 SiN lid with single gradient feed thru
 Throttle valve
 Lamp module
 Phase IV RF match
 Manometer
 MFC’s calibrated to customer specification
( Customer needs to specify the gas and flow range )

Chamber C: Blank
Chamber D: Blank

Installation onsite service is included.

Does Not Include:
 Facilities installation such as electrical, facilities cooling water, vacuum and gas lines, exhaust, rigging, etc.
Option :
 Refurbished QDP80 Pumps with AMAT Controller for P5000 x 3

P5000 REFURBISHMENT SCOPE OF WORK

The refurbished P5000 include these new parts:
 Susceptor
 Showerhead
 Blocker
 Etch quartz, silicon and other consumable parts
 Pumping plate adapter
 Heater window
 Slit window
 Endpoint window
 Hybrid seal
 Susceptor and lift bellows
 Etch cathode bellows
 Lamp bulbs
 All o-rings and seals (Chemrez o-ring for etch and Kalrez for CVD chambers)
 All hoses
 New bellows in all rough and isolation valves
 Shaft seals in the load locks
 I/O slit valve o-ring

We perform complete rebuilds on the following parts:
 CVD wafer and susceptor lifts
 Robot
 Lamp module
 Gate valves
 Throttle valves
 Heat exchangers
Parts Refurbished by Outside Vendors:
 RF matches
 MFC’s, LFM’s and injectors
 Manometers
 Turbo pumps
 Ozonators
 Etch chambers, lids, liners, etc. anodization
 Powder coating of panels and remote frames
Complete Tier 1 Mechanical testing includes:
 Leak checking/ leak rates of all chambers to OEM specification
 Wafer handling 500 wafers with no faults or warnings under typical process conditions
 Strike N2 plasma in chambers
 Heat/cool chambers to process temperatures
 Complete test of all power supplies, matches, generators, modules etc.