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PVA TePla Ion 40

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Description

The  PVA TePla Ion 40 Barrel Plasma Reactor System Plasma Cleaner, Etch, Strip is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time!

Location: USA

Condition: Used

Quantity: 1 set available

Condition: Used. We can sell them at : (1) AS IS condition, (2) Complete, working, functional test condition.

Info from websites on the system for your reference only.

The IoN 40 Plasma System is a barrel plasma reactor designed for R&D and production applications.  The technology is based on the proven reactor designs developed over the course of 50+ years by International Plasma Corporation, Branson IPC, Dionex, Gasonics, Metroline, TePla and finally PVA TePla.  PVA TePla is a proven and trusted resource globally for high-quality, reliable, cost-effective and easy to operate Gas Plasma Systems.  It offers some of the most advanced and innovative solutions for a wide variety of applications.

  • Plasma Surface Treatment & CVD Deposition
  • RF Plasma System

Features Include:

  • Small footprint table top design
  • Plug and play self installation
  • Flexible electrode
  • Industrial computer with LCD touch panel and keyboard.
  • Windows based operating system.
  • Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
  • Multi-level user access
  • Software (installed on system)
  • Recipe editor for fast and versatile step controls
  • Onboard diagnostic features and alarm logging
  • Remote process monitoring via Ethernet
 
Process Chamber
  • Material: Aluminum
  • Dimension: 330 mm W x 483mm D x 229mm H
    (13”x19”x9”)
  • Volume: 36.43 L (1.29 ft3)
  • Mass Flow Controller (MFC): 2 (1 Extra Option)
  • Process Pressure: (0.16 to 2.66 mbar
    (120 to 2000) mTorr)
  • Base Pressure: 0.07 mbar (50 mTorr)
  • Pumping Time: 1 min (Pump dependent)
Plasma Generator 
  • Frequency/Power: 13.56 MHz/600 W
Performance data
  • Uptime: 95%
  • MTBF: >500 h
  • MTTR: <2 h
Facilities Requirements:
  • Electricity: 115V PH: 1
  • Process Gas Input Pressure: 2 bar (30 psi)
  • Purge Gas Input Pressure: 2 bar (30 psi)
  • Compressed Air Input Pressure: 6 bar (88 psi)

Typical Applications:

  • Surface Cleaning
  • Surface Activation
  • Surface Functionalization
  • Deposition of siloxane and organic thin films
ION 40 PLASMA SYSTEM DIMENSION AND WEIGHT
  • 737 mm W x 663 mm D x 711 mm H (29”x26”x28”)
  • Actual Weight: ~380 lbs
  • Shipping Weight: ~500 lbs
Includes:
  • PVA TePla IoN 40 Plasma System
  • Varian Scroll Pump: S4700317 (tested to 32 mTorr)
    • Ultimate Pressure: 10 mTorr
    • Pumping Speed: 8.8 cfm
    • Model: S4700317 believed to be a TS300
    • HP: 3/4
    • RPM: 1725
    • TriScroll Oil-free Vacuum Pump
  • Franklin Electric Motor
    • PN: 1201006408
    • HP: 3/4
    • RPM: 1725
    • Ph:1
    • Weight: 65 Lbs
  • Keyboard & Mouse
  • Nor Cal Products Pneumatic Valve
    • ​PN: ILVP-1502-NWB
  • 1 1/2″ Vacuum Hose
  • 3 Shelves

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