Description
| Item | Part Number | Description |
|---|---|---|
| 1 | 0990-95010 | Lamp, Pushbutton Switch |
| 2 | 0995-16521 | Solenoid, ETO-3 |
| 3 | 0995-16527 | Solenoid, ET-2M |
| 4 | 0101-0479 | Assy, Bellows Upgrade,including one of 0101-0484, 0992-60149, 0992-40211, 0994-60062AW, 0994-60055 |
| 5 | 0992-60149 | Insulator, Bellows Macor |
| 6 | 0994-60005 | O-Ring, Red Silicone (Door) |
| 7 | 0994-60006 | O-Ring, Red Silicone (Reactor) |
| 8 | 0994-60007 | O-Ring, Red Silicone (Bell Jar) |
| 9 | 0994-60019 | O-Ring, Vacuum Valve |
| 10 | 0994-60029 | O-Ring, Vacuum Valve Poppet |
| 11 | 0994-60050 | O-Ring, Chuck Seal |
| 12 | 0994-60055 | O-Ring Silicone (Lifter Pins) |
| 13 | 0994-60062-AW | O-Ring Kalrez (Lifter Pins) |
| 14 | 0994-60063 | O-Ring Kalrez (Chuck) |
| 15 | 0995-10597 | Cylinder, Pancake |
| 16 | 0992-60094 | Ceramic Ring |
| 17 | 0992-60126 | Insulator, Lower Reactor |
| 18 | 0992-60135 | Pin Wafer Lifting |
| 19 | 0992-60147 | Quartz Chamber |
| 20 | 0992-60253 | Baffle, Quartz Insulated Reactor |
| 21 | 0995-16512 | Bleed Valve |
| 22 | 0995-99777 | Door Cylinder |
| 23 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 24 | S2100-1008-008 | PCA, Main Control Board |
| 25 | S2100-0105-019 | PCA, Robot Control Board |
| 26 | S2100-0105-010 | PCA, Distribution Board |
| 27 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 28 | A5-0602-A | Computer Board |
| 29 | A5-0603-A | CF Card, 64G |
| 30 | A5-1021 | Memory, 256M DDR333 200PIN, Non-ECC |
| 31 | 0992-60253-1 | Quartz Baffle,WIN, Matrix 105 |
| 31 | 0992-60253-2 | Quartz Baffle, Matrix 105 |
| 32 | A0992-40515 | Ring, Quartz Baffle MTG. |
| 33 | 994-10087 | SCREW, 1/4″ X 3/16″ SKT |
| 34 | 0993-40109 | Pump Ring, |
| 35 | 025-0146 | Resistive Stylus && Mounted Holder |
| 36 | 023-0142 | Tool, Chamber Holder, Matrix |
| 37 | 013-4000-05A | Robot Teaching Wafer, 3″ |
| 38 | 028-0016-00 | Cassette Stage 4″/6″Cassette, Including 022-0026,023-0153,023-0156,023-0158,025-0047,025-0143,045-0111,053-0040-02,063-0122-01,063-0276-01,0992-70079,FWIN06-SSS,LWIN06-SSS,SCI06C-0375SS,SCI06C-0500SS |
| 39 | 028-0017-00 | Upgrade kits from 6.125″ to 4/6.125″ |
| 40 | 023-0164-02 | Wafer Aligner Positioner 4″/6.125″ |
| 41 | 94-484-001 | RF control cable,ENI |
| 42 | 064-0002 | Ceramic Ring, 4″ |
| 43 | 025-0500 | Robot, 7″Z x 10.5 |
| 44 | 0995-16519 | Valve Right Angle Matrix |
| 45 | 0101-0369 | Assy., Gas Pressure CONT |
| 46 | W01-00012-B | RF Matching Network, Matrix105 |
| 47 | 0101-0351 | ASSY,ORBITRAN MOTOR UPPER |
| 48 | 0992-40375 | Electrode, Full Mesh Group |
| 49 | 0992-70051 | Electrode, Positive |
| 50 | 0992-30034 | Coil, RF Output Inductor |
| 51 | SA5-0602-B | Computer for Matrix 105 and Tegal |
| 52 | 0995-10575 | Orbitran Pot Assembly |
| 53 | 025-0102 | RF Generator,600W, AW-105R,13.56MHz |
| 54 | 0992-40266 | Chamber, 6″ Insulated |
| 55 | 1000-0049 | PCA, Process interface board |
| 56 | 0995-16524 | Isolation Valve,1/2 VCR Male,NC |
| 57 | 0992-30035 | STRAP, GROUND |
| 58 | 023-0127 | Spiral, Hold RF Coil |
| 59 | 29-464-001 | Kit,Fid-upgr Chamber Ground |
| 60 | A5-1021 | Memory, 256M |
| 61 | 0101-0067 | MATRIX Program Card |
SS220