Description
Model: LAM TCP9408 SE SOLD
Category: Plasma Etch
Original Equipment Manufacturer: Lam Research
Condition: Unhooked, Complete,Working
Process: POLY ETCHER
Wafer Size: 8-inch
Valid Time: Subject to prior sale
Vintage: 2004
Serial Number:4445
Software Version: 1.6.012A
Main System:LAM POLY ETCHER
SMIF System: ASSYST (2 Units)
Process Chamber: 1 Unit
AC Power Box: 1 Unit
RF rack: 2 Units
Inspection: Against appointment after PO and payment.
Equipment Configuration:
- Machine Serial Number 4445
- Chamber config Type TCP 9408SE
- TCP RF Match Part No. 853-032294-002
- Bias RF Match 853-330951-021
- ESC Power Supply 810-017086-018
- Chamber manometer. MKS Make (All) E29B-22205
- Turbo Manometer MKS Make (All) 625A-14059
- Ref Manometer MKS Make (All) 625A-14059
- Turbo Pump STP-H1303CV3
- TCP RF Gen. -AE Make(All) 660-024637-026 RFDS
- BIAS RF Gen.AE Make( All) 660-024637-028 HALO
- Wafer Drag Back ENABLE
- Gas Ring Capacitance 1200+/-15pf
- Software Version 1.6.2
- MFC Config.CL2-200 sccm 198
- MFC Config.O2-100 sccm 100
- MFC Config.HE/O2-20 sccm 20
- MFC Config.CF4-100 sccm 100
- MFC Config.HBR-500 sccm 500
- MFC Config.SF6-100 sccm 100
- MFC Config.HE-500 sccm 500
- MFC Config.CL2-30 sccm 30
- TCP Coil position 8 O’CLK
- Chiller used BOC 40/80
- Vat Vale/Pendulum Valve Pendulum
- PC Pump A30W
- Load Lock Pump A70
- Turbo Pump capacity 1300L
All the Lam Plasma Etcher equipment trademarks belongs to Lam Research , the original equipment manufacturer. All rights reserved.
