Main Maker

LAM TCP9400 SE -4065

LAM TCP9400 SE, Lam Research, Unhooked , Poly Etcher, Wafer Size: 8-inch, Vintage: 1997, Serial Numbe 4065, Software Version: 1.6.1

Category:

Description

Model: LAM TCP9400 SE

Category:  Plasma Etch

Original Equipment Manufacturer: Lam Research

Condition:  Cold Shut down, Complete,Working

Process: POLY ETCHER

Wafer Size: 8-inch

Valid Time: Subject to prior sale

Vintage: 1997

Serial Number:4065

Software Version: 1.6.1

CIM: Linked

Main System:LAM POLY ETCHER

SMIF System: ASSYST (2 Units)

Process Chamber: 1 Unit

Edwards 40/80 TCU: 1 Unit

Ebara Pump: 3 Units

Inspection: Against appointment after PO and payment.

Equipment Configuration:

  • Machine Serial Number 4065
  • Chamber config Type TCP 9400SE
  • TCP RF Match Part No. 853-032294-002
  • Bias RF Match 853-025083-001
  • ESC Power Supply 810-017086-010
  • Chamber manometer. MKS Make (All) E29B-23813
  • Turbo Manometer MKS Make (All) 625A11TDE
  • Ref Manometer MKS Make (All) 625A11TDE
  • Turbo Pump STPH-2000L
  • TCP RF Gen. -AE Make(All) 660-24637-006 RFDS
  • BIAS RF Gen.AE Make( All) 660-024637-013 HALO
  • Wafer Drag Back ENABLE
  • Wafer Offset alignment Alignment 300
  • Gas Ring Capacitance 1300+/- 15 pf
  • Software Version 1.6.1
  • MFC Config.CL2-200 sccm 190
  • MFC Config.O2-20 sccm 100
  • MFC Config.HE/O2-200 sccm 20
  • MFC Config.CF4-100 sccm 100
  • MFC Config.HBR-500/300sccm 525
  • MFC Config.SF6-100 sccm 100
  • MFC Config.HE-500 sccm 500
  • MFC Config.CL2-30 sccm
  • TCP Coil position 8 o clk
  • Chiller used BOC 40/80
  • Vat Vale/Pendulum Valve Pendulum
  • PC Pump A30W
  • Load Lock Pump A30W
  • Turbo Pump capacity 2000L
  • TCP RF AO Setting 1250
  • TCP AI Setting 1250
  • TCP REF PWR AI Setting 250
  • BIAS AO Setting 1250
  • BIAS AI Setting 1250
  • BIAS REF PWR AI Setting 250

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