Description
Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.
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We are a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.
| Brand | Part Number | Description |
| Tegal | 30-231-001 | Ring Assembly, Lower Electrode Seal, 90XE |
| Tegal | 31-388-001 | RF Connector Assembly, 9XXE |
| Tegal | 33-085-002 | Bellows, Lower Electrode |
| Tegal | 37-221-001 | Upper Electrode |
| Tegal | 37-221-002 | Upper Electrode |
| Tegal | 37-221-003 | Upper Electrode |
| Tegal | 39-627-002 | Centering Ring, 6″-AL, Tegal 901e Plasma Etcher |
| Tegal | 39-627-003 | Centering Ring, 4″-AL, Tegal 901e Plasma Etcher |
| Tegal | 39-627-004 | Centering Ring, 5″-AL, Tegal 901e Plasma Etcher |
| Tegal | 39-680-003 | Upper Electrode |
| Tegal | 39-687-002 | Flange, Shuttle, 90X |
| Tegal | 39-689-001 | Lifting Screw, 90X |
| Tegal | 39-710-001 | Collar Flag, 90X |
| Tegal | 39-729-001 | Knob Fitting, 900 |
| Tegal | 39-731-001 | Pin Plate, 901E |
| Tegal | 39-731-005 | Pin Plate, 903E |
| Tegal | 39-732-001 | Collar Pin, 90XE |
| Tegal | 39-733-001 | 3″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-733-002 | 4″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-733-003 | 5″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-733-004 | Tegal 903e lower electrode |
| Tegal | 39-733-007 | 6″-AL, Tegal 901e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-001 | 3″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-002 | 4″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-003 | 5″, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-735-004 | Tegal 903e lower electrode |
| Tegal | 39-735-005 | 3″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-006 | 4″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-007 | 5″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-019 | 6″-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-735-020 | 6″ Ped-Ano, Tegal 903e Plasma Etcher Chuck, Table Top/Through the Wall Lower Electrode |
| Tegal | 39-738-001 | Shield, Ground Electrode, Lower, 90XE |
| Tegal | 39-741-001 | 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-002 | 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-003 | 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-005 | 3″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-009 | Tegal 903e lower electrode |
| Tegal | 39-741-010 | 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-011 | 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-019 | Rectangle, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-024 | Read Rite SQR, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-741-025 | 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-741-026 | 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-756-002 | Elbow Bulkhead, Stainless Steel, 9XXE |
| Tegal | 39-756-003 | Elbow, Bulkhead with Fitting, Stainless Steel |
| Tegal | 39-761-001 | Gasket, RF Contact, 9XXE |
| Tegal | 39-767-003 | Coupling Insulator, T/90XE |
| Tegal | 39-927-001 | 3″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-002 | 4″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-003 | 5″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-006 | 4″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-007 | 5″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-008 | Tegal 903e lower electrode |
| Tegal | 39-927-009 | Motorola Special, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-019 | 4″ FA GaAs, Tegal 903e Plasma Etcher Chuck, Table Top Lower Electrode |
| Tegal | 39-927-020 | 6″ FLAT-AL, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 39-927-021 | 6″ Flat-Ano, Tegal 903e Plasma Etcher Chuck, Through the Wall Lower Electrode |
| Tegal | 40-238-001 | Block, Pin Chuck, 900 |
| Tegal | 40-290-001 | Cylinder Stop, 901E |
| Tegal | 40-294-003 | Centering Ring, 4″-AL, Tegal 903e Plasma Etcher |
| Tegal | 40-295-003 | Centering Ring, 5″-AL, Tegal 903e Plasma Etcher |
| Tegal | 40-297-001 | Quartz Pin, 901E |
| Tegal | 40-297-002 | Quartz Pin, 903E |
| Tegal | 40-304-001 | Insulator, Lower Electrode, 90XE |
| Tegal | 40-306-002 | Centering Ring, 6″-AL, Tegal 903e Plasma Etcher |
| Tegal | 40-395-001 | Centering Ring, 6″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| Tegal | 40-395-002 | Centering Ring, 5″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| Tegal | 40-395-003 | Centering Ring, 4″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| Tegal | 40-395-004 | Centering Ring, 3″ Flat-AL, Flat-Ano, Ped-Ano, Tegal 903e Plasma Etcher |
| Tegal | 41-127-001 | Flag Chuck, 901E |
| Tegal | 41-137-001 | Flag Chuck, 903E |
| Tegal | 42-449-001 | Bracket, Shuttle Center, 900 |
| Tegal | 46-272-003 | Plate, Electrode Support, 90X |
| Tegal | 46-467-001 | Plate, Modular Chuck, 90X |
| Tegal | 51-038-002 | Standoff, Lower Electrode, 9XX |
| Tegal | 80-080-065 | Cylinder, Double Stud Mount, 1 in Stroke, 1/2 Bore |
| Tegal | 80-080-072 | Cylinder, Double Ended, 1/2 Stroke, 1-1/8 Bore |
| Tegal | 80-080-077 | Air Cylinder, 3/4 Stroke, 2.09 Stroke, Double Acting |
| Tegal | 80-127-063 | Pan Head Phillips Screw, 10-32 × 1/2, Plated Stainless Steel |
| Tegal | 80-127-101 | Pan Head Phillips Screw, 4-40 × 1/4, Locking, Stainless Steel |
| Tegal | 80-127-142 | Pan Head Phillips Screw, 8-32 × 3/8, Locking, Stainless Steel |
| Tegal | 80-127-262 | Socket Head Cap Screw, 10-32 × 3/8, Plated Stainless Steel |
| Tegal | 80-127-263 | Socket Head Cap Screw, 10-32 × 1/2, Plated Stainless Steel |
| Tegal | 80-127-273 | Socket Head Cap Screw, 10-32 × 1-1/4, Plated Stainless Steel |
| Tegal | 80-127-362 | Socket Head Cap Screw, 10-32 × 3/8, Locking, Stainless Steel |
| Tegal | 80-127-363 | Socket Head Cap Screw, 10-32 × 1/2, Locking, Stainless Steel |
| Tegal | 80-127-584 | Flat Head Phillips Screw, 1/4-20 × 5/8, Locking, Stainless Steel |
| Tegal | 80-152-005 | Hex Nut, 10-32 UNC-2B, Plated Stainless Steel |
| Tegal | 80-162-004 | Flat Washer, #8, Stainless Steel |
| Tegal | 80-163-001 | Lock Washer, External Tooth, #4, Stainless Steel |
| Tegal | 80-163-004 | Lock Washer, External Tooth, #10, Stainless Steel |
| Tegal | 80-163-006 | Lock Washer, External Tooth, 1/2, Stainless Steel |
| Tegal | 80-192-155 | Fitting Straight, 1/4 OD Tube, 10-32 Male Thread, Brass |
| Tegal | 80-192-200 | Fitting Straight, 1/4 ID Tube to 1/8 MNPT Barb |
| Tegal | 80-192-207 | Fitting Adapter, 1/4-1/4 OD Tube Barb, Stainless Steel |
| Tegal | 80-192-236 | Fitting Straight, 1/4 OD Tube to 1/8 MNPT, Stainless Steel |
| Tegal | 80-195-238 | Fitting Plug, 10-32F, Self-Sealing Shut-Off |
| Tegal | 80-195-259 | Fitting Tee, 1/8 ID (2) – .078 ID Tube Barb |
| Tegal | 80-195-284 | Fitting Straight, 1/8 OD Tube, 10-32 Male Thread, Brass |
| Tegal | 80-195-312 | Fitting Elbow, 1/8 MNPT to 1/8 ID Tube Barb |
| Tegal | 80-195-425 | Fitting Straight, 3/8 OD Tube to 1/4 MNPT, Stainless Steel |
| Tegal | 80-198-054 | 24 DC Valve |
| Tegal | 80-200-314 | Cam Follower, 1/2 OD, 8-32 Thread, Stainless Steel |
| Tegal | 80-200-340 | External Ring, 1/4 Shaft, .025 Thick, Stainless Steel |
| Tegal | 80-200-342 | Band Contact, Female, .125 Pin, Stainless Steel |
| Tegal | 80-200-346 | Clamp, 2-Ear, 1/2 Nominal, Crimp, Steel Tubing |
| Tegal | 80-200-366 | Clamp, Worm Gear, 1/4-5/8, Stainless Steel |
| Tegal | 80-202-191 | O-Ring, Viton, 5/16 ID × 3/32 Width, D70 |
| Tegal | 80-202-192 | O-Ring, Viton, 6-1/4 ID × 3/32 Width, D70 |
| Tegal | 80-202-323 | Gasket, .170 ID × .312 OD × .016 Thick, Fiber |
| Tegal | 80-202-357 | O-Ring, Silicone Gray, 6-3/4 ID × 1/4 Width, D40 |
| Tegal | 80-890-030 | Inner Braided PVC Tube, 1/4 ID, Yellow |
| Tegal | 80-890-036 | Inner Braided PVC Tube, 1/4 ID, Black |
| Tegal | 80-890-037 | Inner Braided PVC Tube, 1/4 ID, Red |
| Tegal | 80-890-038 | Inner Braided PVC Tube, 1/4 ID, Gray |
| Tegal | 80-890-045 | Inner Braided PVC Tube, 1/4 ID, Black |
| Tegal | 80-890-046 | Inner Braided PVC Tube, 1/4 ID, Yellow |
| Tegal | 80-890-050 | Inner Braided PVC Tube, 1/4 ID, Clear |
| Tegal | 99-287-003 | Shuttle Interface Board |
| Tegal | S2100-0901-008 | Main control board, Upgrade Kit, Tegal 901e, Tegal 903e |
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