Main Maker

Lam 9600 FEFG -4560

Lam 9600 FEFG, Lam Research, Offline ,  Metal Etcher, Wafer Size: 8-inch, Vintage: 1998, Serial Number:4560, Software Version: Version E1.5-released

Category:

Description

Model: Lam 9600 FEFG                SOLD

Category:  Plasma Etch

Original Equipment Manufacturer: Lam Research

Condition:  In warehouse,Complete,Working

Process: Metal Etcher

Wafer Size: 8-inch

Valid Time: Subject to prior sale

Vintage: 1998

Serial Number:4560

Software Version: Version E1.5-released

CIM: CIM link ok

Inspection: Against appointment after PO and payment.

 Hardware Configuration (Fab):

  1. Main System: TCP9608 Metal Etcher   1 Unit
  2. SMIF System: Integrated SMIF  2 Units
  3. Handler System: Wafer notch alignment with spatula  1 Unit
  4. Process Chambers: Ecthing    1 Unit ; Stripping  1 Unit; Rinse/spin dry  1 Unit
  5. Loadlock:  1 Unit
  6. RF generator 1250W : 3 Units
  7. Manual WVDS controller: 1 Unit

Hardware Configuration (Subfab / Auxilliary Units):

  1. Remote AC box  1 Unit

Equipment Configuration in detail:

Main chamber
Turbo pump 1000litre with controller  1 set
E-chuck  1 unit
TCP RF Match  1 unit
Bias RF Match  1 unit
RF generator  2 unit
100 sccm CL2 MFC  1 unit
50 sccm BCL3 MFC  1 unit
250 sccm O2 MFC  1 unit
20 sccm N2 MFC  1 unit
1000 sccm N2 MFC  1 unit
100 sccm Ar MFC  1 unit
50 sccm He UPC  1 unit

Strip chamber
DSQ RF Match  1 unit
Heater Paddle  1 unit
RF generator  1 unit
Manual WVDS controller  1 unit
2000 sccm O2 MFC  1 unit
300 sccm N2 MFC  1 unit
500 sccm H2O MFC with controller  1 unit

Rinse/Dry
Spin dryer with vacuum chuck  1 unit
Transport
Integrated SMIF 2 unit
Wafer notch aligner with spatula 1 unit
Harmonic arm drive assembly 2 unit

 

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