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CHA MARK 50

Our On Sale Equipment in stock

Categories: Evaporator, Resell Products Tag: CHA

Description

Description

CHA MARK 50 E-BEAM EVAPORATOR ( CHA MARK 50PLC Model)

Condition: Used,Refurbished with warranty and installation

Valid time: Subject to prior sale without notice.

Contact us (sales@semistarcorp.com) for the availability and more info pls. Appreciate your time.

Description:

Can be automatic, manual, and maintenance modes
Crucible: 6-Pocket, 25cc Pockets
Process Chamber Size: 32’’ x 32’’
Ion source with Ar MFC and controller
8” Lift off Dome. Others are optional.
Shutter Assembly, Single Vane Style
TT-10 E-Beam Power Supply and controller
CHA Hi-Vac valve
Telemark Sweep Controller
Telemark Indexing Controller
Telemark 861 Deposition Rate Controller
Inficon Crystal Sensor Assembly
InstruTech Multi Gauges with direct signal to PLC.
Siemens PLC Control System (Recipe Drive, Touchscreen)
CTI CT-400 Cryo Pump, CTI compressor
208 VAC, 5 wire 50/60Htz

SS0992-OEM-0-P-1-1, SS380EB-CHA Mark 50 Vacuum Evaporator, 4″, 6″

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Metrology | Tester | Wafer Carriers
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