AMAT Chamber Parts

Description

Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

Our partner in USA is a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.

OEM System-Model OEM-Part-Number Part-Description
AMAT 0040-95463 300mm Face Plate
AMAT 0040-87765 300mm Face Plate
AMAT emax 0040-33998 Chamber Liner
AMAT 0020-10204 Susceptor Plate 200mm
AMAT 0040-08492 300mm Face Plate
AMAT 0021-61344 300mm Blocker Plate
AMAT 0021-53284 Titanium Ring
AMAT CENTURA 0021-38119 Face Plate 200mm
AMAT 0021-17989 Face Plate 300mm
AMAT 0021-15200 Face Plate 200mm
AMAT 0021-14590 300mm Face Plate
AMAT 0021-12790 Blocker Plate 300mm
AMAT 0021-09914 Blocker Plate 200mm
AMAT 0021-09909 Face Plate 200mm
AMAT P5000 0020-10122 Perf Plate 125mm
AMAT 0021-09008 Chamber Lid
AMAT 0021-09007 Chamber Lid
AMAT 0021-07939 Perf Plate 300mm
AMAT 0021-03637 Face Plate
AMAT 0021-03568 Face Plate 200mm
AMAT 0021-02306 Face Plate 200mm
AMAT 0021-01813 Face Plate 200mm
AMAT 0021-01572 Face Plate 200mm
AMAT 0021-01569 Blocker Plate 200mm
AMAT 0021-01273 Chamber Liner
AMAT P5000 0020-10120 TEOS Perf Plate 150mm
AMAT 0021-00042 Face Plate
AMAT CENTURA 0021-00041 Face Plate 200mm
AMAT 0020-94081 300mm Blocker Plate
AMAT 0020-84596 Face Plate 300mm
AMAT 0020-70842 Blocker Plate 300mm
AMAT 0020-62625 Face Plate 300mm
AMAT 0020-60033 Susceptor Plate 150mm
AMAT 0020-60007 Susceptor Plate 125mm
AMAT 0020-52120 Blocker Plate 300mm
AMAT 0020-51923 Face Plate 300mm
AMAT 0020-10119 Perf Plate 150mm
AMAT 0020-48972 Face Plate 300mm
AMAT 0020-47008 300mm Blocker Plate
AMAT 0020-49785 Face Plate 300mm
AMAT 0020-48891 Blocker Plate 300mm
AMAT 0020-44453 Blocker Plate 300mm
AMAT 0020-42287 Perf Plate 200mm
AMAT 0020-42285 Blocker Plate 200mm
AMAT 0020-34606 Blocker Plate 200mm
AMAT 0020-34775 Blocker Plate 200mm
AMAT 0020-34445 Blocker Plate 200mm
AMAT 0020-10117 TEOS Perf Plate 200mm
AMAT 0020-34444 Face Plate 200mm
AMAT 0020-34297 Chamber Lid
AMAT 0020-34293 Chamber Lid
AMAT 0020-33998 Chamber Liner
AMAT 0020-33538 Perf Plate
AMAT 0020-32952 Susceptor Plate 200mm
AMAT 0020-33366 Blocker Plate 200mm
AMAT P5000 0020-32263 Gas Distribution Plate 145 hole
AMAT P5000 0020-32262 Gas Distribution Plate 133 hole
AMAT P5000 0020-32260 Gas Distribution Plate 37 hole
AMAT 0020-09933 Gas Plate
AMAT P5000 0020-32259 Gas Distribution Plate 119 hole
AMAT 0020-32036 Blocker Plate 200mm
AMAT 0020-32318 Gas Distribution Plate 37 hole
AMAT 0020-31831 Chamber Lid
AMAT P5000 0020-31804 Gas Distribution Plate 80 hole
AMAT 0020-31789 Cover
AMAT 0020-31620 Susceptor Plate 200mm
AMAT P5000 0020-31548 Gas Distribution Plate 133 hole
AMAT P5000 0020-31547 Gas Distribution Plate 101 hole
AMAT P5000 0020-31493 Gas Distribution Plate 133 hole
AMAT 8300 0020-06754 Hex Cover 100mm
AMAT P5000 0020-31492 Gas Distribution Plate 101 hole
AMAT P5000 0020-31490 Gas Distribution Plate 37 hole
AMAT P5000 0020-31488 Gas Distribution Plate 13 hole
AMAT 0020-31088 Susceptor Plate 200mm
AMAT 0020-30919 Susceptor Plate 200mm
AMAT P5000 0020-30816 Gas Distribution Plate 13 hole
AMAT 0020-30797 Perf Plate 200mm
AMAT 0020-30580 Blocker Plate 150mm
AMAT 0020-30446 Blocker Plate 125mm
AMAT 0020-30407 Perf Plate 200mm
AMAT 8300 0020-06447 Insulator Cap
AMAT 0020-30406 Perf Plate 150mm
AMAT 0020-30111 Blocker Plate 200mm
AMAT 0020-30195 Cover
AMAT 0020-30086 Perf Plate 150mm
AMAT P5000 0020-24812 Collimator .750 thick
AMAT P5000 0020-23811 Collimator .625 thick
AMAT 0020-27207 Titanium Clamp Ring 150mm
AMAT 0020-27205 Titanium Clamp Ring 200mm
AMAT P5000 0020-10771 TEOS Perf Plate 150mm
AMAT 0020-10936 Blocker Plate 200mm
AMAT 8300 0020-06231 Hex Cover 125mm
AMAT 8300 0020-00991 Hex Cover 150mm

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